한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제57권1호
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  • Pages.38-48
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  • 2024
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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아세톤의 선택적 감지를 위한 In2O3 zig-zag nanocolumns

Highly ordered In2O3 zig-zag nanocolumns for selective detection of acetone

  • 정재한 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 김호균 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 조윤행 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 황준호 (연세대학교 신소재공학과) ;
  • 박시형 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 손성우 (연세대학교 신소재공학과) ;
  • 정수빈 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 이은솔 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 이광재 (상명대학교 정보보안공학과) ;
  • 심영석 (한국기술교육대학교 에너지신소재화학공학부)
  • Jae Han Chung (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Ho-Gyun Kim (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Yun-Haeng Cho (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Junho Hwang (Department of Materials Science and Engineering, Yonsei University) ;
  • See-Hyung Park (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Sungwoo Sohn (Department of Materials Science and Engineering, Yonsei University) ;
  • Su Bin Jung (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Eunsol Lee (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Kwangjae Lee (Department of Information Security Engineering, Sangmyung University) ;
  • Young-Seok Shim (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education)
  • 투고 : 2024.02.06
  • 심사 : 2024.02.21
  • 발행 : 2024.02.29
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초록

We fabricated In2O3 zig-zag nanocolumns(ZZNCs) by oblique angle deposition method based on e-beam evaporator for highly sensitive and selective CH3COCH3 sensor. Our results indicate that as the ZZNCs layer stacks, the gas response also increases. In comparison to thin films, ZZNCs at 5 layer show a 117-fold enhancement in gas response and a rapid response time (~2 s). When measured with various gases, it showed a high selectivity towards acetone. Under conditions of 80% R.H., exposure to CH3COCH3 gas theoretically indicated a detection limit of 1.2 part-per-billion(ppb). These results suggest the potential of In2O3 ZZNCs as a breath analyzer for the diagnosis of diabetes.

키워드

과제정보

본 논문은 2023년도 교육부의 재원으로 한국연구재단의 지원을 받아 수행된 지자체-대학 협력기반 지역혁신 사업의 결과입니다.(2021RIS-004) 본 논문은 한국기술교육대학교 산학협력단 공용장비센터의 지원으로 연구되었습니다.

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