반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

녹색발광 Zn2SiO4:Mn2+ 형광체가 코팅된 엑시머 램프의 제작 및 특성

Fabrication and Property of Excimer Lamp Coated with Green-emitting Zn2SiO4:Mn2+ Phosphor Film

  • 강부식 (부경대학교 전기공학부 디스플레이반도체공학전공) ;
  • 정현지 (부경대학교 전기공학부 디스플레이반도체공학전공) ;
  • 정용석 (부경대학교 전기공학부 디스플레이반도체공학전공) ;
  • 손세모 (부경대학교 전기공학부 디스플레이반도체공학전공) ;
  • 김종수 (부경대학교 전기공학부 디스플레이반도체공학전공)
  • Kang, Busic (Major of Display Semiconductor Engineering, Division of Electrical Engineering, Pukyung National University) ;
  • Jung, Hyunjee (Major of Display Semiconductor Engineering, Division of Electrical Engineering, Pukyung National University) ;
  • Jeong, Yongseok (Major of Display Semiconductor Engineering, Division of Electrical Engineering, Pukyung National University) ;
  • Son, Semo (Major of Display Semiconductor Engineering, Division of Electrical Engineering, Pukyung National University) ;
  • Kim, Jongsu (Major of Display Semiconductor Engineering, Division of Electrical Engineering, Pukyung National University)
  • 투고 : 2022.11.29
  • 심사 : 2022.12.14
  • 발행 : 2022.12.31
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초록

The green-emitting Zn2SiO4:Mn2+ phosphor film was evaluated in a xenon excimer lamp. The phosphor film with 2 ㎛ thick was formed of monolithic structure on the inner side of quartz through a long-time annealing process of coated ZnO solution doped with Mn2+ ion and SiO2 of quartz tube. The coated quartz was filled with 100 torr of xenon gas, and simultaneously both sides was melt and sealed. The xenon-field quartz tube was discharge by applying the voltage of 15 kV with a frequency of 26 kHz, and emitted the glow with dominant peak at 172 nm. The vacuum ultraviolet excited the inner-side coated Zn2SiO4:Mn2+ phosphor film, which emitted the pure and strong green light.

키워드

과제정보

이 논문은 2022년 부경대학교 국립대학육성사업 지원비에 의하여 연구되었음.

참고문헌

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