한국재료학회지 (Korean Journal of Materials Research)

  • 제33권11호
  • /
  • Pages.497-501
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  • 2023
  • /
  • 1225-0562(pISSN)
  • /
  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
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전자빔 조사에 따른 ZnO/Cu/ZnO 박막의 전기광학적 특성 및 전기자동차용 투명 발열체 특성

Effect of Electron Beam Irradiation on the Opto-Electrical and Transparent Heater Property of ZnO/Cu/ZnO Thin Films for the Electric Vehicle Application

  • 이연학 (울산대학교 첨단소재공학부) ;
  • 박민성 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Yeon-Hak Lee (School of Materials Science and Engineering, University of Ulsan) ;
  • Min-Sung Park (School of Materials Science and Engineering, University of Ulsan) ;
  • Daeil Kim (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2023.10.24
  • 심사 : 2023.11.16
  • 발행 : 2023.11.27
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초록

ZnO/Cu/ZnO (ZCZ) thin films were deposited at room temperature on a glass substrate using direct current (DC) and radio frequency (RF, 13.56 MHz) magnetron sputtering and then the effect of post-deposition electron irradiation on the structural, optical, electrical and transparent heater properties of the films were considered. ZCZ films that were electron beam irradiated at 500 eV showed an increase in the grain sizes of their ZnO(102) and (201) planes to 15.17 nm and 11.51 nm, respectively, from grain sizes of 13.50 nm and 10.60 nm observed in the as deposited films. In addition, the film's optical and electrical properties also depended on the electron irradiation energies. The highest opto-electrical performance was observed in films electron irradiated at 500 eV. In a heat radiation test, when a bias voltage of 18 V was applied to the film that had been electron irradiated at 500 eV, its steady state temperature was about 90.5 ℃. In a repetition test, it reached the steady state temperature within 60 s at all bias voltages.

키워드

과제정보

This results was supported by "Regional Innovation Strategy (RIS)" through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (MOE) (2021RIS-003).

참고문헌

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