Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of pulse frequency and duty cycle on microstructure, residual stress and mechanical properties of ZrN coatings deposited by mid-frequency magnetron sputtering

펄스 주파수 및 듀티 사이클이 중간 주파수 마그네트론 스퍼터법으로 증착된 ZrN 코팅막의 미세구조, 잔류응력 및 기계적 특성에 미치는 영향

  • Sung-Yong Chun (Department of Advanced Materials Science and Engineering, Mokpo National University)
  • 전성용 (목포대학교 첨단재료공학과)
  • Received : 2022.08.29
  • Accepted : 2022.09.23
  • Published : 2024.08.31
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Abstract

Nanocrystalline zirconium nitride (ZrN) coatings were deposited by mid-frequency direct current sputtering (mfMS) with varying pulsed plasma parameters such as pulse frequency and duty cycle to understand the effect of pulsed plasma on the microstructure, residual stress and mechanical properties. The results show that, with the increasing pulse frequency and decreasing duty cycle, the coating morphology changed from a porous columnar to a dense structure, with finer grains. Mid-frequency magnetron sputtered ZrN coatings with pulse frequency of 30 kHz showed the highest both nanoindentation hardness of 16.3 GPa, and elastic modulus of 214.4 GPa. In addition, Effect of pulse frequency on a residual stress and average crystal grain sizes was also investigated.

Keywords

Acknowledgement

이 성과는 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 연구임(No. 2022H1D8A303867111)

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