• Korean Journal of Materials Research
• /
• v.17 no.1
• /
• pp.18-24
• /
• 2007

Mullite-PSZ composite was prepared by sol-gel method using $Al(sec-OC_4H_9)_3,\;Si(OC_2H_5)_4,\;ZrOCl_2\;8H_2O\;and\;Y_2O_3$. The sinterability ana mechanical properties of powder compacts sintered at $1,650^{\circ}C$ for 4 hrs were investigated for various PSZ contents. In result Al-Si spinel formed at $980^{\circ}C$ from amorphous dried gel, and zirconia as well as mullite crystal formed above $1,200^{\circ}C$. The sintered body was densified to $97{\sim}98%$ except the specimen containing 25vol% PSZ which showed the relative density of about 95% obtained by sintering at $1,650^{\circ}C$ for 4 h. The flexural strength of the sintered body was a maximum value of 290 MPa in 20 vol% PSZ, which was also considerably larger than the value of 200 MPa without PSZ. The value of the fracture toughness increased linearly with increase of PSZ content and showed a maximum value of $4.3MPam^{1/2}$ in 25 vol% PSZ, Namely this value was remarkably larger than the $value(2.6MPam^{1/2})$ of pure mullite without PSZ.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
• /
• 2002.02a
• /
• pp.156-158
• /
• 2002

BSCCO tpaes with insulating ceramic barriers such as Zr$O_{2}$, $Al_{2}$$CO_{3}$, and Sr$CO_{3}$ were fabricated and their electrical properties were evaluated. Each filament was dip coated with ceramic slurries and then made 19 multifilamentary tapes by the “powder-in-tube” process. Microstructural investigation showed that filaments were completely decoupled each other and had a significant sausage effect. The critical current of coated tapes was reduced compared to that of non coated one, and its reduction was varied with the coating materials. For tapes with coated with Sr$CO_{3}$, the critical current was measured to be 7.2 A which was 44% reduction to that of non coated one. This reduction is believed to be due to the formation of sausage effect and non-uniform microstructure.

• Korean Journal of Materials Research
• /
• v.21 no.7
• /
• pp.384-390
• /
• 2011

Ti-6Al-4V ELI (Extra Low Interstitial) alloy has been widely used as an alternative to bone due to its excellent biocompatibility. However, it still has many problems, including a high elastic modulus and toxicity. Therefore, nontoxic biomaterials with a low elastic modulus should be developed. However, the fabrication of a uniform coating is challenging. Moreover, the coating layer on Ti and Ti alloy substrates can be peeled off after implantation. To overcome these problems, it is necessary to produce bulk Ti and Ti alloy with hydroxyapatite (HA) composites. In this study, Ti, Nb, and Zr powders, which are biocompatible elements, were milled in a mixing machine (24h) and by planetary mechanical ball milling (1h, 4h, and 6h), respectively. Ti-35%Nb-7%Zr and Ti-35%Nb-7%Zr-10%HA composites were fabricated by spark plasma sintering (SPS) at $1000^{\circ}C$ under 70MPa using mixed and milled powders. The effects of HA addition and milling time on the biocompatibility and physical and mechanical properties of the Ti-35%Nb-7%Zr-(10%HA) alloys have been investigated. $Ti_2O$, CaO, $CaTiO_3$, and $Ti_xP_y$ phases were formed by chemical reaction during sintering. Vickers hardness of the sintered composites increases with increased milling time and by the addition of HA. The biocompatibilty of the HA added Ti-Nb-Zr alloys was improved, but the sintering ability was decreased.

• Journal of Power System Engineering
• /
• v.18 no.6
• /
• pp.58-63
• /
• 2014

This paper deals with the effects of counterpart materials on the wear behavior of thermally sprayed STS316 coatings. STS316 powders were flame-sprayed onto a carbon steel substrate. Dry sliding wear tests were performed using the applied loads of 15 N. AISI52100, $Al_2O_3$, $ZrO_2$ and $Si_3N_4$ balls were used as counterpart materials. Wear behavior of STS316 coatings against different counterpart materials were studied using a scanning electron microscope(SEM) and energy dispersive X-ray spectroscopy (EDS). The results show that the wear behavior of thermally sprayed STS316 coatings strongly depends on the type of counterpart material. Dominant wear mechanism was similar for all studied materials as failure of adhesion film except for Si3N4 used as counterpart material. In the case of Si3N4 used as counterpart material, dominant wear mechanism was abrasion.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.104-104
• /
• 2009

