The Journal of the Convergence on Culture Technology (문화기술의 융합)

The International Promotion Agency of Culture Technology (국제문화기술진흥원)
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Calculation of the Elongation for a Polymer Coating Film from Mechanical Properties Measured by Instrumented Indentation Test

계장화압입시험 측정 물성으로부터 고분자 코팅막의 연신율 산출

  • 신성환 (한라대학교 화학공학과)
  • Received : 2024.08.22
  • Accepted : 2024.11.10
  • Published : 2024.11.30
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Abstract

The instrumented indentation test(IIT) is a useful analytical technique for measuring the mechanical properties of micro or nanoscale thin films processed via coating or plating on substrates. This study aims to measure the mechanical properties of a polymer film coated on a wafer using a nanoindenter, the most representative instrument for the instrumented indentation test. We will discuss how to derive tensile strength and elongation from the obtained measurements. Typically, mechanical properties measurable by a nanoindenter include composite hardness, plastic hardness, elastic modulus, and elasticity, whereas measuring tensile strength or elongation, achievable with traditional tensile testing machines, is not possible. Therefore, this study will analyze the correlation between hardness and elongation, and based on the results, we will explore a method to derive elongation from the mechanical property data measured by the nanoindenter.

계장화압입시험은 기재 위에 코팅 또는 도금 등의 방식으로 가공된 마이크로 또는 나노 스케일 박막의 기계적 물성측정에 유용한 분석 기술이다. 본 연구는 계장화압입시험의 가장 대표적인 시험기라고 할 수 있는 나노인덴터를 사용하여 웨이퍼에 코팅된 고분자 필름의 기계적 물성을 측정하고, 이렇게 얻어진 측정값으로 부터 인장강도, 연신율을 산출하는 방법에 대해서 논의 해 보고자 한다. 일반적으로 나노인덴터로 부터 측정 할 수 있는 기계적 물성은 복합경도, 소성경도, 탄성계수, 탄성율 등으로 전통적인 인장시험기를 통하여 얻을 수 있는 인장강도 또는 연신율의 측정이 불가능하다. 따라서 본 연구에서는 경도(Hardness)와 연신율(Elongation)과의 상관성을 분석 해 보고, 분석 결과를 통하여 나노인덴터로 측정한 기계적 물성 데이터를 이용하여 연신율을 산출하는 방법에 대해서 연구 하고자 한다.

Keywords

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