• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.80-80
• /
• 2010

Graphene has attracted tremendous attention for the last a few years due to it fascinating electrical, mechanical, and chemical properties. Up to now, several methods have been developed exclusively to prepare graphene, which include micromechanical cleavage, polycrystalline Ni employing chemical vapor deposition technique, solvent thermal reaction, thermal desorption of Si from SiC substrates, chemical routes via graphite intercalation compounds or graphite oxide. In particular, polycrystalline Ni foil and conventional chemical vapor deposition system have been widely used for synthesis of large-area graphene. [1-3] In this study, synthesis of mono-layer graphene on a Ni foil, the mixing ratio of hydrocarbon ($CH_4$) gas to hydrogen gas, microwave power, and growth time were systemically optimized. It is possible to synthesize a graphene at relatively lower temperature ($500^{\circ}C$) than those (${\sim}1000^{\circ}C$) of previous results. Also, we could control the number of graphene according to the growth conditions. The structural features such as surface morphology, crystallinity and number of layer were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM), transmission electron microscopy (TEM) and resonant Raman spectroscopy with 514 nm excitation wavelength. We believe that our approach for the synthesis of mono-layer graphene may be potentially useful for the development of many electronic devices.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.79-79
• /
• 2010

최근, 차세대 디스플레이, 터치스크린, 전자파 차폐 및 흡수 등의 분야에 응용하기 위해서 현재 주로 사용되고 있는 ITO박막을 대체하기 위한 연구가 활발하게 진행 되고 있다. ITO 박막은 희소원소인 인듐에서 기인하는 높은 비용뿐만 아니라 매장량도 한계가 있어 대체 재료의 개발이 시급하게 요구되고 있다. 더구나, 다양한 차세대 응용에 있어서는 투명전도성 뿐만 아니라 휠 수 있는 유연성까지 요구되어 ITO박막을 대체할 새로운 투명전도성 유연 박막의 개발에 관한 연구들이 활발히 이루어지고 있다. 탄소나노튜브(CNT)는 금속을 능가하는 이론적인 전기전도도를 갖고 있으며, 높은 탄성등의 우수한 기계적 성질을 갖고 있어, 전도성 확보 및 유연성 구현이라는 투명전도성 플렉서블 박막소재에 요구되는 사항들을 충족시킬 뿐만 아니라, 최근의 대량 합성법등의 개발로 저가에 공급할 수 있다는 장점들이 있어 ITO대체 재료로서 주목을 받고 있다. 그러나, CNT는 튜브 사이에 강한 반데르발스 인력을 가지고 있어 용매 중에 분산하는데 많은 어려움이 있으며, 액상 분산과정을 통한 CNT기반의 플렉서블 박막 제작에 있어서 큰 과제로 남아있다. 본 연구에서는 플라즈마 기능화 처리를 통하여 CNT에 친수성을 부여하였고, 초음파 처리를 통하여 에탄올 중에 CNT를 균일하게 분산한 후, 스프레이 분사법을 이용해 투명 유연기판인 PET고분자 필름위에 균일 박막을 제작하였다. CNT는 아세틸렌 가스를 이용한 열화학증기증착법으로 1mm 이상의 길이를 갖는 수직배향 CNT를 합성하였으며, 이를 아르곤 및 암모니아 플라즈마로 기능화 처리를 실시하였다. 플라즈마 처리를 통해 기능화 된 탄소나노튜브는 플라즈마 처리되지 않은 탄소나노튜브와 분산 속도에서 현저한 차이를 보였다. 제작한 CNT 기반의 투명전도성 유연박막들은 막두께에 따른 전도도 및 투광도의 관계를 조사하였고, 기판에 분사된 CNT 박막의 표면 특성은 AFM, Raman, 접촉각 실험 등을 통하여 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.373-373
• /
• 2010

