• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.3
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• pp.1-8
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• 1997

The surface properties after plasma etching of TiW alloy using the chemistries of BCl$_{3}$ and SF$_{6}$ gases with varying mixing ratio have been investigated using XPS(X-ray photoelectron spectrocopy). The elements existed on the etched sampled have been extracted with BCL$_{3}$/SF$_{6}$ ratio and their chemical binding states have also been analysed. It was confirmed that the thickness of native oxide formed on the TiW films is thinner than 10nm by using Ar sputtering. At the same time, the roughness of etched surface has been esamnied using AFM (atomic force microscopy). on the basis of the basis of this results, the relations between the caanges of oxygen contents detected by XPS and the rouhness of etched surface have been discussed. And the etch rate and etched profile of Tiw films have been examined and the changes of the etch rate and etched prfile have been discussed with XPS results. From XPS results, the role of passivation layer consisted of Ti-S compound with XPS results. From XPS results, the role of passivation layer consisted of Ti-S compound has been proposed. Ti-S compound seems to make a role of passivation layer that surpresses Ti-O formation.ion.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.11
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• pp.1535-1542
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• 2001

A high resolution digital cinematic Particle Image Velocimetry(PIV) has been developed. The system consists of a high speed CCD camera, a continuous Ar-ion laser and a computer with camera controller. To improve the spatial resolution, we adopt a Recursive Technique for velocity interrogation. At first, we obtain a velocity vector fur a larger interrogation window size based on the conventional two-frame cross-correlation PIV analysis using the FFT algorithm. Based on the knowing velocity information, more spatially resolved velocity vectors are obtained in the next iteration step with smaller interrogation windows. When the correct velocity vector at the first step is found to be critical, a Multiple Correlation Validation(MCV) technique is applied to decrease the spurious vectors. The MCV technique turns out to improve SNR(Signal to Noise Ratio) of the correlation table. The developed cinematic PIV method has been applied to the measurement of the unsteady flow characteristics of a Rushton turbine mixer. A total of 3,245 instantaneous velocity vectors were successfully obtained with 4 ms time resolution. The acquired spatial resolution corresponds to the conventional high resolution digital PIV system using a 1K ${\times}$ 1K CCD camera.

• Journal of Korean Society for Atmospheric Environment
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• v.11 no.3
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• pp.245-252
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• 1995

Atmospheric aerosols were collected by a High Volume Tape Sampler from March 1992 to December 1993 ar Korean, Cheju, Korea. The water soluble ion concentrations in aerosol were analyzed. The concentrations of cations (N $a^{+}$, $K^{+}$, $Ca^{2+}$, $Mg^{2+}$, N $H_{4}$$^{+}$) were determined by an Inductively Coupled Plazma(ICP) or an Atomic Absorption Spectrometer(AAS), and those of anions (C $l^{[-10]}$ , N $O_{3}$$^{[-10]}$ , S $O_{4}$$^{2-}$) were analayzed by the capillary electrophoresis method. The $Ca^{2+}$, S $O_{4}$$^{2-}$ and N $O_{3}$$^{[-10]}$ concentrations in spring were higher than those in other seasons. The lowest concentrations of these elements were found in summer, largely due to scavenging by frequent rains. Especially the $Ca^{2+}$ concentration on April was three to four times higher than the annual mean concentration. The enrichment factor(E.F.) of each element was calculated. The annual mean E.F. values of the $Ca^{2+}$, $Mg^{2+}$ and C $l^{[-10]}$ in 1992 were the same as those in 1993 except $k^{+}$ and S $O_{4}$$^{2-}$. The correlation formula between all cations and anions for the whole period was Anions = 0.759 * Cations + 0.066.Cations + 0.066.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.863-868
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• 2003

Mixers are used in various industrial fields where it is necessary to intimately mix two reactants in a short period of time. However, despite their widespread use, complex unsteady flow characteristics of industrial mixers are not systematic investigated. The present study aimed to clarify unsteady flow characteristics induced by various impellers in a tank. Impellers arc hydrofoil turbine and neo-hydrofoil turbine types. A high speed CCD camera and an Ar-Ion laser for illumination were adopted to clarify the time-dependent flow characteristics of the mixers. The rotating speed of impellers increased from 6Hz to 60Hz by 6Hz, The maximum velocity around neo-hydrofoil impeller is higher than the hydrofoil type impeller. These two types of turbine shows that typical flow characteristics of axial turbine and suitable for mixing high-viscosity materials.

• Journal of the Korean institute of surface engineering
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• v.41 no.4
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• pp.134-141
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• 2008

We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a variable frequency rf power source($1.9{\sim}3.2$ MHz) for fast tuning without resort to motor driven variable capacitors. We investigated what conditions should be met to make the plasma remotely localized within the quartz tube region without charged particles' diffusing down to a substrate which is 300 mm below the source, using the numerical model. OES(optical emission spectroscopy), Langmuir probe measurements, and thermocouple measurement were used to verify it. To maintain ion current density at the substrate less than 0.1 $mA/cm^2$, two requirements were found to be necessary; higher gas pressure than 100 mTorr and smaller rf power than 1 kW for Ar.