Critical dimensions has rapidly shrunk to increase the degree of integration and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate insulator layer and the low conductivity characteristic of poly-silicon. To cover these faults, the study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$ and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-silicon gate is not compatible with high-k materials for gate-insulator. To integrate high-k gate dielectric materials in nano-scale devices, metal gate electrodes are expected to be used in the future. Currently, metal gate electrode materials like TiN, TaN, and WN are being widely studied for next-generation nano-scale devices. The TaN gate electrode for metal/high-k gate stack is compatible with high-k materials. According to this trend, the study about dry etching technology of the TaN film is needed. In this study, we investigated the etch mechanism of the TaN thin film in an inductively coupled plasma (ICP) system with $O_2/BCl_3/Ar$ gas chemistry. The etch rates and selectivities of TaN thin films were investigated in terms of the gas mixing ratio, the RF power, the DC-bias voltage, and the process pressure. The characteristics of the plasma were estimated using optical emission spectroscopy (OES). The surface reactions after etching were investigated using X-ray photoelectron spectroscopy (XPS) and auger electron spectroscopy (AES).

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2010.05a
• /
• pp.6.1-6.1
• /
• 2010

원자층 증착 기술 (Atomic Layer Deposition)은 기판 표면에서 한 원자층의 화학적 흡착 및 탈착을 이용한 nano-scale 박막 증착 기술이기 때문에, 표면 반응제어가 우수하며 박막의 물리적 성질의 재현성이 우수하고, 대면적에서도 균일한 두께의 박막 형성이 가능하며 우수한 계단 도포성을 확보 할 수 있다. 최근 ALD에 의한 박막증착 방법 중 플라즈마를 이용한 ALD 증착 방법에 대한 다양한 연구가 진행되고 있다. 플라즈마는 반응성이 좋은 이온과 라디컬을 생성하여 소스간 반응성을 좋게 하여, 소스 선택의 폭을 넓어지게 하고, 박막의 성질을 좋게 하며, 생산성을 높일 수 있는 장점이 있다. 그러나 플라즈마를 사용함으로써 플라즈마 내에 이온들이 가속되서 박막 증착 중에 기판 및 박막에 손상을 입혀 박막 특성을 열화 시킬 가능성이 있다. 따라서 플라즈마 발생 영역을 기판으로부터 멀리 떨어뜨린 원거리 플라즈마 원자층 공정이 개발 되었다. 이 기술은 플라즈마에서 생성된 ion이 기판이나 박막에 닫기 전에 전자와 재결합 되거나 공정 chamber에서 소멸하여 그 영향을 최소하고 반응성이 좋은 라디칼과의 반응만을 유도하여 향상된 막질을 얻을 수 있도록 하였다. 따라서 이 원거리 플라즈마 원자층 증착기술은 나노 테크놀러지 소자 개발하기 위한 나노 박막 기술에 있어서 그 활용이 점점 확대될 것이다. 그 적용으로써 리모트 플라즈마 원자층 증착 방법을 이용한 고유전 물질 개발이 있다. 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 집적회로의 크기를 혁신적으로 축소하여 스위칭 속도(switching speed)를 증가시키고, 전력손실 (power dissipation)을 줄이려는 시도가 이루어지고 있다. 그 중 하나로 고유전율 절연막은 트렌지스터 소자의 스케일링 과정에 수반하여 커지는 게이트 누설 전류를 억제하기 위한 목적으로 도입되었다. 유전율이 크면 동일한 capacitance를 내는데 필요한 물리적인 두께를 늘릴 수 있어 전자의 tunneling을 억제할 수 있고 전력손실을 줄일 수 있기 때문이다. 이와 같은 고유전율 물질이 게이트 산화막으로 사용되기 위해서 높은 유전상수 열역학적 안정성, 낮은 계면 전하밀도, 낮은 EOT, 전극 물질과의 양립성 등의 특성이 요구되는데, 이에 따라 많은 유전물질에 대한 연구가 진행되었다. 기존 gata oxide를 대체하기 위한 가장 유력한 후보 재료로 주목 받고 있는 high-k 물질들로는 Al2O3, HfO2, ZrO2, La2O3 등이 있다. 본 발표에서는 ALD의 종류에 따른 기술을 소개하고 그 응용으로 고유전율 물질 개발 연구 (고유전율 산화물 박막의 증착, 고유전율 산화물의 열적 안정성 평가, Flatband 매카니즘 규명, 전기적 물리적 특성 분석)에 대해서 발표 하고자 한다.