광촉매능을 갖는 $TiO_2$는 국내외적으로 많은 연구가 진행되고 있다. 빛의 조사로 발생하는 다양한 물리 화학적 촉매특성이 환경정화 뿐만 아니라 및 에너지 흡수차단 기능도 갖고 있어 최근 주목을 받고 있다. 응용분야로 초친수성 유리제품, 필터, 살균기능의 의료용 부품소재, 고효율 수소생산 및 태양전지 등에 활용성이 커서 친환경에너지 소재로 각광을 받고 있다. 본 연구에서는 초친수성 자동차의 사이드미러 개발을 위해 유리표면에 초친수성 $TiO_2$를 코팅하 고 그의 특성을 평가하였다. 특히, 이종밴드갭을 갖는 복합구조 $TiO_2/Cr_2O_3$/Cr 박막을 스퍼터링법으로 증착하여 중간층인 $Cr_2O_3$의 역할을 고찰하였다. 제조된 박막의 결정구조는 thin film형 X-선회절기(XRD)를 사용하여 분석하였으며, 박막의 표면 미세구조는 FE-SEM(Field Emission Scanning Electron Microscope)와 AFM(Atomic Force Microscope)으로, 화학구조는 XPS(X-ray Photoelectron Spectroscope)로 분석하였다. 친수성 평가는 실온 분위기에서 접촉각 측정기(Topcon-UVR2)를 사용하여 평가 하였으며 이때 조사되는 UV는 파장이 365nm이다. $Cr_2O_3$(비정질)/Cr박막위에 제조된 $TiO_2$ 박막은 균일한 anatase-$TiO_2$가 성장했으나, Cr, $Cr_2O_3$(결정질)박막위에 제조 된 $TiO_2$ 박막은 anatase상과 rulile상이 혼합된 형태로 성장하였다. $TiO_2$/Cr, $TiO_2/Cr_2O_3$(비정질)/Cr, $TiO_2/Cr_2O_3$(결정질)/Cr박막은 UV조사 1시간 만에 $10^{\circ}$ 이하의 초친수성을 나타내었다. 이종 밴드갭을 갖는 $TiO_2/Cr_2O_3$(비정질)/Cr박막은 40시간까지 친수성을 유지하는 결과를 나타냈다.

• Korean Journal of Materials Research
• /
• v.16 no.12
• /
• pp.777-781
• /
• 2006

Recently, there are a lot of study to alternate polycarbonate which is being used as storage material in CD, DVD. In this study, we alternated polycarbonate with glass. We observed the change of shape in a surface of the glass which was focused by Nd:YAG Laser. The change of shape and property was studied by thermal mechanical analysis (TMA), UV-Vis spectrometer, AFM and SEM. According to Laser power and quantity of additives, the Bump's size and shape are showed differently. In high energy, the Bump will be transformed into Pit. And also according to CTE, $T_d$ and absorption ratio of glass, difference between Bump and Pit is confirmed. From these investigation, we could control that the minimum size of bump which is more useful shape than pit's is about 1.3 $\mu$m, H 70 nm, and it is near same the spot size.

• Korean Journal of Materials Research
• /
• v.17 no.10
• /
• pp.538-543
• /
• 2007

We fabricated the Ni plate by electroforming process and evaluated the microstructure, mechanical properties and wear behavior of the Ni plate. Specifically, the effects of addition of wetting agents, SF 1 and SF 2 solutions, on the microstructure and properties were investigated. The microstructure and surface morphology were characterized by transmission electron microscopy (TEM) and atomic force microscopy (AFM), respectively, and friction coefficient was measured by the ball-on-disk method. We found that the microstructure and mechanical properties of Ni plate were changed with kind and amount of wetting agents used. The hardness and tensile strength of Ni plate formed without wetting agents was 228 Hv and 660.7 MPa, respectively, whiled when wetting agent was added, those were improved to be 739 Hv and 1286.3 MPa. These improvements were probably due to the finer grain size and less crystallization of Ni. In addition, when both wetting agents were added, the friction coefficient was reduced from 0.73 to 0.67 which is partially caused by the improved hardness and smooth surface.

• Korean Journal of Metals and Materials
• /
• v.49 no.4
• /
• pp.342-347
• /
• 2011

We fabricated the silicon nanodots using the low pressure chemical vapor deposition technique to investigate their electron field emission characteristics. Atomic force microscope measurements performed for the silicon nanodot samples having various process parameters, such as, deposition time and deposition pressure, revealed that the silicon nanodots with an average size of 20 nm, height of 5 nm, and density of $1.3\;{\times}\;10^{11}\;cm^{-2}$ were easily formed. Electron field emission measurements were performed with the silicon nanodot layer as the cathode electrode. The current-voltage curves revealed that the threshold electric field was as low as $8.3\;V/{\mu}m$ and the field enhancement factor reached as large as 698, which is compatible with the silicon cathode tips fabricated by other techniques. These electron field emission results point to the possibility of using a silicon-based light source for display devices.

