• Title/Summary/Keyword: ${\sigma}$-Phase

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Transmittance controlled photomasks by use of backside phase patterns (후면 위상 패턴을 이용한 투과율 조절 포토마스크)

  • Park, Jong-Rak;Park, Jin-Hong
    • Korean Journal of Optics and Photonics
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    • v.15 no.1
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    • pp.79-85
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    • 2004
  • We report on a transmittance controlled photomask with phase patterns on the back quartz surface. Theoretical analysis for changes in illumination pupil shape with respect to the variation of size and density of backside phase patterns and experimental results for improvement of critical dimension uniformity on a wafer by using the transmittance controlled photomask are presented. As phase patterns for controlling transmittance of the photomask we used etched contact-hole type patterns with 180" rotative phase with respect to the unetched region. It is shown that pattern size on the backside of the photomask must be made as small as possible in order to keep the illumination pupil shape as close as possible to the original pupil shape and to achieve as large an illumination intensity drop as possible at a same pattern density. The distribution of illumination intensity drop suitable for correcting critical dimension error was realized by controlling pattern density of the contact-hole type phase patterns. We applied this transmittance controlled photomask to a critical layer of DRAM (Dynamic Random Access Memory) having a 140nm design rule and could achieve improvement of the critical dimension uniformity value from 24.0 nm to 10.7 nm in 3$\sigma$.TEX>.

Study on the Base and Subbase Method of Agricultural Road -On the Resilient Modulus Characteristics of the Subgrade and Cement Treated Base- (농도의 기층 및 보조기층 공법연구 -노상 및 시멘트 안정 처리층의 Mr 특성을 중심으로-)

  • 도덕현
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.31 no.2
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    • pp.66-81
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    • 1989
  • The characteristics of resilient modulus(Mr) which dominates the life of pavement and the design of pavement were investigated on the test specimens which were cement treated and non-treated of the three different soil types. The results are summarized as follows : 1. The resilient modulus was decreased by increasing the cyclic deviator stress ($\sigma$d) , especially the resilient modulus was gradually decreased or sometimes increased when the value of ad was greater than 0.75- 1. 0kg/cm$^2$. 2. The resilient modulus was increased by increasing the homogeneous confined stress ($\sigma$do) and such phenomena were distinct on the coarse soils. 3. The resilient modulus was increased by increasing the ratio of confined stress(Kc), and this phenomena were eminent on the coarse soils too, and the higher permanent strain was showed by increasing the value of Kc. 4. In the drained cyclic triaxial compression test, the value of ad, Kc, and (Oho) was introduced by the following interrelated equations which were similar to the Mr model of Cole. Kcn/Mr=K1(J$_2$/ $\tau$oct)K2 ............. (coarse soli) Mcn/Mr=K3($\sigma$dp/ $\tau$f)k4 ...............(fine soils) 5. The stress path was not much affected by the value of Mr, however, moisture content, dry desity, and contant of fines affected the value of Mr. 6. In the soil-cement specimens, the resilient compression strain($\varepsilon$d) was decreased by the increment of the $\sigma$ho, and Mr was decreased by increasing the $\sigma$d 7. In the flexible pavement. the cement treated layer should be designed not to fail by the fatigue before the designed traffic load, and actually the pavement could cover the traffic load to a certain extent under the post-crack phase, therefore farther studies on this phenomena' are required in the design analysis. 8. The finite element computer program (ANALYS) was used for displacement analysis of pavement containing the cement-treated layer, The result showed that the program used for this analysis was proved to be usable.

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Level 3 Type Land Use Land Cover (LULC) Characteristics Based on Phenological Phases of North Korea (생물계절 상 분석을 통한 Level 3 type 북한 토지피복 특성)

  • Yu, Jae-Shim;Park, Chong-Hwa;Lee, Seung-Ho
    • Korean Journal of Remote Sensing
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    • v.27 no.4
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    • pp.457-466
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    • 2011
  • The objectives of this study are to produce level 3 type LULC map and analysis of phenological features of North Korea, ISODATA clustering of the 88scenes of MVC of MODIS NDVI in 2008 and 8scenes in 2009 was carried out. Analysis of phenological phases based mapping method was conducted, In level 2 type map, the confusion matrix was summarized and Kappa coefficient was calculated. Total of 27 typical habitat types that represent the dominant species or vegetation density that cover land surface of North Korea in 2008 were made. The total of 27 classes includes the 17 forest biotopes, 7 different croplands, 2 built up types and one water body. Dormancy phase of winter (${\sigma}^2$ = 0.348) and green up phase in spring (${\sigma}^2$ = 0.347) displays phenological dynamics when much vegetation growth changes take place. Overall accuracy is (851/955) 85.85% and Kappa coefficient is 0.84. Phenological phase based mapping method was possible to minimize classification error when analyzing the inaccessible land of North Korea.

