• Title/Summary/Keyword: $BaTiO_{3}$

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$(Ba, Sr)TiO_3$박막의 전기적 성질과 전도기구 해석

  • 정용국;손병근;이창효
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.69-69
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    • 2000
  • (Ba, Sr)TiO3 (BST)[1-3] 박막은 유전상수가 크고 고주파에서도 유전특성 저하가 적기 때문에 ULSI DRAM(Dynamic Random Access Memory)에 응용 가능한 물질로 최근 각광을 받고 있다. 하지만, 아직 BST 박막을 DRSM에 바로 적용하기 위해선 몇 가지 문제점이 있다. 그 중 누설전류 문제는 디바이스 응용시 매우 중요한 요소이다. 특히, DRAM에서 refresh time와 직접적인 관련이 있어 디바이스 내의 신뢰도 및 전력소모를 결정하는 주된 인자가 된다. 지금까지, BST 박막의 인가전업, 온도, 그리고 전극물질에 따른 누설전류 현상들이 고찰되었고, 이에 관한 많은 전도기구 모델들이 제시되었다. Schottky emission, Poole-Frenkel emission, space charge limited conduction 등이 그 대표적인 예이다. 하지만 아쉽게도 BST 박막의 정확한 누설 전류 전도 기구를 완전히 설명하는데는 아직 한계가 있다. 따라서 본 연구에서는 제작된 BST 커패시터 내의 기본적인 전기적 성질을 조사하고, 정확한 누설전류 기구 규명에 초점을 두고자 한다. 이를 위해 기존의 여러 기구들과 비교 분석할 것이다. 하부전극으로 사용하기 위해 스퍼터링 방법으로 p-Si(100) 기판위에 RuO2 박막을 약 120nm 증착하였다. 증착전의 chamberso의 초기압력은 5$\times$10-6 Torr이하의 압력으로 유지시켰다. Ar/O2의 비는 이전 실험에서 최적화된 9/1로 하였다. BST 박막 증착 시 5분간 pre-sputtering을 실시한 후 하부전극 기판위에 BST 박막을 증착하였다. 증착이 끝난 후 시편을 상온까지 냉각시킨 후 꺼내었다. 전기적 특성을 측정하기 상부전극으로 RuO2와 Al 박막을 각각 상온에서 100nm 증착하였다. 이때 hole mask를 이용하여 반경이 140um인 원형의 상부전극을 증착하였다. BST 박막의 증착온도가 증가하고 Ar/O2 비가 감소할수록 제작된 BST-커패시터의 전기적 성질이 우수하였다. 증착온도 $600^{\circ}C$, ASr/O2=5/5에서 증착된 막의 누설전류는 4.56$\times$10-8 A/cm2, 유전상수는 600 정도의 값을 나타내었다. 인가전압에 따른 BST 커패시터의 transition-current는 Curie-von Schweider 모델을 따랐다. BST 박막의 누설전류 전도기구는 기존의 Schottky 모델이 아니라 modified-Schottky 무델로 잘 설명되었다. Modified-Schottky 모델을 통해 BST 박막의 광학적 유전율 $\varepsilon$$\infty$=4.9, 이동도 $\mu$=0.019 cm2/V-s, 장벽 높이 $\psi$b=0.79 eV를 구하였다.

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Characterization of relationship between particle size and powder properties for $BaTiO_3$ ($BaTiO_3$의 입도와 분체특성과의 상관 관계 연구)

  • Chun, M.P.;Cho, J.H.;Kim, B.I.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.6
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    • pp.244-251
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    • 2005
  • The relationship between particle size of hydro-thermally synthesized barium titanate powders (BT01, BT02, BT03, BT04, BT05) and the powder properties was investigated by means of particle size, specific surface area, zeta potential, XPS, XRD and SEM. Particle size determined by laser light scattering is closely related with specific surface area and the tetragonality (c/a) obtained from XRD. The specific surface area of the samples inversely decreased with increasing particle size except BT03 powder. BT03 sample showed higher surface area than BT04 sample of equivalent particle size, which was attributed mostly to the agglomeration of particles in terms of SEM image and XRD analysis. Zeta potential increased with increasing particle size with the exception of BT02 and BT03 which showed larger minus value of zeta potential in comparison with other BT powders. Beta potential results of BT02 and BT03 are considered to be related with the dissolution of $Ba^{2+}$ ion in these powers which was examined by XPS.

