Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
권호 표지
DOI QR코드

DOI QR Code

Research on Tribology Characteristics Using DLC Thin Film and Lithography Processes

DLC 박막 및 리소그래피 공정을 적용한 트라이볼러지 특성 연구

  • T.H. Jang (Dept. of Nanomechatronics Engineering, Pusan National University) ;
  • J.H. Park (Dept. of Nanomechatronics Engineering, Pusan National University) ;
  • T.G. Kim (Dept. of Nanomechatronics Engineering, Pusan National University)
  • 장태환 (부산대학교 나노메카트로닉스공학과) ;
  • 박진혁 (부산대학교 나노메카트로닉스공학과) ;
  • 김태규 (부산대학교 나노메카트로닉스공학과)
  • Received : 2023.11.10
  • Accepted : 2023.11.24
  • Published : 2023.11.30
Download PDF
⟨ Previous Next ⟩

Abstract

As the demand for mechatronic systems and high performance increases in the machinery industry, the importance of improving friction characteristics is emphasized. During relative movement of objects, friction and wear occur on two surfaces in contact, and various methods are being designed to increase the lifespan and energy efficiency of machines. The energy increase effect using lubricants is a well-known method. In this study, a micro-sized rectangular grid pattern was produced by applying a precise micro-pattern photo lithography process. Rectangular grid patterns of the same shape and friction behavior according to the size of the pattern were produced in convex and concave shapes, and the tribological characteristics of each were analyzed.

Keywords

Acknowledgement

본 과제는 부산대학교 기본연구지원사업(2년)에 의하여 연구되었음.

References

  1. M. R. Kim, M. R. Kim, S. J. Lee, J. H. Jeong, and D. W. Lee: Lubrication Properties of Various Pattern Shapes on Rough Surfaces Considering Asperity Contact, 17 (2018) 39-46.
  2. W. Zhao, J. Pu, Q. Yu, Z. Zeng, X. Wu, and Q. Xue: Colloids and Surfaces A: Physicochemical and Engineering Aspects, 428 (2013) 70-78. https://doi.org/10.1016/j.colsurfa.2013.03.047
  3. X. Wang, X. Zhang, C. Wang, Y. Lu, and J. Hao: Tribology International, 175 (2022).
  4. Etsion, Izhak: Tribology Letters, 17 (2004).
  5. X. Wang, W. Liu, F. Zhou, and D. Zhu: Tribology International, 175 (2009) 1118-1123.
  6. M. Wakuda, Y. Yamauchi, S. Kanzaki, and Y. Yasuda: Wear, 254 (2003) 356-363. https://doi.org/10.1016/S0043-1648(03)00004-8
  7. J. G. Steck, M. Afshar-Mohajer, Q. Sun, X. Meng, and M. Zou: Tribology International, 132 (2019) 75-84. https://doi.org/10.1016/j.triboint.2018.12.012
  8. T. H. Jang, J. H. Park, Y. W. Kwon, B. R. Cho, and T. G. Kim: J. of the Korean Society for Heat Treatment, 36 (2023).
  9. L. Lu, Z. Zhang, Y. Guan, and H. Zhenge: Optics & Laser Technology, 106 (2018), 272. https://doi.org/10.1016/j.optlastec.2018.04.020