Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A study on Quadrature error Reduction of Design Methodology in a Single Drive 3-Axis MEMS Gyroscope

단일 구동 3축 MEMS자이로스코프의 구적 오차 저감을 위한 설계 기법에 관한 연구

  • Park, Ji Won (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Din, Hussamud (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Lee, Byeung Leul (School of Mechatronics Engineering, Korea University of Technology and Education)
  • 박지원 (한국기술교육대학교 메카트로닉스공학과) ;
  • 딘 후사무드 (한국기술교육대학교 메카트로닉스공학과) ;
  • 이병렬 (한국기술교육대학교 메카트로닉스공학부)
  • Received : 2022.12.09
  • Accepted : 2022.12.21
  • Published : 2022.12.31
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Abstract

In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different mesh application, z-rate spring structure change, and mass compensation for balancing of the structure. We conducted the modal analysis, drive mode analysis and sense mode analysis using COMSOL Multiphysics. As a result, a drive resonant frequency was 26003 Hz, with the x-sense, y-sense, z-sense being 26749 Hz, 26858 Hz, 26920 Hz, respectively. And the Mechanical sensitivity was computed at 2000 degrees per second(dps) input angular rate while the sensitivity for roll, pitch, and yaw was computed 0.011, 0.012, and 0.011 nm/dps respectively. And z-axis quadrature error was successfully improved, 2.78 nm to 0.95 nm, which the improvement rate was about 66 %.

Keywords

Acknowledgement

이 논문은 2022년도 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 지원을 받아 수행된 연구임(P0008458, 2022년 산업혁신인재성장지원사업). 이 논문은 2022년도 한국기술교육대학교 교수 교육연구진흥과제 지원에 의하여 연구되었음.

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