Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Analysis of Equipment Factor for Smart Manufacturing System

스마트제조시스템의 설비인자 분석

  • Ahn, Jae Joon (Division of Data Science, Yonsei University) ;
  • Sim, Hyun Sik (Department of Industrial & Management Engineering, Kyonggi University)
  • 안재준 (연세대학교 데이터사이언스학부) ;
  • 심현식 (경기대학교 산업경영공학전공)
  • Received : 2022.12.15
  • Accepted : 2022.12.21
  • Published : 2022.12.31
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Abstract

As the function of a product is advanced and the process is refined, the yield in the fine manufacturing process becomes an important variable that determines the cost and quality of the product. Since a fine manufacturing process generally produces a product through many steps, it is difficult to find which process or equipment has a defect, and thus it is practically difficult to ensure a high yield. This paper presents the system architecture of how to build a smart manufacturing system to analyze the big data of the manufacturing plant, and the equipment factor analysis methodology to increase the yield of products in the smart manufacturing system. In order to improve the yield of the product, it is necessary to analyze the defect factor that causes the low yield among the numerous factors of the equipment, and find and manage the equipment factor that affects the defect factor. This study analyzed the key factors of abnormal equipment that affect the yield of products in the manufacturing process using the data mining technique. Eventually, a methodology for finding key factors of abnormal equipment that directly affect the yield of products in smart manufacturing systems is presented. The methodology presented in this study was applied to the actual manufacturing plant to confirm the effect of key factors of important facilities on yield.

Keywords

Acknowledgement

본 논문은 정부의 재원으로 한국연구재단의 지원을 받아 수행되었음(No. 2022-0104).

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