• Title/Summary/Keyword: $Al_2O_3$ sol

Search Result 225, Processing Time 0.026 seconds

이종 타겟을 지닌 대향 타겟 스퍼터링 방법으로 제작된 AZO 박막의 광학적·전기적 특성에 관한 연구

  • ;Seo, Seong-Bo;Bae, Gang;Kim, Dong-Yeong;Choe, Myeong-Gyu;Kim, Hwa-Min
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2014.02a
    • /
    • pp.337-337
    • /
    • 2014
  • 투명 전도성 산화물(transparent conductive oxide: TCO) 박막은 높은 투과율과 낮은 비저항 덕분에 LCD (liquid crystal display), PDP (plasma display panel), OLED (organic light emitting display) 등 평판 디스플레이에 널리 사용되고 있다. 현재 양산되고 있는 ITO (indium tin oxide)는 90% 이상의 높은 투과율과 우수한 전도성으로 인해 TCO 박막 가운데서 디스플레이 산업에서 가장 널리 쓰이고 있다. 그런데, ITO의 인듐산화물에 의한 간질성 폐렴(interstitial pneumonia)의 유발 위험이 있다든가, 인듐의 매장량이 적어 원자재 가격이 비싼 단점도 가지고 있다. 이에 최근 ITO를 대체할 수 있는 TCO물질로 많은 연구가 이루어지고 있는데, 특히 AZO (aluminum-doped zinc oxide)는 그 중 대표적인 대체물질로서 독성이 없고 가격도 저렴하여 많은 관심이 증폭되고 있다. 현재 AZO는 sol-gel 방법이나 CVD (chemical vapor deposition) 또는 스퍼터링 방법 등으로 증착되고 있다. 본 연구에서는 두 개의 이종타겟(hetero target)을 장착한 대향 타겟 스퍼터링(facing target sputtering: FTS) 장치를 사용하여 AZO 박막을 제작한다. 기존의 여러 증착법과 달리, FTS 장치는 두 타겟 사이에 형성되는 플라즈마 내의 ${\gamma}$-전자를 구속하게 되며, 낮은 가스 압력에서 고밀도 플라즈마가 생성되어 빠른 증착 속도와 안정적인 방전을 유지한 상태에서 박막을 증착할 수가 있다. 또한 기판과 플라즈마가 이격되어 있어 높은 에너지를 갖는 입자들의 기판 충돌을 억제할 수 있는 장점들을 갖는다. 이종 타겟인 ZnO와 Al2O3를 사용하고 각 타겟에 인가되는 파워 변화를 통해 AZO 박막 내 Al2O3의 성분비를 조절하였다. ZnO 타겟의 증착 파워를 100 W로 고정할 경우, Al2O3 타겟의 증착 파워가 (50~90) W으로 실험을 하였으며, Al2O3 타겟의 증착 파워가 70 W일 때 AZO 박막의 Al2O3 성분비는 2.02 wt.%이며 박막의 비저항 값은 $5{\times}10^{-4}{\Omega}{\cdot}cm$로 최소값을 보였다. 이러한 비저항의 변화는 파워에 따른 AZO 박막의 캐리어 이동도(Hall mobility)와 캐리어의 농도(Carrier Concentration)의 변화와 밀접한 관계가 있음을 보여주며, 특히 AZO 박막의 캐리어 농도와 캐리어 이동도는 AZO 박막을 형성하고 있는 결정립의 크기에 의존하는 것이 X-선 회절 패턴과 SEM으로부터 확인되었다. 특히, 본 연구에서는 두 개의 이종 타겟(hetero target) Al2O3와 ZnO를 장착하고 각각의 파워를 변화시켜 도핑 량을 조절할 수는 대향 타겟 스퍼터링(FTS: facing-target sputtering) 방법을 이용하여 제작된 AZO 박막에 대해 전기적, 광학적 및 구조적 특성을 분석하고 ITO의 대체물로서의 가능성을 검토하고자 한다.

  • PDF

Fabrication of Ni-Cr-Al Metal Foam-Supported Catalysts for the Steam Methane Reforming (SMR), and its Mechanical Stability and Hydrogen Yield Efficiency (수증기 메탄 개질 반응을 이용한 수소 생산용 Ni-Cr-Al 다공체 지지 촉매의 제조, 기계적 안정성 및 수소 환원 효율)