Measurement of the Phase Fraction of Minor Precipitates in Ni Base Superalloys using Quantitative X-ray Diffraction Technique (정량 x-선 회절분석법을 이용한 니켈기 초내열합급내 미량석출물의 상분율 측정)

  • Kim, S.E.;Cho, C.C.;Hur, B.Y.;Na, Y.S.;Park, N.K.
    • Analytical Science and Technology
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    • v.12 no.3
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    • pp.235-242
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    • 1999
  • It is impossible to measure the fraction of the precipitates which are neither plenty nor distiguishable on micrographs, using point counting method or image analyzer. In this study, phase fraction of sigma, carbide and boride which are important to mechanical properties of Ni base superalloy Udimet 720 has been measured using a quantitative X-ray diffraction technique combined with electrochemical extraction. The alloys had been exposed at $800^{\circ}C$ for various times up to 3000 hours to have a variation of the amount of the minor precipitates. The amount of sigma had increased exponentially with increasing exposure time up to 3000 hours before saturation. It can be argued that the finishing point of precipitation is around 5000 hours and maximum amount of sigma to be produced is about 5% in weight. The amounts of $M_{23}C_6$ and $M_3B_2$ were maintained constant at the level of 0.1~0.5% in weight, regardless of exposure time.

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Implementation of High-Resolution Laser Distance Measurement System using Phase-Shift Method (위상천이 방법을 이용한 고분해능 레이저 거리측정 시스템 개발)

  • Park, Bee-Jay;Lee, Chung-Woo;Chung, Chung-Choo;Sho, Jae-Hyuk;Ong, Sang-Jin
    • Proceedings of the KIEE Conference
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    • 2004.11c
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    • pp.589-591
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    • 2004
  • In this paper, we developed a laser distance measurement(LDM) system based on DSP. We applied PPD(Pulsed Phase Detection) algorithm to the LDM system. The PPD algorithm calculate the distance from the LDM system to the object by using phase detection. Reference waveform at a fixed frequency is sampled by both the inner-loop and outer-loop pulse signal. The LDM system detects the difference of phase between the sampled signals. We obtained an accuracy of ${\sigma}=25.5mm$ from the LDM system.

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Performance Analysis of a Two-phase Queueing System with Bernoulli Feedback (베르누이 피드백이 있는 2단계서비스 대기모형의 성능분석)

  • Park, Doo-Il;Kim, Tae-Sung
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.28 no.1C
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    • pp.9-13
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    • 2003
  • We consider a two-phase queueing system with Bernoulli feedback. Customers arrive at the system according to a Poison process and receive batch service in the first phase followed by individual services in the second phase. Each customer who completes the individual service returns to the tail of the second phase service queue with probability 1 -$\sigma$. This type of queueing problem cad be easily found in computer and telecommunication systems. By deriving a relationship between the generating functions for system size at various embedded epochs, we obtain the system size distribution. The exhaustive and gated cases for the batch service are considered.

A study on the KLA behaviors in HAZ and the mechanical properties of austenitic stainless steel weld (스테인레스강용접 열영향부의 KLA거동 및 기계적 특성에 관한 연구)

  • 조종춘;김영석;김학민
    • Journal of Welding and Joining
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    • v.8 no.4
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    • pp.27-34
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    • 1990
  • Integranular corrosion behaviors of KAL (Knife Line Attack) and mechanical properties such as tensile and creep rupture were investigated for the tube material used for nearly 20 years under the condition of 463.deg. C and 28 $kg/cm^2$. Based and weld metal were austenitic stainless steel AISI 321 containing Ti, AISI 347 containing Nb, respectively. KLA is a kind of the intergranular corrosion which often occurs just near the HAZ (heat affected zone) of AISI 321 and AISI 347 stainless steel due to the grain boundary sensitization. In KLA zone, intergranular corrosion crack has propagated outwards from the inner surface and carbides of white and narrow band type assuming as (Cr, Fe) carbide were confirmed. All the delta-ferrite formed in the weld metal during weld solidification has been transformed into sigma-phase since delta-ferrte was exposed for 20 years at 463.deg. C. Elongation was very low at the range from room temperature to 600.deg. C and it was confirmed that creep-rupture properties were not consideralbly affected.

