Acknowledgement
- 본 연구는 중소벤처기업부의 기술개발사업[S3120455]과 한국연구재단 사회맞춤형 산학협력 선도대학(LINC+) 육성사업[2021BG020010107]의 지원에 의한 연구임. - 현재 개발중인 spot형 UV 노광기의 광학계 사양을 제공해주신 (주)지엠지에 감사드립니다.
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