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High-functional Transparent Electrode Design and Shielding Effect

금속산화물 기반의 고성능 투명 전극 및 전자파 차단 효과

  • Seongwon Cho (Department of Electrical Engineering, Incheon National University) ;
  • Wu-shin Cha (Department of Electrical Engineering, Incheon National University) ;
  • Junheon Ha (Department of Electrical Engineering, Incheon National University) ;
  • Junsik Lee (Department of Electrical Engineering, Incheon National University) ;
  • Jiwon Kang (Department of Electrical Engineering, Incheon National University) ;
  • Nguyen Thanh Tai (Department of Electrical Engineering, Incheon National University) ;
  • Joondong Kim (Department of Electrical Engineering, Incheon National University)
  • 조성원 (전기공학과, 국립인천대학교) ;
  • 차우신 (전기공학과, 국립인천대학교) ;
  • 하준헌 (전기공학과, 국립인천대학교) ;
  • 이준식 (전기공학과, 국립인천대학교) ;
  • 강지원 (전기공학과, 국립인천대학교) ;
  • 응우옌 탄 타이 (전기공학과, 국립인천대학교) ;
  • 김준동 (전기공학과, 국립인천대학교)
  • Received : 2023.02.12
  • Accepted : 2023.03.13
  • Published : 2023.03.31

Abstract

Functional transparent electrode was achieved by metal oxide-metal-Metal oxide (OMO) structure. Tailoring of metal oxide and metal layers, optically transparent and electrically excellent OMO films were investigated. Silver (Ag) is adopted for the metal layer and Ag oxide (AgO) is reactively formed by flowing O2 gas during the sputtering process. This spontaneous AgO formation from Ag simultaneously provides the good electrical interface with high transparency. Due to the feature of transparent electrode of OMO, it endows the shielding effect (SE) function of electromagnetic interference. Optically transparent and electrically conductive OMO electrode shows the high transmittance (83.7%) and low sheet resistance (6.5 Ω/☐) with SE of 29.54 dB.

Keywords

Acknowledgement

The authors acknowledge the financial support of the Basic Science Research Program through the National Research Foundation (NRF-2020R1A2C1009480) of the Ministry of Education of Korea and the Brain Pool Program funded by the Ministry of Science and ICT (NRF-2022H1D3A2A01089675 and NRF-2021H1D3A2A02096147). This research was also supported by 2022 Fostering project on Regional Characterization Program through the INNOPOLIS funded by Ministry of Science and ICT (2022-ITRD-0209).

References

  1. Kwon, J. H., "Trend of researches for human effects of electromagnetic fields," Electronics and Telecommunications Trends, 31(3), 42-49 (2015).
  2. Gang, Y. M., "Principles of electromagnetic shielding and related technological trends," The Korean Institute of Electrical Engineers, 68(1), 31-37 (2019).
  3. Chung, M. H., Kim, S. Y., Yoo, D. H., Kim, J. H., "Materials and characteristics of emerging transparent electrodes," Applied Chemistry for Engineering, 25(3), 242-248 (2014). https://doi.org/10.14478/ace.2014.1013
  4. Yeon, J. H., Kim, H. B., "Influence of Ag thickness on properties of AZO/Ag/AZO multi-layer thin films," Journal of the Semiconductor & Display Technology, 16(2), 27-31 (2017).
  5. Schubert, S., Hermenau, M., Meiss, J., Muller-Meskamp, L., Leo, K., "Oxide sandwiched metal thin-film electrodes for long -term stable organic solar cells," Advanced Functional Materials, 22(23), 4993-4999 (2012). https://doi.org/10.1002/adfm.201201592
  6. Cho, Y., Parmar, N. S., Nahm, S., Choi, J. W., "Full range optical and electrical properties of Zn-doped SnO2 and oxide/ metal/oxide multilayer thin films deposited on flexible PET substrate," Journal of Alloys and Compounds, 694, 217-222 (2017). https://doi.org/10.1016/j.jallcom.2016.09.293
  7. Jeong, J. A., Park, Y. S., Kim, H. K., "Comparison of electrical, optical, structural, and interface properties of IZO-Ag-IZO and IZO-Au-IZO multilayer electrodes for organic photovoltaics," Journal of Applied Physics, 107(2), 023111 (2010).
  8. Jeong, J. A., Kim, H. K., "Low resistance and highly transparent ITO-Ag-ITO multilayer electrode using surface plasmon resonance of Ag layer for bulk-heterojunction organic solar cells," Solar Energy Materials and Solar Cells, 93(10), 1801-1809 (2009). https://doi.org/10.1016/j.solmat.2009.06.014
  9. Riveiro, J. M., Normile, P. S., Andres, J. P., Gonzalez, J. A., De Toro, J. A., Munoz, T., Muniz, P., "Oxygen-assisted control of surface morphology in nonepitaxial sputter growth of Ag," Applied physics letters, 89(20), 201902 (2006).
  10. Jeong, E., Lee, T., Lee, S.-G., Yu, S. M., Bae, J.-S., Lee, G.-H., Choi, D., Yun, J., "Thermal stability enhancement of ultrathin Ag film electrodes by incorporating atomic oxygen," Applied Surface Science, 546, 149149 (2021).
  11. Wachs, I. E., Madix, R. J., "The oxidation of methanol on a silver (110) catalyst," Surface Science, 76(2), 531-558 (1978). https://doi.org/10.1016/0039-6028(78)90113-9
  12. Zhao, G., Shen, W., Jeong, E., Lee, S. G., Yu, S. M., Bae, T. S., Lee, G. H., Han, S. Z., Tang, J., Choi, E. A., Yun, J., "Ultrathin silver film electrodes with ultralow optical and electrical losses for flexible organic photovoltaics," ACS applied materials & interfaces, 10(32), 27510-27520 (2018). https://doi.org/10.1021/acsami.8b08578
  13. Jung, J., Lee, H., Ha, I., Cho, H., Kim, K. K., Kwon, J., Won, P., Hong, S., Ko, S. H., "Highly stretchable and transparent electromagnetic interference shielding film based on silver nanowire percolation network for wearable electronics applications," ACS applied materials & interfaces, 9(51), 44609-44616 (2017). https://doi.org/10.1021/acsami.7b14626