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Effect of Welding Processes on Corrosion Resistance of UNS S31803 Duplex Stainless Steel

  • Chiu, Liu-Ho;Hsieh, Wen-Chin
    • Corrosion Science and Technology
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    • v.2 no.1
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    • pp.36-40
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    • 2003
  • An attractive combination of corrosion resistance and mechanical properties in the temperature range -50 to $250^{\circ}C$ is offered by duplex stainless steel. However, undesirable secondary precipitation phase such as $\sigma$, $\gamma_2$ and $Cr_2N$ may taken place at the cooling stage from the welding processes. Therefore, this paper describes the influence of different welding procedures such as manual metal arc welding (MMA), tungsten inert gas welding (TIG) and vacuum brazing on corrosion resistance of the welded joint for UNS S31803 duplex stainless steel. Microstructure and chemical compositions of the welded joint were examined. The weight loss of specimens immersed in 6% $FeCl_3$ solution at $47.5^{\circ}C$ for 24-hours was determined and used to evaluate the pitting resistance of duplex stainless steel and their welds. The region of heat-affected zone of specimen obtained by the MMA is much wider than that resulted from TIG, therefore, the weight loss of welds by MMA was larger than that of weld by TIG. The weight loss of brazed specimens cooled from slow cooling rate was larger than those of specimens cooled from high cooling rate, because the precipitation of $\sigma$ phase. Beside that, the weight loss of brazed specimen is greater than those of the welded specimens. The galvanic corrosion was observed in brazed duplex stainless steel joints in the chloride solution.

A Delta-Sigma Fractional-N Frequency Synthesizer for Quad-Band Multi-Standard Mobile Broadcasting Tuners in 0.18-μm CMOS

  • Shin, Jae-Wook;Kim, Jong-Sik;Kim, Seung-Soo;Shin, Hyun-Chol
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.7 no.4
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    • pp.267-273
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    • 2007
  • A fractional-N frequency synthesizer supports quadruple bands and multiple standards for mobile broadcasting systems. A novel linearized coarse tuned VCO adopting a pseudo-exponential capacitor bank structure is proposed to cover the wide bandwidth of 65%. The proposed technique successfully reduces the variations of KVCO and per-code frequency step by 3.2 and 2.7 times, respectively. For the divider and prescaler circuits, TSPC (true single-phase clock) logic is extensively utilized for high speed operation, low power consumption, and small silicon area. Implemented in $0.18-{\mu}m$ CMOS, the PLL covers $154{\sim}303$ MHz (VHF-III), $462{\sim}911$ MHz (UHF), and $1441{\sim}1887$ MHz (L1, L2) with two VCO's while dissipating 23 mA from 1.8 V supply. The integrated phase noise is 0.598 and 0.812 degree for the integer-N and fractional-N modes, respectively, at 750 MHz output frequency. The in-band noise at 10 kHz offset is -96 dBc/Hz for the integer-N mode and degraded only by 3 dB for the fractional-N mode.

The Thermal Stability and Elevated Temperature Mechanical Properties of Spray-Deposited $SiC_P$/Al-11.7Fe-1.3V-1.7Si Composite

  • Hao, L.;He, Y.Q.;Wang, Na;Chen, Z.H.;Chen, Z.G.;Yan, H.G.;Xu, Z.K.
    • Advanced Composite Materials
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    • v.18 no.4
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    • pp.351-364
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    • 2009
  • The thermal stability and elevated temperature mechanical properties of $SiC_P$/Al-11.7Fe-1.3V-1.7Si (Al-11.7Fe-1.3V-1.7Si reinforced with SiC particulates) composites sheets prepared by spray deposition (SD) $\rightarrow$ hot pressing $\rightarrow$ rolling process were investigated. The experimental results showed that the composite possessed high ${\sigma}_b$ (elevated temperature tensile strength), for instance, ${\sigma}_b$ was 315.8 MPa, which was tested at $315^{\circ}C$, meanwhile the figure was 232.6 MPa tested at $400^{\circ}C$, and the elongations were 2.5% and 1.4%, respectively. Furthermore, the composite sheets exhibited excellent thermal stability: the hardness showed no significant decline after annealing at $550^{\circ}C$ for 200 h or at $600^{\circ}C$ for 10 h. The good elevated temperature mechanical properties and excellent thermal stability should mainly be attributed to the formation of spherical ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase particulates in the aluminum matrix. Furthermore, the addition of SiC particles into the alloy is another important factor, which the following properties are responsible for. The resultant Si of the reaction between Al matrix and SiC particles diffused into Al matrix can stabilize ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase; in addition, the interface (Si layer) improved the wettability of Al/$SiC_P$, hence, elevated the bonding between them. Furthermore, the fine $Al_4C_3$ phase also strengthened the matrix as a dispersion-strengthened phase. Meanwhile, load is transferred from Al matrix to SiC particles, which increased the cooling rate of the melt droplets and improved the solution strengthening and dispersion strengthening.