  • Kim, Kyu-Sik;Kang, Tae-Hoon;Kong, Man Sik;Park, Man-Ho;Yun, Jung-Yeul;Ahn, Ji Hye;Lee, Kee-Ahn
    • Journal of Powder Materials
    • /
    • v.28 no.3
    • /
    • pp.201-207
    • /
    • 2021
  • Ni-Cr-Al metal-foam-supported catalysts for steam methane reforming (SMR) are manufactured by applying a catalytic Ni/Al2O3 sol-gel coating to powder alloyed metallic foam. The structure, microstructure, mechanical stability, and hydrogen yield efficiency of the obtained catalysts are evaluated. The structural and microstructural characteristics show that the catalyst is well coated on the open-pore Ni-Cr-Al foam without cracks or spallation. The measured compressive yield strengths are 2-3 MPa at room temperature and 1.5-2.2 MPa at 750℃ regardless of sample size. The specimens exhibit a weight loss of up to 9-10% at elevated temperature owing to the spallation of the Ni/Al2O3 catalyst. However, the metal-foam-supported catalyst appears to have higher mechanical stability than ceramic pellet catalysts. In SMR simulations tests, a methane conversion ratio of up to 96% is obtained with a high hydrogen yield efficiency of 82%.

The Study on Surface Modification of Alumina Membrane by CVD (CVD에 의한 알루미나 멤브레인의 표면개질에 관한 연구)

  • 이동호;최두진;현상훈;고광백
    • Journal of the Korean Ceramic Society
    • /
    • v.32 no.12
    • /
    • pp.1349-1356
    • /
    • 1995
  • The change of permeation mechanism from Knudsen diffusion to micropore diffusion was observed after CVD modification of an alumina-sol coated alumina support which was prepared by slip coating process. Permselectivities of He/N2, H2/N2, and CO2/N2 were 5.67, 5.02, and 1.44, respectively. These values were higher than those under Knudsen diffusion controlled region.

  • PDF

Structural Phase Transition, Electronic Structure, and Magnetic Properties of Sol-gel-prepared Inverse-spinel Nickel-ferrites Thin Films

  • Kim, Kwang Joo;Kim, Min Hwan;Kim, Chul Sung
    • Journal of Magnetics
    • /
    • v.19 no.2
    • /
    • pp.111-115
    • /
    • 2014
  • X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and vibrating sample magnetometry (VSM) were used to investigate the influence of Ni ions on the structural, electronic, and magnetic properties of nickel-ferrites ($Ni_xFe_{3-x}O_4$). Spinel $Ni_xFe_{3-x}O_4$ ($x{\leq}0.96$) samples were prepared as polycrystalline thin films on $Al_2O_3$ (0001) substrates, using a sol-gel method. XRD patterns of the nickel-ferrites indicate that as the Ni composition increases (x > 0.3), a structural phase transition takes place from cubic to tetragonal lattice. The XPS results imply that the Ni ions in $Ni_xFe_{3-x}O_4$ substitute for the octahedral sites of the spinel lattice, mostly with the ionic valence of +2. The minority-spin d-electrons of the $Ni^{2+}$ ions are mainly distributed below the Fermi level ($E_F$), at around 3 eV; while those of the $Fe^{2+}$ ions are distributed closer to $E_F$ (~1 eV below $E_F$). The magnetic hysteresis curves of the $Ni_xFe_{3-x}O_4$ films measured by VSM show that as x increases, the saturation magnetization ($M_s$) linearly decreases. The decreasing trend is primarily attributable to the decrease in net spin magnetic moment, by the $Ni^{2+}$ ($2{\mu}_B$) substitution for octahedral $Fe^{2+}$ ($4{\mu}_B$) site.

Low Temperature Preparation of Transparent Glass-Ceramic Using Metal-Alkoxides (1) Synthesis and Properties of Porous Monolithic Gel in Li2O·1.7Al2O3·8.6SiO2 (금속 알콕시드를 이용한 투명 결정화유리의 저온 합성 (1) Li2O·1.7Al2O3·8.6SiO2 다공성 겔체의 합성)

  • Chun, Kyung-Soo;Tak, Joong-Jae
    • Applied Chemistry for Engineering
    • /
    • v.18 no.6
    • /
    • pp.568-574
    • /
    • 2007
  • Crack-free dried gel monoliths of the composition $Li_2O1{\cdot}7Al_2O_3{\cdot}8.6SiO_2$ have been prepared as a precursor of transparent glass-ceramic by the hydrolysis and polycondensation of mixed metal alkoxides in solutions containing N,N-dimethylformamide as the drying control chemical additive, alcohols, and water. It was investigated that activation energy for gelation according to the variation of water concentration ranged from 13 to 14 kcal/mol. Only when the amount of water for gelation was 3 times higher than the stoichiometric amount, monolithic dry gels were successfully prepared after drying at $70{\sim}75^{\circ}C$ and at a rate of 0.1~0.3%/h. The specific surface area, the pore volume, the average pore diameters of dried gel at $180^{\circ}C$ were about $239.40m^2/g$, 0.001~0.03 mL/g, and $145.62{\AA}$, respectively. It showed that the dried monolithic gel had a porous body. The DTA curve had the first exothermic peak around $800^{\circ}C$ and the 2nd peak around $980^{\circ}C$, which may correspond to crystallization of the gel.

