High dielectric ($Ba_{1-x}Sr_x$ )($Ti_{1-x}Zr_x)O_3$ thin film capacitors for semiconductor memory device applications
(반도체 메모리 소자 응용을 위한 고유전 ($Ba_{1-x}Sr_x$ )($Ti_{1-x}Zr_x)O_3$ 박막 캐패시터의 연구)
-
- Proceedings of the Materials Research Society of Korea Conference
- /
- 1998.11a
- /
- pp.73-73
- /
- 1998