Advances in nano research

  • 제13권2호
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  • Pages.199-206
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  • 2022
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  • 2287-237X(pISSN)
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  • 2287-2388(eISSN)
테크노프레스 (Techno-Press)
권호 표지
DOI QR코드

DOI QR Code

Taguchi method-optimized roll nanoimprinted polarizer integration in high-brightness display

  • Lee, Dae-Young (Display Research Center, Samsung Display) ;
  • Nam, Jung-Gun (Display Research Center, Samsung Display) ;
  • Han, Kang-Soo (Large Display Process Development Team, Samsung Display) ;
  • Yeo, Yun-Jong (Display Research Center, Samsung Display) ;
  • Lee, Useung (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Cho, Sang-Hwan (Display Research Center, Samsung Display) ;
  • Ok, Jong G. (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology)
  • 투고 : 2021.07.16
  • 심사 : 2022.07.26
  • 발행 : 2022.08.25
⟨ 이전 논문 다음 논문 ⟩

초록

We present the high-brightness large-area 10.1" in-cell polarizer display panel integrated with a wire grid polarizer (WGP) and metal reflector, from the initial design to final system development in a commercially feasible level. We have modeled and developed the WGP architecture integrated with the metal reflector in a single in-cell layer, to achieve excellent polarization efficiency as well as brightness enhancement through the light recycling effect. After the optimization of key experimental parameters via Taguchi method, the roll nanoimprint lithography employing a flexible large-area tiled mold has been utilized to create the 90 nm-pitch polymer resist pattern with the 54.1 nm linewidth and 5.1 nm residual layer thickness. The 90 nm-pitch Al gratings with the 51.4 nm linewidth and 2150 Å height have been successfully fabricated after subsequent etch process, providing the in-cell WGPs with high optical performance in the entire visible light regime. Finally we have integrated the WGP in a commercial 10.1" display device and demonstrated its actual operation, exhibiting 1.24 times enhancement of brightness compared to a conventional film polarizer-based one, with the contrast ratio of 1,004:1. Polarization efficiency and transmittance of the developed WGPs in an in-cell polarizer panel achieve 99.995 % and 42.3 %, respectively.

키워드

과제정보

This work was supported by the National Research Foundation of Korea (NRF) grants funded by the Korean Government (No. 2022R1I1A2073224 and No. 2022M3 C1A3090850 (Ministry of Science and ICT (MSIT)). We thank Dr. Kinam Kim, Chairman of Samsung Electronics and the process development team of the Semiconductor R&D Center for their help in manufacturing of the master mold wafer.

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