• Progress in Superconductivity
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• v.1 no.2
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• pp.146-150
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• 2000

Step edge Josephson junctions in c-axis oriented $YBa_2Cu_3O_7$ films were fabricated on $CeO_2$ buffered sapphire substrates. The step angle was controlled in the wide range of $20^{\circ}\sim75^{\circ}$ by the Ar ion milling technique. I-V curves of junction fabricated on the thickness ratio of $\sim$0.8 and the step angle of $35^{\circ}$ were exhibited RSJ-like behavior with $I_CR_N$ product of $\sim250{\mu}A$ and critical current density of $\sim2\times10^4A/cm^2$ at 77 K. Critical current of step edge junction was increased linearly with decreasing temperature but the normal resistance was almost constant. Total samples of step edge Josephson junction was satisfied a scaling behavior of $I_CR_N{\propto}(J_C)^{0.5}$.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.275-275
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• 2012

The relative composition of $Cu(InGa)Se_2$ solar cells is one of the most important measurement issues. However, quantitative analysis of multi-component alloy films is difficult by surface analysis methods due to severe matrix effect. In this study, quantitative depth profiling analysis of CIGS films was investigated by secondary ion mass spectrometry (SIMS). The compositions were measured by SIMS using the alloy reference relative sensitivity factors derived from the certified compositions and the total counting numbers of each element. The compositions measured by SIMS were linearly proportional to those by inductively coupled plasma-mass spectrometry (ICP-MS) using isotope dilution method. In this study, the quantification measured by ICP-MS method is compared with the composition calculated by SIMS depth profiles with AR-RSFs obtained from the reference. The SIMS depth profile of CIGS thin films according to the manufacturing condition was converted into compositional depth profile.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.208-208
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• 2011

최근 유연기판 기술을 기반으로 대면적 roll to roll 공정기술 개발이 활발히 연구됨에 따라 이에 적용 가능한 대면적 플라즈마 소스의 중요성이 대두되고 있다. 대면적 플라즈마 처리 공정에 적용 가능한 소스 중 closed drift 타입의 선형 이온 소스는 제작 및 대면적화가 용이함에 따라 다양한 산업 분야에서 사용되고 있다. 선형 이온 소스를 다양한 표면처리 공정에 효과적으로 적용하기 위해서는 방전 특성에 대한 이해를 바탕으로 각 공정에 맞는 이온빔 전류 밀도, 방전 전압 등의 방전 인자 조절이 필수적이다. 본 연구에서는 표면 개질, 식각 및 박막 증착 등의 다양한 분야에 활용 가능한 선형 이온 소스를 개발하였으며, 선형 이온 소스를 통한 표면 식각 공정을 집중적으로 연구하였다. 전극 및 자기장 구조에 따른 선형 이온 소스 내 플라즈마 방전거동 분석을 위해 object oriented particle in cell(OOPIC) 전산모사를 수행하였으며, 이를 통해 식각 또는 증착 공정에 적합한 이온 소스의 구조 및 공정 조건을 예측하였다. 또한 OOPIC 전산모사를 통해 예측된 이온빔 인출 경향을 Faraday cup을 이용한 이온빔 전류 밀도 측정을 통해 확인하였다. 실리콘 기판 식각 공정의 경우, 이온 전류밀도 및 에너지에 따른 식각 거동 분석, 이온빔 입사각 변화에 따른 식각 특성 분석을 통해 최적 식각 공정 조건을 도출하였다. 특히, 이온빔 입사각 변화에 따른 식각률 변화는 일반적으로 알려진 입사각에 따른 스퍼터링율과 유사한 경향을 보였다. 이온빔 에너지 3 kV, Ar 압력 1.3 mTorr 조건에서 기판 정지 상태시 약 8.5 nm/s의 식각 속도를 얻었다.

• Carbon letters
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• v.1 no.1
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• pp.22-26
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• 2000

Raman spectroscopy has been used to investigate the structure of coal tar pitch heat-treated up to $3000^{\circ}C$ by using 514.5 run Ar ion laser line. Four critical temperature ranges were found on pyrolyzing coal tar pitch, which correspond to four distinct processes from disordered carbons to the well-ordered graphite structure. The range of heat treat temperature (HTT) below $1000^{\circ}C$ corresponds to gas evolution during the pyrolysis of coal tar pitch. Above the HTT are correlated to rearrangements of enlarged molecules, growth of the molecules along the direction of plane, finally stacking in the normal direction of the plane, in the respective HTT ranges of 1000-2000, above 2000 and $2500-3000^{\circ}C$.

• Journal of the Korean institute of surface engineering
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• v.39 no.6
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• pp.245-249
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• 2006

In this study, ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on steel substrates(AISI D2) and Si wafers by a hybrid coating system of arc ion plating (AIP) using Ti target and d.c. magnetron sputtering technique using Mo and Si targets in $N_2/Ar$ gaseous mixture. Ternary Ti-Mo-N coatings were substitutional solid-solution of (Ti, Mo)N and showed maximum hardness of approximately 30 GPa at the Mo content of ${\sim}10$. %. The Ti-Mo-Si-N coating with the Si content of 8.8 at. % was a composite consisting of fine (Ti, Mo)N crystallites and amorphous $Si_3N_4$ phase. The hardness of the Ti-Mo-Si(8.8 at. %)-N coatings exhibited largely increased hardness value of ${\sim}48$ GPa due to the microstructural evolution to the fine composite microstructure and the refinement of (Ti, Mo)N crystallites. The average friction coefficient of the Ti-Mo-Si-N coatings largely decreased with increase of Si content. The microstructures of Ti-Mo-Si-N coatings were investigated with instrumental analyses of XRD, XPS, and HRTEM in this work.