한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제56권5호
  • /
  • Pages.335-340
  • /
  • 2023
  • /
  • 1225-8024(pISSN)
  • /
  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
DOI QR코드

DOI QR Code

Ti-Al-Si-Cu-N 후막의 Cu 조성에 따른 기계적 특성과 미세구조 변화에 관한 연구

Influence of Cu Composition on the Mechanical Properties and Microstructure of Ti-Al-Si-Cu-N thick films

  • 이연학 (울산대학교 첨단소재공학부) ;
  • 허성보 (한국생산기술연구원 동남본부 첨단하이브리드생산기술센터) ;
  • 박인욱 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Yeon-Hak Lee (School of Materials Science and Engineering, University of Ulsan) ;
  • Sung-Bo Heo (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology) ;
  • In-Wook Park (School of Materials Science and Engineering, University of Ulsan) ;
  • Daeil Kim (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2023.10.10
  • 심사 : 2023.10.26
  • 발행 : 2023.10.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Quinary component of 3㎛ thick Ti-Al-Si-Cu-N films were deposited onto WC-Co and Si wafer substrates by using an arc ion plating(AIP) system. In this study, the influence of copper(Cu) contents on the mechanical properties and microstructure of the films were investigated. The hardness of the films with 3.1 at.% Cu addition exhibited the hardness value of above 42 GPa due to the microstructural change as well as the solid-solution hardening. The instrumental analyses revealed that the deposited film with Cu content of 3.1 at.% was a nano-composites with nano-sized crystallites (5-7 nm in dia.) and a thin layer of amorphous Si3N4 phase.

키워드

과제정보

본 과제(결과물)는 2023년도 교육부의 재원으로 한국연구재단의 지원을 받아 수행된 지자체-대학협력기반 지역혁신 사업의 결과입니다. (2021RIS-003)

참고문헌

  1. Q. He, J. DePaiva, J. Kohlscheenm S. Veldhuis, Analysis of the performance of PVD AlTiN coating with five different Al/Ti ratios during the high-speed turning of stainless steel 304 under dry and wet cooling conditions, Wear, 492 (2022) 204213. 
  2. D. H. Kim, Y. J. Kang, Y. J. Jang, J. K. Kim, Enhanced Wear Resistance of Cutting Tools Using Multilayer ta-C Coating, Journal of the Korean Institute of Surface Engineering, 53 (2020) 360-368.  https://doi.org/10.5695/JKISE.2020.53.6.360
  3. K. H. Yeo, E. S. Park, H. C. Lee, Characteristics of TiAlCrSiN coating to improve mold life for high temperature liquid molding, Journal of the Korean Institute of Surface Engineering, 54(5) (2021) 285-293.  https://doi.org/10.5695/JKISE.2021.54.5.285
  4. S. B. Heo, M. S. Lee, H. D. Kim, W. R. Kim, J. H. Kim, I. W. Park, D. Kim, Oxidation behavior of Ti-Al-Si-N-O nanocomposite Films deposited by filtered arc ion plating technique, Journal of Nanoscience and Nanotechnology, 19 (2019) 4195-4198.  https://doi.org/10.1166/jnn.2019.16274
  5. N. A. G. Ahmed, Ion plating technology developments and application (1987) 103. 
  6. I. W. Park, S. R. Choi, j. H. Suh, C. G. Park, K. H. Kim, Deposition and mechanical evaluation of super hard Ti-Al-Si-N nano-composite films by a hybrid coating system, Thin solid films, 30 (2004) 443-448. 
  7. W. R. Kim, S. B. Heo, H. D. Kim, J. H. Kim, I. W. Park, W. S. Chung, High temperature oxidation behavior of Cr-Al-Si-N nano-composite films deposited by filtered arc ion plating technique, Journal of Nanoscience and Nanotechnology, 20 (2020) 4394-4397.  https://doi.org/10.1166/jnn.2020.17605
  8. J. Shi, A. Kumar, L. Zhang, X. Jiang, Z. L. Pei, J. Gong, C. Sun, Effect of Cu addition on properties of Ti-Al-Si-N nano-composite films deposited by cathodic vacuum arc ion plating, Surface and Coatings Technology, 206 (2012) 2947-2953.  https://doi.org/10.1016/j.surfcoat.2011.12.027
  9. J. C. Ding, T. F. Zhang, J. M. Yun, K. H. Kim, Q. M, Wang, Effect of Cu addition on the microstructure and properties of TiB2 films deposited by a hybrid system combining high power impulse magnetron sputtering and pulsed dc magnetron sputtering, Surface and Coatings Technology, 344 (2018) 441-448.  https://doi.org/10.1016/j.surfcoat.2018.03.026
  10. X. Chen, Y. Du, Y. W. Chung, Commentary on using H/E and H3/E2 as proxies for fracture toughness of hard coatings, Thin solid films, 668 (2019) 137265. 
  11. S. B. Heo, J. H. Kim, I. W. Park, Understanding the mechanical properties of advanced hybrid nano-composite surface materials, Journal of Mechanical Science and Technology, 57 (2017) 42-47. 
  12. J. Shi, C. M. Muders, A. Kumar, L. Zhang, X. Jiang, Z. L. Pei, J. Gong, C. Sun, Study on nano-composite Ti-Al-Si-Cu-N films with various Si contents deposited by cathodic vacuum arc ion platin, Applied Surface Science, 258 (2012) 9642-9649.  https://doi.org/10.1016/j.apsusc.2012.06.002
  13. S. B. Heo, W. R. Kim, J. H Kim, S. H. Choe, D. Kim, I. W Park, Effects of Copper Content on the Microstructural, Mechanical and Tribological Properties of TiAlSiN-Cu Superhard Nanocomposite Coatings, Coatings, 12 (2022) 1995.