A Study on the Gas Sensing Properties of $SnO_2$ Gas Sensors Fabricated by Sol-Gel Method (졸-겔법으로 제작된 $SnO_2$ 가스센서의 가스 감응 특성에 관한 연구)

  • Jang, K.U.;Kim, M.H.;Lee, W.J.;Kim, T.W.;Lee, H.S.;Chung, D.H.;Ahn, J.H.;Lee, J.U.;Kim, S.K.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.591-592
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    • 2005
  • PTC Thermistors specimens were fabricated by added $MnO_2$ as donors, and $Nb_2O_5$ as acceptors and sintered $1250^{\circ}C$/2hrs. Average grain size decreased with increased in added $MnO_2$, and increased with added in $Nb_2O_5$. But, appeared liquid phase as $Bi_2O_3$ and $TiO_2$, affect to grain growth. XRD result, peak strength waslowed then crystallization not well, but, secondary phase were not showed all specimens. All specimens resistance were so high, about $40M\Omega$ over, couldn't measured to those resistance and doesn't appear PTCR effect.

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Effect of Organic Processing Parameters in Non-aqueous Tape-casting on Dispersion Stability of Barium Titanate-Borosilicate Glass Based Suspensions (비수계 테잎성형공정의 유기공정변수의 변화에 따른 티탄산바륨-붕규산염유리계 현탁액의 분산안정성)

  • Yeo, Jeong-Gu;Choi, Sung-Churl
    • Korean Journal of Materials Research
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    • v.13 no.11
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    • pp.725-731
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    • 2003
  • The effect of organic processing parameters on the dispersion stability of the BaTiO$_3$-based dielectric particles and borosilicate glass particulate suspensions was investigated in a system where organic solvents, dispersant, binder and modifier were used as processing additives in a low temperature cofired ceramic fabrication processes. Two- and three-component organic solvents were used to disperse ceramic particles and it was found the better stability in the particulate suspension prepared in a bi-solvent, which was consists of toluene and ethanol in a non-azeotropic composition. The addition amount of organic additives had a great impact on dispersion in the present investigation. The flow curves of the suspensions prepared with binder and modifier were fitted according to the power-law equation, which indicates that the internal structure of the suspension could be disturbed under the applied shear stress. Finally, the LTCC green tapes were successfully tape-cast based upon the optimum formulation of LTCC suspension and its microstructure was compared with that of the hard-agglomerates.

The Effect of Energy-absorbing layers on Micro-patterning of Magnetic Metal Films using Nd:YAG Laser (Nd:YAG Laser를 이용한 자성금속막의 패턴 식각에 있어서 에너지 흡수층이 미치는 영향)

  • 이주현;채상훈;서영준;송재성;민복기;안승준
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.6
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    • pp.538-544
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    • 2000
  • The laser patterning of sputter-deposited CoNdZr/Cu/CoNbZr multi-layered films had been tried using Nd:YAG laser. However generally it is very difficult to remove metal films because of their high reflectance of the laser on the surfaces. As a counterproposal for this problem authors for the first time tried to deposit energy-absorbing layers on the metal films and then irradiated the laser on the surfaces of energy-absorbing layers. Here the energy-absorbing layers consisted of laser energy-absorbing fine powders and binding polymers. Three kinds of powders for the energy-absorbing layers had been used to see the difference in the pattern formation with the degree of laser energy absorption. They were electrically conductive silver powders insulating BaTiO$_3$powder and semiconducting carbon powder. Remarkable difference in width of the formed pattern and the roughness of pattern edge were observed with the characteristic of the powder for the energy-absorbing layer. The pattern width using carbon paste was about three times larger than that using BaTiO$_3$paste. It was observed that the energy-absorbing layer with carbon was the most effective on this micro-patterning.