• Transactions on Electrical and Electronic Materials
• /
• v.7 no.2
• /
• pp.72-75
• /
• 2006

Ferroelectric PZT heterolayered thick films were fabricated by the alkoxide-based sol-gel method. PZT(Zr/Ti=60/40) paste was made and alternately screen-printed on the $Al_2O_3$ substrates. We have introduced a press-treatment to obtain a good densification of screen printed films. The porosity of the thick films was decreased with increasing the applied pressure and the thick films pressed at $0.6ton/cm^2$ showed the dense microstructure and thickness of about $76{\mu}m$. The relative dielectric constant increased with increasing the applied pressure. The remanent polarization and coercive field increased with increasing applied pressure and the values for the PZT thick films pressed at $0.6ton/cm^2$ were $16.6{\mu}C/cm^2$, 76.9 kV/cm, respectively.

• Journal of the Korean institute of surface engineering
• /
• v.30 no.4
• /
• pp.285-297
• /
• 1997

Finned segment, with which are lined inner wall of the turbine combustors, are subject to severe degradation when they are exposed to a hostile environmment at elevated temperature. To protect the finned segment from this environment and to maintain good mechanical properties of components at high temperature, they are preferred to be coated. The most governing factor for the durability of coatings used in the high temperature is the microstructure of coatings; these are splat from, distibution of microcacks, size and distribution of pores, thickness of coating layer, adhesion between coating layer, and oxidation of band coating. In this study, based on the evaluation of the imported finned segment, new finned segment segment was manufactured with optimum plasma spraying parameters, and their properties were examined. Using $ZrO_2(8wt$Y_2O_3)$,/TEX> powder for ceramic coating and 67Ni-22Cr-10Al-0.5Y mixing powder for bond coating, thickness of ceramic and bond coating layer were varied in order to find optimum condition, the results showed that B2T4(bond coating : 100~250$\mu\textrm{m}$, ceramic coating : 250~300$\mu\textrm{m}$) was the best among the specimens tested. Compared to the imported finned segment, B2T4 has better bond strength, hardness, and isothermal and cyclic oxidation resistance.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.20 no.10
• /
• pp.3234-3242
• /
• 1996

This paper describes experimental results of modified small punch( MSP) test conducted to evaluate the fracure characteristics and mechanical properties of plasma sparayed zirconia ($ZrO_2$ stabilized with 8wt. % $Y_20_3$ : YSZ) NiCrAlY composite. The mixing ratios of YSZ/NiCrAlY were 0/100, 25/75, 50/50, 100/0 v.%. Test temperatures ranged from 293K to 1473K. This study is directed at development of thermal barrrier coating(TBC) system with superior heat resistance and mechanical properties. The microstructure and fracture process of the composite were examined by SEM and AE method. The mechanical properties of 100% YSZ were nearly independent of the temperatures tested in this study. In contrast, the NiCrAlY-containing composites showed a significant decrease of the mechanical properties above 1273K, showing a ductile- brittle transition behavior up to the temperature. Furthermore, it can seen that 25% YSZ/75% NiCrAlY composite gave the highest fracure strength and fracture energy among the mixing ratio tested over the temperature range.

• Journal of the Korean Society for Heat Treatment
• /
• v.15 no.1
• /
• pp.21-24
• /
• 2002

The electrode materials for welding machine in automobile industry such as Cu-Cr, Cu-Zr and Cu-$Al_2O_3$ require the high electrical conductivity and the proper hardness. Therefore the effects of solution heat treatment and aging treatment on the electrical conductivity and hardness of Cu-0.8wt%Cr and Cu-1.2wt%Cr alloys have been investigated. Cu-0.8wt%Cr alloy showed the higher electrical conductivity and hardness than Cu-1.2wt%Cr alloy and both alloys showed the better electrical conductivity at $930^{\circ}C$ among 930, 980 and $1030^{\circ}C$ solution heat treatment temperatures. The electrical conductivity and hardness in both alloys were not affected by aging treatment but remarkably affected by solution heat treatment temperature. The final drawing process reduced electrical conductivity and increased hardness more in Cu-1.2wt%Cr alloy.