Electronic and Magnetic Properties of Ti1-xMxO2-δ (M=Co and Fe) Thin Films Grown by Sol-gel Method

  • Kim, Kwang-Joo;Park, Young-Ran;Ahn, Geun-Young;Kim, Chul-Sung;Park, Jae-Yun
    • Journal of the Korean Magnetics Society
    • /
    • v.15 no.2
    • /
    • pp.109-112
    • /
    • 2005
  • Electronic and magnetic properties of $Ti_{1-x}M_xO_{2-\delta}$ (M=Co and Fe) thin films grown by sol-gel method have been investigated. Anatase and rutile $Ti_{1-x}Co_xO_{2-\delta}$ films were successfully grown on $Al_2O_3$ (0001) substrates and exhibited p-type electrical conductivity while the undoped films n-type conductivity. Room temperature vibrating sample magnetometry measurements on the anatase and rutile $Ti_{1-x}Co_xO_{2-\delta}$ films with same x ($=4.8 at.{\%}$) showed quite similar magnetic hysteresis curves with the saturation magnetic moment of $\~4 {\mu}_B$ per Co ion despite their differences in structural and electronic properties. Such giant magnetic moment is attributable to the unquenched orbital moment of the $Co^{2+}$ ions substituting the octahedral $Ti^{4+}$ sites. Similar ferromagnetic behavior was observed for $Ti_{1-x}Fe_xO_{2-\delta}$ films that are highly resistive compared to the Co doped samples. Saturation magnetic moment was found to decrease for higher x, i.e., $\~2$ and $\~1.5 {\mu}_B$ per Fe ion for x=2.4 and 5.8 at. $\%$, respectively. Conversion electron $M\ddot{o}ssbauer$ spectroscopy measurements predicted the coexistence of $Fe^{2+}$ and $Fe^{3+}$ ions at the octahedral sites of $Ti_{1-x}Fe_xO_{2-\delta}$.

Fabrication and microstructure of the Fe doped $TiO_{2}$ composite membranes with ultrafine pores (미세기공을 가지는 철이 첨가된 티타니아 복합여과막 제조 및 미세구조)

  • Dong-Sik Bae;Kyong-Sop Han;Sang-Hael Choi
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.6 no.3
    • /
    • pp.463-470
    • /
    • 1996
  • Ceramic membrane consisting of an ${\alpha}-Al_{2}O_{3}$ support and Fe doped $TiO_{2}$ top layer was prepared by the sol-gel method. The supported Fe doped $TiO_{2}$ top layer was made by dip coating the support in a mixed sol. The microstructure of the composite membranes was studied by SEM after calcination at $550~850^{\circ}C$. After sintering at $650^{\circ}C$ for 1 hr., the average particle diameter of the Fe doped $TiO_{2}$ top layer was ~40 nm. The supported Fe doped $TiO_{2}$ composite membranes exhibited much higher heat resistance than the $TiO_{2}$ membrane. The Fe doped $TiO_{2}$ composite membrane retained a crack-free microstructure and narrow particle size distribution even after calcination up to $650^{\circ}C$.

  • PDF

Stabilization/Solidification of Radioactive LiCl-KCl Waste Salt by Using SiO2-Al2O3-P2O5 (SAP) Inorganic Composite: Part 2. The Effect of SAP Composition on Stabilization/Solidification (SiO2-Al2O3-P2O5 (SAP) 무기복합체를 이용한 LiCl-KCl 방사성 폐기물의 안정화/고형화: Part 2. SAP조성에 따른 안정화/고형화특성 변화)

  • Ahn, Soo-Na;Park, Hwan-Seo;Cho, In-Hak;Kim, In-Tae;Cho, Yong-Zun
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
    • /
    • v.10 no.1
    • /
    • pp.27-36
    • /
    • 2012
  • Metal chloride waste is generated as a main waste streams in a series of electrolytic processes of a pyrochemical process. Different from carbonate or nitrate salt, metal chloride is not decomposed into oxide and chlorine but it is just vaporized. Also, it has low compatibility with conventional silicate glasses. Our research group adapted the dechlorination approach for the immobilization of waste salt. In this study, the composition of SAP ($SiO_2-Al_2O_3-P_2O_5$) was adjusted to enhance the reactivity and to simplify the solidification process as a subsequent research. The addition of $Fe_2O_3$ into the basic SAP decreased the SAP/Salt ratio in weight from 3 for SAP 1071 to 2.25 for M-SAP( Fe=0.1). The experimental results indicated that the addition of $Fe_2O_3$ increased the reactivity of M-SAP with LiCl-KCl but the reactivity gradually decreased above Fe=0.1. Also, introducing $B_2O_3$ into M-SAP requires no glass binder for the consolidation of reaction products. U-SAP ($SiO_2-Al_2O_3-Fe_2O_3-P_2O_5-B_2O_3$) could effectively dechlorinate the LiCl-KCl waste and its reaction product could be consolidated as a monolithic form without a glass binder. The leaching test result indicated that U-SAP 1071 was more durable than other SAPs wasteform. By using U-SAP, 1 g of waste salt could generated 3~4 g of wasteform for final disposal. The final volume would be about 3~4 times lower than the glass-bonded sodalite. From these results, it could be concluded that the dechlorination approach using U-SAP would be one of prospective methods to manage the volatile waste salt.

