Acknowledgement
본 논문은 한국생산기술연구원 기본사업 "응급환자의 자가호흡 실시간 모니터링용 휴대용 호흡 센서 구현을 위한 열 대류형 고감도 유량센서 개발 (Kitech UI-23-0012)" 지원으로 수행한 연구입니다. 이 논문은 2020년도 정부(과학기술정보통신부)의 재원으로 연구개발특구진흥재단의 지원을 받아 수행된 연구임(2020-DD-UP-0348). 본 연구는 중소벤처기업부와 소기업기술정보진흥원의 "지역특화산업육성+(R&D, S3268879)"사업의 지원을 받아 수행된 연구결과임.
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