Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Effect of Packing Density of Alumina Sheet on Sintering Behavior

알루미나 시트의 Packing Density가 소결 거동에 미치는 영향

  • Hee Hyun Han (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Jin Sik Choe (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Zee-Hoon Park (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Hyo-Soon Shin (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Dong-Hun Yeo (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology)
  • 한희현 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 최진식 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 박지훈 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 신효순 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 여동훈 (한국세라믹기술원 세라믹종합솔루션센터)
  • Received : 2024.09.27
  • Accepted : 2024.10.02
  • Published : 2024.11.01
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Abstract

As the operating environment in semiconductor processes becomes demanding, research is being conducted to manufacture dense alumina substrates without defects after sintering to ensure high durability of electrostatic chucks, which are critical components in semiconductor equipment. Therefore, in this study, in order to manufacture green sheets with a high filling ratio for implementing a high-density substrate, alumina powders with average particle sizes of 2.07 ㎛ (L) and 0.37 ㎛ (S) were mixed in ratios of 9:1, 8:2, 7:3, and 6:4, respectively, and green sheets were manufactured and the filling ratio and sintering behavior were observed. Green sheets were fabricated by preparing a slurry using organic materials in Al2O3 powders of different particle sizes. The packing density of the green sheet mixed with L and S alumina powders with different average particle sizes in a ratio of 7:3 before and after binder burn-out showed the highest values of 3.19 g/cm3 and 2.87 g/cm3, respectively. As a result of observing the sintered density based on the mixing ratio of alumina powders revealed that the alumina sheet mixed at a 6:4 ratio of L and S powders, sintered at 1,700℃, exhibited the best sintering characteristics with a density of 3.96 g/cm3.

Keywords

Acknowledgement

본 연구는 2023년도 중소벤처기업부의 [중소기업기술혁신개발사업(강소기업100)]의 지원에 의한 연구임 [과제번호: RS-2021-TI019674].

References

  1. D. R. Wright, L. Chen, P. Federlin, and K. Forbes, J. Vac. Sci. Technol. B, 13, 1910 (1995). doi: https://doi.org/10.1116/1.588108
  2. K. Yatsuzuka, J. Toukairin, K. Asano, and S. Aonuma, Proc. Conference Record of the 2001 IEEE Industry Applications Conference. 36th IAS Annual Meeting (Cat. No.01CH37248) (IEEE, Chicago, USA, 2001) p. 399. doi: https://doi.org/10.1109/IAS.2001.955451
  3. K. Yatsuzuka, F. Hatakeyama, K. Asano, and S. Aonuma, IEEE Trans. Ind. Appl., 36, 510 (2000). doi: https://doi.org/10.1109/28.833768
  4. L. Yang and J. Lee, Robot. Cim.-Int. Manuf., 28, 66 (2012). doi: https://doi.org/10.1016/j.rcim.2011.06.007
  5. A. Krell and P. Black, J. Eur. Ceram. Soc., 16, 1189 (1996). doi: https://doi.org/10.1016/0955-2219(96)00044-1
  6. A. M. Abyzov, Glass Ceram., 75, 352 (2019). doi: https://doi.org/10.1007/s10717-019-00084-8
  7. G. R. Karagedov and A. L. Myz, J. Eur. Ceram. Soc., 32, 219 (2012). doi: https://doi.org/10.1016/j.jeurceramsoc.2011.08.012
  8. M. P. Harmer and R. J. Brook, J. Mater. Sci., 15, 3017 (1980). doi: https://doi.org/10.1007/BF00550370
  9. D. Galusek, J. Sedlacek, J. Chovanec, and M. Michalkova, Ceram. Int., 41, 9692 (2015). doi: https://doi.org/10.1016/j.ceramint.2015.04.038
  10. R. L. Coble, J. Am. Ceram. Soc., 45, 123 (1962). doi: https://doi.org/10.1111/j.1151-2916.1962.tb11099.x
  11. T. S. Yeh and M. D. Sacks, J. Am. Ceram. Soc., 71, C-484 (1988). doi: https://doi.org/10.1111/j.1151-2916.1988.tb05812.x
  12. A. R. Olszyna, P. Marchlewski, and K. J. Kurzydlowski, Ceram. Int., 23, 323 (1997). doi: https://doi.org/10.1016/S0272-8842(96)00031-4
  13. P. A. Marchlewski, A. R. Olszyna, K. J. Kurzydlowski, and B. Ralph, Ceram. Int., 25, 157 (1999). doi: https://doi.org/10.1016/S0272-8842(98)00018-2
  14. J. M. Ting and R. Y. Lin, J. Mater. Sci., 30, 2382 (1995). doi: https://doi.org/10.1007/BF01184590
  15. J. A. Lee and J. J. Kim, J. Korean Ceram. Soc., 36, 718 (1999). doi: https://koreascience.kr/article/JAKO199911920043520.page
  16. M. N. Rahaman, Ceramic Processing and Sintering 2nd Edition (CRC Press, Boca Raton, 2003) p. 875. doi: https://doi.org/10.1201/9781315274126