Sealing effects of cerium nitrate solution on plasma electrolytic oxidation coating formed on marine grade Al alloy (해양환경용 Al 합금 상에 형성된 플라즈마 전해 산화 코팅층의 질산 세륨 수용액에 의한 봉공 효과)

  • Lee, Jeong-Hyeong;Kim, Seong-Jong
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2016.11a
    • /
    • pp.144-144
    • /
    • 2016
  • 플라즈마 전해 산화법(Plasma electrolytic oxidation)에 의해 형성된 코팅층은 특유의 기공구조로 인해 부식 환경에 노출 시 부식액의 침투가 급속히 이루어지는 단점이 있다. 이를 극복하기 위한 방법으로 유기코팅, sol-gel법, 폴리머 코팅 등에 의해 기공을 봉공(sealing)하는 방법이 제안되고 있다. 본 연구에서는 Al 합금의 플라즈마 전해 산화 처리 후 질산 세륨 수용액(Cerium nitrate solution)에 의한 봉공 효과를 확인하고자 하였다. PEO 코팅을 위한 전해액은 2g/L의 KOH와 $2g/L\;Na_2SiO_3$를 증류수에 용해시켜 준비하였다. PEO 코팅층은 Al 시편을 전해액 내에 위치시켜 양극으로 하고 STS를 음극으로 하여 $0.1A/cm^2$의 펄스 정전류밀도(주파수: 100Hz, 듀티비: 20%)를 15분 동안 인가하여 형성시켰다. 봉공을 위한 실링액은 증류수에 $0.3g/L\;H_2O_2$$1g/L\;H_3BO_3$를 첨가하고, $Ce(NO_3)_3$를 농도 변수로 첨가하여 준비하였으며, PEO 코팅 처리된 시편을 실링액에 침지하여 실링액의 농도와 침지시간을 달리하여 봉공을 실시하였다. 제작된 PEO 코팅층에 대해 SEM, EDS, XRD를 이용한 표면분석을 실시하였으며, 내식성을 확인하고자 동전위분극시험을 실시하였다. 연구 결과, 세륨 실링 처리된 PEO 코팅 층에서 미량의 세륨 성분이 검출되었으나, 세륨계 화합물 생성에 의한 마이크로 크기의 기공의 폐쇄는 관찰되지 않았다. 또한, 전기화학적 특성 평가 결과 실링 처리된 PEO 코팅층의 경우 Al 모재에 비해 2차수 정도 감소된 부식전류밀도를 나타내었다. 이 같은 내식성의 향상은 세륨 성분에 의한 부식 억제 효과 때문으로 판단된다.

  • PDF

Advanced radiation shielding materials: PbO2-doped zirconia ceramics synthesized through innovative sol-gel method

  • Islam G. Alhindawy;Mohammad. W. Marashdeh;Mamduh. J. Aljaafreh;Mohannad Al-Hmoud;Sitah Alanazi;K. Mahmoud
    • Nuclear Engineering and Technology
    • /
    • v.56 no.7
    • /
    • pp.2444-2451
    • /
    • 2024
  • This work demonstrates a new sol-gel approach for synthesizing PbO2-doped zirconia using zircon mineral precursors. The streamlined methodology enables straightforward fabrication of the doped zirconia composites. Comprehensive materials characterization was performed using XRD, SEM, and TEM techniques to analyze the crystal structure, microstructure, and morphology. Quantitative analysis of the XRD data provided insights into the nanoscale crystallite sizes achieved, along with their relationship to lattice imperfections. Furthermore, the gamma-ray shielding capacity for the PbO2-doped zirconia samples was estimated by the Monte Carlo simulation, which proves an increase in the gamma ray shielding properties by raising the Pb concentration. The linear attenuation coefficient increased between 0.467 and 0.499 cm-1 (at 0.662 MeV) by increasing the Pb content between 11 and 21 wt%. By increasing the Pb content to 21 wt%, the synthesized composites' lead equivalent thickness reaches 2.49 cm. The radiation shielding properties for the synthesized composites revealed a remarkable performance against low and intermediate γ-ray photons, with radiation shielding capacity of 37.3 % and 21.4 % at 0.662 MeV and 2.506 MeV, respectively. As a result, the developed composites can be employed as an alternative shielding material in hospitals and radioactive zones.