• 전자공학회논문지A
• /
• 제30A권7호
• /
• pp.60-74
• /
• 1993

Experiments of RIE of tungsten films using SF$_{6}$ plasma were conducted to investigate the effect of process parameters on etch rate, uniformity, anisotropy, and selectivity. As power increased, the etch rate increased. Maximum etch rate was obtained at 200mtorr As interelectrode spacing increased the etch rate increased for P < 200mtorr while it decreased for P> 200mtorr. Etch rate was maximum at 20 sccm gas flow rate. As substrate temperature increased, the etch rate increased and activation energy was 0.046 eV. In addition, maximum etch rate was acquired at 20% $O_{2}$ addition. The etch rate slightly increased when Ar was added up to 20% while it continuously decreased when N$_{2}$ was added. Uniformity got improved as pressure decreased and was less than 4% for P <100mtorr. Mass spectrometer was utilized to analyze gas composition and S and F peaks were observed from XPS analysis with increasing power. The anisotropy was better for smaller power and spacing, and lower pressure and temperature. It improved when CH$_{4}$ was added and anisotropic etch profile was obtained when about 10% $O_{2}$ was added. The selectjvity was better for smaller power larger pressure and spacing, and lower temperature. Especially. low temperature processing was proposed as a novel method to improve the anisotropy and selectivity.

• 대한기계학회논문집
• /
• 제15권1호
• /
• pp.328-340
• /
• 1991

본 연구에서는 혼합기를 연소실 내로 공급하기 전에 필터를 이용하여 일정 크 기의 미립자를 제거함으로서 가능한 Mie산란의 영향을 감소시키고, 또 화학 발광의 영 향을 제거하기 위하여 광학장치의 개선 및 광학 필터를 사용하였다. 뿐만 아니라 연 소실 내의 배경광 및 반사산란광을 제거하기 위한 방법으로 입사창 및 연소실 내를 모 두 코팅을 하였다. 따라서 레이저 레일레이 산란을 이용하여 지금까지 나타난 문제 점들을 위와 같은 방법으로 개선하였을 뿐만 아니라 측정기술을 향상시켜 정적연소실 내에서의 온도를 측정함으로서 정적연소실 내에서의 온도측정이 가능하다는 것을 확인 하고, 또 그 적응성을 조사하는데 중점을 두어 실험을 하였다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 춘계학술대회논문집E
• /
• pp.536-541
• /
• 2001

A high resolution digital cinematic Particle Image Velocimetry(PIV) has been developed. The system consists of a high speed CCD camera, a continuous Ar-ion laser and a computer with camera controller. To improve the spatial resolution, we adopt a Recursive Technique for velocity interrogation. At first, we obtain a velocity vector for a larger interrogation window size based on the conventional two-frame cross-correlation PIV analysis using the FFT algorithm. Based on the knowing velocity information, more spatially resolved velocity vectors are obtained in the next iteration step with smaller interrogation windows. The correct velocity vector at the first step is found to be critical, so we apply a Multiple Correlation Validation(MCV) technique in order to decrease the spurious vectors. The MCV technique turns out to improve SNR(Signal to Noise Ratio) of the correlation table. The developed cinematic PIV method has been applied to the measurement of the unsteady flow characteristics of a Rushton turbine mixer. A total of 3,245 instantaneous velocity vectors were successfully obtained with 4 ms time resolution. The acquired spatial resolution corresponds the performance of the conventional high resolution digital PIV system using a $1K{\times}1K$ CCD camera.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 춘계학술대회논문집E
• /
• pp.548-554
• /
• 2001

A GA(Genetic Algorithm) based 3D-PTV technique has been developed. The measurement system consists of three CCD cameras, Ar-ion laser, an image grabber and a host computer. The fundamental of the developed technique was based on that one-to-one correspondence is found between two tracer particles selected at two different image frames taking advantage of combinatorial optimization of the genetic algorithm. The fitness function controlling reproductive success in the genetic algorithm was expressed by a kind of continuum theory on the sparsely distributed particles in space. In order to verify the capability of the constructed measurement system, a performance test was made using the LES data set of an impinging jet. The developed 3D-PTV system was applied to the measurement of flow characteristics of the wake of a circular cylinder.

• Journal of Advanced Marine Engineering and Technology
• /
• 제28권6호
• /
• pp.922-930
• /
• 2004

An experimental investigation was performed to study on the generation of air bubble and air core with swirling flow in a horizontal cicular tube. To determine some characteristics of the flow, 2D PIV technique is employed for velocity measurement in water. The experimental rig is manufactured from an acryl tube. The test tube diameter of 80mm, and a length of 3000mm. The used algorithm is the gray leve cross-correlation method(Kimura et al. 1986). An Ar-ion laser is used and the light from the laser(500mW) passes through a probe to make two-dimensional light sheet. In order to make coded images of the tracer particles on one frame, an AOM(Acoustic-Optical Modulator) is used. The maximum axial velocities showed near the test tube wall at y/D =0.1 and y/D =0.9 along the test tube. The higher Reynolds number increase, the lower axial velocities are showed in the center of the test tube. The air bubbles are generated from Re =10,000 and developed into air core from the recirculating water pump rpm equal 30Hz. The pressure and temperature are measured across the test tube at X/D=3.33.

