Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지
DOI QR코드

DOI QR Code

ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering

마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구

  • Min, Changheum (School of Advanced Materials Engineering, Dong-Eui University) ;
  • Choi, Dooho (School of Advanced Materials Engineering, Dong-Eui University)
  • 민창흠 (동의대학교 신소재공학부) ;
  • 최두호 (동의대학교 신소재공학부)
  • Received : 2022.10.13
  • Accepted : 2022.10.20
  • Published : 2022.10.31
Download PDF
⟨ Previous Next ⟩

Abstract

Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thickness fixed at 8.5 nm. The smallest visible light transmittance of 11.1% was achieved when the overlayer and underlayer thicknesses were 90 and 30 nm, respectively. We conducted electrically driven Joule heating test for the Cu layers having thicknesses of 8.5 nm (Rs: 14.7 Ohm/sq.) and 19 nm (Rs: 3.4 Ohm/sq.). External voltages were increased with an interval of 2 V until irreversible failures occurred at temperatures of ~390 ℃ and 550 ℃, respectively. At each voltage increase before heater failures, the heater exhibited superior thermal response with the heater temperatures reaching over 90% of the final temperatures. The heaters also showed excellent reproducibility when turning on and off the heater repeatedly.

Keywords

Acknowledgement

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIT) (grant number NRF-2022R1A2B5B01001938) and Basic Science Research Capacity Enhancement Project through Korea Basic Science Institute (Core-facility for Converging Materials) grant funded by the Ministry of Education (2019R1A6C1010045). This work was supported by Dong-eui University Grant (202201630001)

References

  1. Z. Chen, W. Li, R. Li, Y. Zhang, G. Xu, H. Cheng, Fabrication of highly transparent and conductive indium-tin oxide thin films with a high figure of merit via solution processing, Langmuir, 29 (2013) 13836-13842. https://doi.org/10.1021/la4033282
  2. X. Guo, X. Liu., F. Lin, H. Li, Y. Fan, N. Zhang, Highly conductive transparent organic electrodes with multilayer structures for rigid and flexible optoelectronics, Sci. Rep., 5 (2015) 10569. https://doi.org/10.1038/srep10569
  3. K. Im, K. Cho, J. Kim, S. Kim, Transparent heaters based on solution-processed indium tin oxide nanoparticles, Thin Solid Films, 518 (2010) 3960-3963. https://doi.org/10.1016/j.tsf.2009.10.164
  4. D. T. Papanastasiou, A. Schultheiss, D. M. Rojas, C. Celle, A. Carella, J. P. Simonato, D. Bellet, Transparent heaters: A review, Adv. Funct. Mater., 30 (2020) 1910225. https://doi.org/10.1002/adfm.201910225
  5. R. Gupta, K. D. M. Rao, S. Kiruthika, G. U. Kulkarni, Visibly transparent heaters, ACS Appl. Mater. & Interf., 8 (2016) 12559-12575. https://doi.org/10.1021/acsami.5b11026
  6. S. Hong, H. Lee, J. Lee, J. Kwon, S. Han, Y. D. Suh, H. Cho, J. Shin, J. Yeo, S. H. Ko, Highly stretchable and transparent metal nanowire heater for wearable electronics applications, Adv. Mater., 27 (2015) 4744-4751. https://doi.org/10.1002/adma.201500917
  7. D. Sui, Y. Huang, L. Huang, J. Liang, Y. Ma, Y. Chen, Flexible and transparent electrothermal film heaters based on graphene materials, Small, 7 (2011) 3186. https://doi.org/10.1002/smll.201101305
  8. Y. H. Yoon, J. W. Song, D. Kim, J. Kim, J. K. Park, S. K. Oh, C. S. Han, Transparent film heater using single-walled carbon nanotubes, Adv. Mater., 19 (2007) 4284-4287. https://doi.org/10.1002/adma.200701173
  9. D. Lee, G. Bang, M. Byun, D. Choi, Highly flexible, transparent and conductive ultrathin silver film heaters for wearable electronics applications, Thin Solid Films, 697 (2020) 137835. https://doi.org/10.1016/j.tsf.2020.137835
  10. G. Bang, D. Choi, Simultaneous improvement in the corrosion resistance and visible transparency of ZnO/Cu/ZnO transparent heaters with reactively sputtered Al2O3 layers, Korean J. Met. Mater., 59 (2021) 155-161. https://doi.org/10.3365/KJMM.2021.59.3.155
  11. J. Choi, D. Choi, Fabrication of semitransparent W film heaters via phase transformation, Korean J. Met. Mater., 59 (2021) 664-669. https://doi.org/10.3365/KJMM.2021.59.9.664
  12. T. Lee, D. Kim, M. E. Suk, G. Bang, J. Choi, J. S. Bae, J. H. Yoon, W. J. Moon, D. Choi, Regulating Ag wettability via modulating surface stoichiometry of ZnO substrates for flexible electronics, Adv. Funct. Mater., 31 (2021) 2104372. https://doi.org/10.1002/adfm.202104372
  13. J. Choi, G. Bang, T. Lee, V. T. B. Tran, J. S. Bae, D. Choi, Simultaneous enhancement in visible transparency and electrical conductivity via the physicochemical alterations of ultrathin-silver-film-based transparent electrodes, Nano Letters, 22 (2022) 3133-3140. https://doi.org/10.1021/acs.nanolett.2c00592
  14. C. Ji, D. Liu, C. Zhang, L. J. Guo, Ultrathin-metal-film-based transparent electrodes with relative transmittance surpassing 100%, Nat. Commun., 11 (2020) 3367. https://doi.org/10.1038/s41467-020-17107-6
  15. Z. Balevicius, A. Paulauskas, I. Plikusiene, L. Mikoliunaite, M. Bechelany, A. Popov, A. Ramanavicius, A. ramanaviciene, Towards the application of Al2O3/ZnO nanolaminates in immunosensors: total internal reflection spectroscopic ellipsometry based evaluation of BSA immobilization, J. Mater. Chem. C, 6 (2018) 8778-8783. https://doi.org/10.1039/C8TC03091J
  16. J. Yun, Ultrathin metal films for transparent electrodes of flexible optoelectronic devices, Adv. Funct. Mater., (2017) 1606641.
  17. D. E. Aspnes, Optical properties of thin films, Thin Solid Films, 89 (1982) 249-262. https://doi.org/10.1016/0040-6090(82)90590-9
  18. T. Sun, B. Yao, A. P. Warren, K. Barmak, M. F. Toney, R. E. Peale, K. R. Coffey, Dominant role of grain boundary scattering in the resistivity of nanometric Cu films, Phys. Rev. B, 79 (2009) 041402.
  19. D. Lee, D. Choi, Highly thermostable ultrathin planar Ag transparent heaters, Microelectron. Eng., 251 (2022) 111658. https://doi.org/10.1016/j.mee.2021.111658
  20. C. V. Thompson, Solid-state dewetting of thin solid films, Annu. Rev. Mater. Res., 42 (2012) 399-434. https://doi.org/10.1146/annurev-matsci-070511-155048
  21. S. M. Lee, J. H. Kwon, S. Kwon, K. C. Choi, A review of flexible OLEDs toward highly durable unusual displays, IEEE Trans. Elect. Dev., 64 (2017) 1922-1931. https://doi.org/10.1109/TED.2017.2647964