Acknowledgement
This research was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (2020R1A6A1A03048004). This work was supported by the Technology Innovation Program (20017422, Development of raw materials and process for ArF-i photoresist) funded By the Ministry of Trade, Industry & Energy (MOTIE, Korea). This research was supported by Basic Science Research Capacity Enhancement Project through Korea Basic Science Institute (National research Facilities and Equipment Center) grant funded by the Ministry of Education (No. 2019R1A6C10 10052). This work was supported by the Korea Institute for Advancement of Technology (KIAT) and the Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea (No. P0017363).
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