Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Thin-Film Transistor-Based Strain Sensors on Stiffness-Engineered Stretchable Substrates

강성도 국부 변환 신축성 기판 위에 제작된 박막 트랜지스터 기반 변형률 센서

  • Youngmin Jo (Department of Convergence IT Engineering, Pohang University of Science and Technology) ;
  • Gyungin Ryu (Department of Materials Science and Engineering, Pohang University of Science and Technology) ;
  • Sungjune Jung (Department of Convergence IT Engineering, Pohang University of Science and Technology)
  • 조영민 (포항공과대학교 IT 융합공학과) ;
  • 류경인 (포항공과대학교 신소재공학과) ;
  • 정성준 (포항공과대학교 IT 융합공학과)
  • Received : 2023.11.16
  • Accepted : 2023.11.29
  • Published : 2023.11.30
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Abstract

Stiffness-engineered stretchable substrate technology has been widely used to produce stretchable displays, transistors, and integrated circuits because it is compatible with various flexible electronics technologies. However, the stiffness-engineering technology has never been applied to transistor-based stretchable strain sensors. In this study, we developed thin-film transistor-based strain sensors on stiffness-engineered stretchable substrates. We designed and fabricated strain-sensitive stretchable resistors capable of inducing changes in drain currents of transistors when subjected to stretching forces. The resistors and source electrodes of the transistors were connected in series to integrate the developed stretchable resistors with thin-film transistors on stretchable substrates by printing the resistors after fabricating transistors. The thin-film transistor-based stretchable strain sensors demonstrate feasibility as strain sensors operating under strains of 0%-5%. This strain range can be extended with further investigations. The proposed stiffness-engineering approach will expand the potential for the advancement and manufacturing of innovative stretchable strain sensors.

Keywords

Acknowledgement

본 연구는 2023년도 정부(과학기술정보통신부)의 재원으로 연구개발특구진흥재단의 지원을 받아 수행되었음 (2020-DD-UP-0278).

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