Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Introduction to Cathodoluminescence Spectroscopy Using Scanning Transmission Electron Microscopy

주사 투과 전자현미경을 활용한 음극형광 분석법

  • Sung-Dae Kim (Department of Materials Science and Engineering, Pukyong National University)
  • Received : 2023.05.03
  • Accepted : 2023.05.08
  • Published : 2023.07.01
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Abstract

The utilization of scanning transmission electron microscopy (STEM) in conjunction with cathodoluminescence (CL) has emerged as a valuable tool for the investigation of material optical properties. In recent years, this technique has facilitated significant advancements in the fields of plasmonics and quantum emitters by surpassing prior technical restrictions. The review commences by providing an outline of the diverse STEM-CL operating modes and technical aspects of the instrumentation. The review explains the fundamental physics of light production under electron beam irradiation and the physical basis for interpreting STEM-CL experiments for different types of excitations. Additionally, the review compares STEM-CL to other related techniques such as scanning electron microscope CL, photoluminescence, and electron energy-loss spectroscopy.

Keywords

Acknowledgement

이 논문은 부경대학교 자율창의술연구비(2022년)에 의하여 연구되었음.

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