Acknowledgement
본 논문은 2022년 정부(산업통상자원부) 및 한국산업기술평가관리원의 지원을 받아 수행된 연구이며(RS-2022-00154720, Si-on-SiC 구조기반 차세대전력 반도체개발), 2021년 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 지원을 받아 수행되었습니다(P0012451, 2021년 산업전문인력역량강화사업).
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