ETRI Journal

  • 제46권5호
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  • Pages.783-792
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  • 2024
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  • 1225-6463(pISSN)
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  • 2233-7326(eISSN)
한국전자통신연구원 (Electronics and Telecommunications Research Institute)
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Fabrication of low-loss symmetrical rib waveguides based on x-cut lithium niobate on insulator for integrated quantum photonics

  • Hong-Seok Kim (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Guhwan Kim (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Tetiana Slusar (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Jinwoo Kim (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Jiho Park (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Jaegyu Park (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Hyeon Hwang (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Woojin Noh (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Hansuek Lee (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Min-Kyo Seo (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Kiwon Moon (Quantum Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Jung Jin Ju (Quantum Technology Research Division, Electronics and Telecommunications Research Institute)
  • 투고 : 2024.03.23
  • 심사 : 2024.08.13
  • 발행 : 2024.10.10
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초록

Lithium niobate on insulator (LNOI) is a promising material platform for applications in integrated quantum photonics. A low optical loss is crucial for preserving fragile quantum states. Therefore, in this study, we have fabricated LNOI rib waveguides with a low optical propagation loss of 0.16 dB/cm by optimizing the etching conditions for various parameters. The symmetry and smoothness of the waveguides on x-cut LNOI are improved by employing a shallow etching process. The proposed method is expected to facilitate the development of on-chip quantum photonic devices based on LNOI.

키워드

과제정보

This study was supported by the Institute of Information & Communications Technology Planning & Evaluation (IITP) grant funded by the Korean government (MSIT) (Grant 2022-0-00463, Development of a quantum repeater in optical fiber networks for quantum internet), (Grant 2021-0-00552, Development of PPLN waveguide devices for single-photon wavelength conversions), and by the Electronics and Telecommunications Research Institute (ETRI) grant funded by the Korean government (Grant 24ZS1220, Proprietary basic research on computing technology for the disruptive innovation of computational performance). We are grateful to Dr. Min-Su Kim and Dr. Jae-Pil So for their valuable discussions and comments.

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