• Progress in Superconductivity
• /
• 제4권2호
• /
• pp.109-113
• /
• 2003

We have developed a planar-type single layer second-order $high-T_{c}$ SQUID gradiometer, which can detect the $d^2$$B_{z/}$dxdy of the second-order field gradient. This SQUID gradiometer consists of four-way 'clover-leaf' pick-up loops and is coupled directly to a 4-junction dc SQUID in such a way that the coupling polarity of the two diagonal loops is opposite to that of the other two loops. The pickup loops are intrinsically balanced for both uniform field and the 1 st-order field gradient. The $YBa_2$$Cu_3$$O_{7}$ thin film was made by pulsed laser deposition method on $SrTiO_3$ single crystal substrate and patterned by photolithography with Ar ion milling technique. Response of this gradiometer was tested for both uniform field and the 2nd-order field gradient. Details of the design, fabrication, and results will be discussed.

• 한국자동차공학회논문집
• /
• 제11권3호
• /
• pp.58-64
• /
• 2003

Dimethyl Ether(DME) has been considered as one of the most attractive alternative fuels for compression ignition engine. Its main advantage in diesel engine application is high efficiency of diesel cycle with soot free combustion though conventional fuel injection system has to be modified due to the physical properties of DME. Experimental study of DME and conventional diesel spray employing a common-rail type fuel injection system with a 5-hole sac type injector was performed in a constant volume vessel pressurized by nitrogen gas. Spray cone angles and penetrations of the DME spray were characterized and compared with those of diesel. For evaluation of the evaporating characteristics of the DME, shadowgraphy technique employing an Ar-ion laser and an ICCD camera was adopted. Tip of the DME spray was formed in mushroom-like shape at atmospheric chamber pressure, which disappeared in higher chamber pressure. Spray tip penetration and spray cone angle of the DME became similar to those of diesel under 3MPa of chamber pressure. Higher injection pressure provided wider vapor phase area while it decreased with higher chamber pressure condition.

• 한국연소학회지
• /
• 제11권3호
• /
• pp.36-43
• /
• 2006

The modulated LII technique has been suggested for the measurement of axial velocity profiles of laminar diffusion flames. The theoretical background is explained based on the blackbody radiation and LII signal. Experimentally, soot particles in ethylene diffusion flames are heated by a modulated Ar-ion laser beam. LII signals and their phase angles are measured using a lock-in amplifier at the different flame heights and the axial flow velocities are obtained from the measured phase angle delay informations. The measured velocities are similar to those from LDV measurements under the same operating conditions. The effects of laser power, LII signal wavelength, and modulation frequencies are not sensitive to the velocity measurement. However, the choice of an optical chopper blade type could affect the measurement result. The use of a 6/5 chopper blade showed the better result that is. possibly due to the square shape of modulated laser beam. This study successfully demonstrated that axial flow velocities of laminar diffusion flames can be measured by a new technique utilizing LII signal, which does not need particle seeding unlikely to LDV or PIV techniques.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
• /
• pp.822-824
• /
• 1998

The lithium polymer battery with polymer electrolyte is expected as a safe and long cycle life battery. This paper reports primarily the recent development results of a solid polymer electrolyte, which is a key point of the secondary battery system. The new type of polymer electrolyte was prepared under a dry Ar atmosphere by dissolving $LiCIO_4$ in a matrix of EC, PC and then dispersing polyacrylonitrile(PAN). Also adding some inorganic filler $Al_2O_3$. The dispersed solution heated at $120^{\circ}C$. The polymer electrolyte were characterized by EIS(Electrochemical Impedance Spectroscopy), TGA(Thermo Gravimetric analysis), DMA(Dynamic Mechanical Analyzer), DSC (Differential Scanning Calorimetry). The lithium ion yield is 0.29 when PAN-$Al_2O_3$ which was applied DC 5mV. The ionic conductivity of PAN, PAN-$Al_2O_3$ polymer electrolytes were showed $1.0{\times}10^{-4}S/cm$, $8.4{\times}10^{-4}S/cm$ at room temperature. When inorganic filler was added in the polymer electrolyte, ionic conductivity and lithium yield more larger than without inorganic filler.

• 대한용접접합학회:학술대회논문집
• /
• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
• /
• pp.781-784
• /
• 2002

Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.