• Korean Journal of Metals and Materials
• /
• v.47 no.1
• /
• pp.44-49
• /
• 2009

Indium tin oxide(ITO) thin films were deposited on the glass substrates by radio-frequency (RF) magnetron sputtering method. The influence of rapid thermal annealing (RTA) treatment on the optical and electrical properties of the films were investigated for the purpose of fabricating plasma display signboard. Structural properties, surface roughness, sheet resistance and transmittance of the ITO film were analysed by using x-ray diffraction method, atomic force microscopy (AFM), four point prove, and ultraviolet-visible spectrometer, respectively. It was found that the RTA treatment increased the transmittance and decreased the resistivity of the ITO film, respectively. Furthermore, we successfully demonstrated the direct-current plasma signboard by using ITO electrode and phosphors.

• Journal of the Korean institute of surface engineering
• /
• v.54 no.3
• /
• pp.119-123
• /
• 2021

SnO₂ single layer and SnO₂/Ag/SnO₂ (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As deposited SnO₂ films show a visible transmittance of 85.5 % and a sheet resistance of 1.2×10⁴ Ω/□, the SAS films with a 15 nm thick Ag interlayer show a lower resistance of 18.8 Ω/□ and a visible transmittance of 70.6 %, respectively. The figure of merit based on the optical transmittance and sheet resistance revealed that the Ag interlayer in the SnO₂ films enhances the opto-electrical performance without substrate heating or annealing process.

• Journal of the Korean Vacuum Society
• /
• v.7 no.s1
• /
• pp.57-77
• /
• 1998

Heteroepitaxial $Y_2O_3$ films were grown on a Si(111) substrate by ionized cluster beam deposition(ICBD) in ultra high vacuum, and its qualities such as crystllitnity, film stress, and morphological characteristics were investigated using the various measurement methods. The crystallinity was investigated by x-ray diffraction (XRD) and reflection high energy electron diffraction (RHEED). Interface crystallinity was also examined by Rutherford backscattering spectroscopy(RBS) channeling, transmission electron microscopy(TEM). The stress of the films was measured by RBS channeling and XRD. Surface and interface morphological characteristics were investigated by atomic force microscopy (AFM) and x-ray scattering method. Comparing the interface with the surface characteristics, we can conclude that many defects at the interface region were generated by interface reaction between the yttrium metal and SiO2 layer and by ion beam characteristic such as shallow implantation, so that they influenced the film qualities. The film quality was dominantly depended on the characteristic temperature range. In the temperature range from $500^{\circ}C$ to $600^{\circ}C$, the crystallinity was mainly improved and the surface roughness was drastically decreased. On the other hand, in the temperature range from $600^{\circ}C$ to $700^{\circ}C$, the compressive stress and film density were dominantly increased, and the island size was more decreased. Also the surface morphological shape was transformed from elliptical shape to triangular. The film stress existed dominantly at the interface region due to the defects generation.

• Journal of the Korean Society of Industry Convergence
• /
• v.25 no.2_2
• /
• pp.289-297
• /
• 2022

Deterioration in durability of structures due to the steel corrosion is difficult to determine whether or not corrosion is initiated and how much propagated, and moreover, repair and maintenance are not easy to deal with. Therefore, preventive treatments can be the best option to avoid the deterioration. Various methods for preventing corrosion of steel, such as electrochemical treatments, anti-corrosion agents and steel surface coatings, are being developed, but economic and environmental aspects make it difficult to apply them to in-situ field. Thus, the purpose of this study was to improve corrosion resistance by using CA-based clinker that are relatively simple and expected to be economically profitable Existing CA-based clinkers had problems such as flash setting and low strength development during the initial hydration process, but in order to solve this problem, CA clinker with low initial reactivity were used as binder in this study. The cement paste used in the experiments was replaced with CA₂ clinker for 0%, 10%, 20%, and 30% in OPC. And the mixture used in the chloride binding test for the extraction of water-soluble chloride was intermixed with Cl- 0.5%, 1%, 2%, and 3% by weight of binder content. To evaluate characteristic of hydration heat evolution, calorimetry analysis was performed and simultaneously chloride binding capacity and acid neutralization capacity were carried out. The identification of hydration products with curing ages was verified by X-ray diffraction analysis. The free chloride extraction test showed that the chlorine ion holding ability improved in order OC 10 > OC 30 > OC 20 > OC 0 and the pH drop resistance test showed that the resistance capability in pH 12 was OC 0 > OA 10 > OA 20 > OA 30. The XRD analyses showed that AFm phase, which can affect the ability to hold chlorine ions, tended to increase when CA₂ was mixed, and that in pH12 the content of calcium hydroxide (Ca(OH)₂), which indicates pH-low resistance, decreased as CA₂ was mixed