전기전자학회논문지 (Journal of IKEEE)

  • 제27권3호
  • /
  • Pages.288-295
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  • 2023
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  • 1226-7244(pISSN)
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  • 2288-243X(eISSN)
한국전기전자학회 (Institute of Korean Electrical and Electronics Engineers)
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산소 후열처리에 따른 Ga2O3/SiC photodetector의 전기 광학적 특성

Impact of Oxygen Annealing on Deep-level Traps in Ga2O3/SiC Photodetectors

  • Seung-Hwan Chung (Dept. of Electronic materials Engineering, Kwangwoon University) ;
  • Tae-Hee Lee (Dept. of Electronic materials Engineering, Kwangwoon University) ;
  • Soo-Young Moon (Dept. of Electronic materials Engineering, Kwangwoon University) ;
  • Se-Rim Park (Dept. of Electronic materials Engineering, Kwangwoon University) ;
  • Hyung-Jin Lee (Dept. of Electronic materials Engineering, Kwangwoon University) ;
  • Geon-Hee Lee (Dept. of Electronic materials Engineering, Kwangwoon University) ;
  • Sang-Mo Koo (Dept. of Electronic materials Engineering, Kwangwoon University)
  • 투고 : 2023.08.25
  • 심사 : 2023.09.26
  • 발행 : 2023.09.30
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초록

본 연구에서는 radio frequency (RF)-스퍼터링을 이용하여 SiC 기판 위에 Ga2O3 박막을 증착하여 Metal-Semiconductor-Metal (MSM) UV photodetector (PD)를 제작하였고, 산소 후열처리에 따른 PD 성능을 연구하였다. 산소 후열처리된 Ga2O3 박막은 외부 광에 대한 전류의 상당한 증가와 시간 의존성 on/off 광 응답 특성에서 측정된 감소시간이 1.21, 1.12 s로 후열처리를 하지 않은 박막의 감소시간인 1.34, 3.01 s 보다 더 빠른 반응을 보여주었다. 이러한 특성은 산소 후열처리 후의 산소 공공 및 결함 분포 변화에 기인한다. 우리의 연구 결과는 산소 후열처리가 PD 성능 향상에 영향을 미칠 수 있다는 것을 확인하였다.

In this work, we investigated the role of oxygen annealing on the performance of Metal-Semiconductor-Metal (MSM) UV photodetector (PD) fabricated by radio frequency (RF)-sputtered Ga2O3 films on SiC substrates. Oxygen-nnealed Ga2O3 films displayed a notable increase in photocurrent and a faster decay time, indicating a decrease in persistent photoconductivity. This improvement is attributed to the reduction of oxygen vacancies and variation of defects by oxygen post-annealing. Our findings provide valuable insights into enhancing PD performance through oxygen annealing.

키워드

과제정보

This work was supported by the Korea Institute for Advancement of Technology (KIAT) (P0012451), the National Research Foundation (NRF) funded by the Korea government(MSIT)(2021R1F1A1057620), and a research grant from Kwangwoon university in 2023.

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