전기화학회지 (Journal of the Korean Electrochemical Society)

  • 제25권2호
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  • Pages.81-87
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  • 2022
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  • 1229-1935(pISSN)
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  • 2288-9000(eISSN)
한국전기화학회 (The Korean Electrochemical Society)
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구리전해도금에서 알킬아민의 영향 연구

Study on the Effect of Alkylamines on Cu Electroplating

  • 이재원 (금오공과대학교 화학소재공학부 화학공학전공) ;
  • 신영민 (금오공과대학교 화학소재공학부 화학공학전공) ;
  • 방대석 (금오공과대학교 화학소재공학부 화학공학전공) ;
  • 조성기 (금오공과대학교 화학소재공학부 화학공학전공)
  • Lee, Jaewon (Department of Chemical Engineering, Kumoh National Institute of Technology) ;
  • Shin, Yeong Min (Department of Chemical Engineering, Kumoh National Institute of Technology) ;
  • Bang, Daesuk (Department of Chemical Engineering, Kumoh National Institute of Technology) ;
  • Cho, Sung Ki (Department of Chemical Engineering, Kumoh National Institute of Technology)
  • 투고 : 2022.03.06
  • 심사 : 2022.03.28
  • 발행 : 2022.05.31
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초록

본 연구에서는, 알킬아민이 구리전해도금에 미치는 영향을 cyclic voltammetry를 이용해 분석해보았다. 수용액상 용해도를 갖는 알킬아민을 도금액에 첨가할 경우, Cu2+의 환원반응이 억제되는 것을 확인할 수 있었다. 다양한 알킬아민 중 1,12-diaminododecane에 대해 다양한 농도 및 도금액 조건에서 억제 효과를 관찰하였다. 1,12-diaminododecane은 산성 도금액상에서 protonation 되어, Cu2+의 착화제로써 작용하지 않았으며, 따라서 1,12-diaminododecane의 억제 효과는 Cu 표면상 흡착에 의한 것임을 확인할 수 있었다. 1,12-diaminododecane는 (i) protonation에 의한 양이온화와 그에 따른 Cu 표면상 기흡착한 음이온과의 정전기적 인력에 의한 흡착과 (ii) amine에 의한 Cu 표면상 직접 흡착의 두가지 특성을 모두 가지고 있었다. 흡착한 1,12-diaminododecane은 도금 반응을 억제할 뿐만 아니라, 구리도금막 형성시 3차원적 성장과 표면 미세화를 야기하였다.

In this study, the effect of alkylamine on copper electroplating was analyzed using cyclic voltammetry. When water-soluble alkylamines were added to the plating solution, the reduction reaction of Cu2+ was inhibited. The inhibition effect of 1,12-diaminododecane has been investigated at various concentrations and conditions of the plating solution. 1,12-diaminododecane was protonated in the acidic plating solution, and therefore, it did not act as a complexing agent for Cu2+. Accordingly, it was confirmed that the inhibiton effect of 1,12-diaminododecane was attributed to adsorption on the Cu surface. The adsorption of 1,12-diaminododecane exhibits two characteristics: (i) protonation and subsequent electrostatic attraction with anions pre-adsorbed on Cu surface, and (ii) direct adsorption on Cu surface via amine functional group. The adsorbed 1,12-diaminododecane caused three-dimensional growth and grain refining, as well as the inhibition effect, during Cu electroplating.

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과제정보

이 연구는 금오공과대학교 학술연구비로 지원되었음(202001050001).

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