• Applied Chemistry for Engineering
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• v.10 no.8
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• pp.1099-1103
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• 1999

The surface of an ${\alpha}$-alumina tube was coated with zirconium modified polycarbosilane(PZC) by dip-coating method. Then the tube was pyrolyzed at 573~823 K. The prepared inorganic composite membrane was in $1{\mu}m$ thickness and had no pinholes larger than several nm. For the pyrolyzed inorganic composite membrane, the permeation test of He, $N_2$, $CO_2$, and $O_2$ was performed at 303~423 K. The gas permeation and separation factor were increased with increasing permeation temperature. The permeation for gases was controlled by the activated diffusion mechanism. The separation factor of $CO_2$, to $N_2$was 4.9 at 363 K on the composite membrane pyrolyzed at 823 K and its value was higher than that of He and $O_2$.

• Membrane Journal
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• v.22 no.6
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• pp.424-434
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• 2012

In this study, a ceramic membrane was prepared by CVD. Tube type alpha alumina support was used for substrate and added the Ga salt in intermediate layer. Synthesized method was counter diffusion CVD method at $650^{\circ}C$ with tetramethylorthosilane (TMOS). Gas permeation was measured at $600^{\circ}C$ using single-component $H_2$, $N_2$, $CO_2$ and $CH_4$. During the steam treatment, $H_2/N_2$ permselectivity of non-Ga silica membrane was decreased 926 to 829 at $600^{\circ}C$. On the other hand $H_2/N_2$ permselectivity of added Ga silica membrane was stable 910 to 904 at $600^{\circ}C$. These results show that the metal-doped membranes improved steam stability for gas separation.