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Analysis on Metal Contact Resistance and Grain Boundary Barrier Height of Ceramic PTC Thermistor (Ceramic PTC thermistor의 금속접촉저항과 입계전위장벽)

  • Jeon, Yong-Woo;Lim, Byung-Jae;Hong, Sang-Jin;Soh, Dea-Wha
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.235-236
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    • 2006
  • The contact resistance and grain boundary potential barrier of ceramic $BaTiO_3$ PTCR were investigated. The electroless plated Ni, evaporated Al, and Ag paste were chosen as electrode materials of PTCR device for comparison analysis before and after heat treatment. The contact resistance of electrode were measured by electrometer (dc), digital multimeter (dc), and LCR meter (ac). In the case of Al electroded samples, the heat treatment and protective oxide layer had high resistance and effect on the stability of PTCR effect against contact resistance degradation, but the Ag-paste had comparably high contact resistance before heat treatment and decreased after heat treatment with safe. On the other hand, the samples with electroless plated Ni electrode had good properties of contact resistance against aging.

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Concentration dependent dielectric properties of Barium Titanate/Polyvenylidene Fluoride (PVDF) and (Bi0.5Na0.5)0.94Ba0.06TiO3/Poly(VDF-TrFE) composite

  • Roy, Ansu K.;Ahmad, Z.;Prasad, A.;Prasad, K.
    • Advances in materials Research
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    • v.1 no.4
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    • pp.285-297
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    • 2012
  • The present study addresses the problem of quantitative prediction of effective complex relative permittivity of Barium Titanate/Polyvenylidene Fluoride (PVDF) and $(Bi_{0.5}Na_{0.5})_{0.94}Ba_{0.06}TiO_3$/Poly(VDF-TrFE) biphasic ceramic-polymer composites. Theoretical results for effective relative permittivity derived from several dielectric mixture equations were fitted to the experimental data taken from the works of Prasad et al. (2010), Wang et al. (2004), Takenaka et al. (1991) and Yamada et al. (1982). The study revealed that out of the different test equations, only a few equations like modified Rother-Lichtenecker equation, Dias-Dasgupta equation or Rao equation for the real part and Bruggeman equation for the imaginary part of complex permittivity well fitted the corresponding experimental results. In the present study, some of the equations were used in their original forms, while some others were modified by choosing suitable shape-dependent parameters in order to get reasonably good agreement with experimental results. Besides, the experimental results have been proposed in the form of a mathematical model using first order exponential growth, which provided excellent fits.

Product and Properties of Embedded Capacitor by Aerosol Deposition (Aerosol Deposition에 의한 Embedded Capacitor의 제조 및 특성 평가)

  • Yoo, Hyo-Sun;Cho, Hyun-Min;Park, Se-Hoon;Lee, Kyu-Bok;Kim, Hyeong-Joon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.313-313
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    • 2008
  • Aerosol Deposition(AD) method is based on the impact consolidation phenomenon of ceramic fine particles at room temperature. AD is promising technology for the room temperature deposition of the dielectrics thin films with high quality. Embedding of passive components such as capacitors into printed circuit board is becoming an important strategy for electronics miniaturization and device reliability, manufacturing cost reduction. So, passive integration using aerosol deposition. In this study, we examine the effects of the characteristics of raw powder on the thickness, roughness, electrical properties of $BaTiO_3$ thin films. Thin films were deposited on the copper foil and copper plate. Electrical and material properties was investigated as a change of annealing temperature. We final aim the effects of before and after of laminated on the electrical properties and suit of embedded capacitor.

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EL Devices for LCD Backlight Based on ZnS:Cu Phosphor (혼합파우더 및 절연박막층을 이용한 PELD의 광학특성)

  • 박수길;조성렬;전세호;엄재석;이주성
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.391-394
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    • 1998
  • Electroluminescence is the light emission obtained by an electrical excitation energy passing through a phosphor under an applied high electrical field. EL are paid much attention on flat panel display as a backlight and indicator, which are divided into ACPRL(alternating-current powder electroluminescent) and ACTFEL(alternating-current powder electroluminescent). In this paper, Electric and emission properties on ACPEL are investigated based on ZnS:Cu phosphor. The basic structure on this is ITO glass/phosphor/insulator/ backelectrode, CR-M which has high efficiency on thermal properties and dielectric Properties was introduced and BaTiO$_3$ as a insulating layer in order to increase app1ied electric field on phosphor. Changing on Dielectric and emission Properties was caused by a different viscosity of binder which filled on space between phosphor particle. 60cd/$m^2$ under 60V, 2kHz sinusoidal was gotten from ACPELD prepared in this work.

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