Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Enhanced Electrical and Optical Properties of IWO Thin Films by Post-deposition Electron Beam Irradiation

증착 후 전자빔 조사에 따른 IWO 박막의 전기적, 광학적 특성 개선 효과

  • Jae-Wook Choi (Korea Institute of Industrial Technology) ;
  • Sung-Bo Heo (Korea Institute of Industrial Technology) ;
  • Yeon-Hak Lee (School of Materials Science and Engineering, University of Ulsan) ;
  • Daeil Kim (School of Materials Science and Engineering, University of Ulsan)
  • 최재욱 (한국생산기술연구원 동남본부 첨단하이브리드생산기술센터) ;
  • 허성보 (한국생산기술연구원 동남본부 첨단하이브리드생산기술센터) ;
  • 이연학 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Received : 2023.09.06
  • Accepted : 2023.09.25
  • Published : 2023.09.30
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Abstract

Transparent and conducting tungsten (W) doped indium oxide (IWO) thin films were deposited on the glass substrate by using RF magnetron sputtering and then electron irradiation was conducted to investigate the effect of electron irradiation on the optical and electrical properties of the films. The electron irradiated films showed three x-ray diffraction peaks of the In2O3 (222), (431) and (046) planes and the full width at half maximum values are decreased as increased electron irradiation energy. In the atomic force microscope analysis, the surface roughness of as deposited films was 1.70 nm, while the films electron irradiated at 700 eV, show a lower roughness of 1.28 nm. In this study, the figure of merit (FOM) of as deposited films is 2.07 × 10-3 Ω-1, while the films electron irradiated at 700 eV show the higher FOM value of 5.53 × 10-3 Ω-1. Thus, it is concluded that the post-deposition electron beam irradiation is the one of effective methods to enhance optical and electrical performance of IWO thin films.

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References

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