Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of chemical vapor depositon capacity on the physical characteristics of carbon-coated SiOx

화학기상증착 코팅로의 용량에 따른 탄소 코팅 SiOx의 물리적 특성 변화 분석

  • Maeng, Seokju (Department of Chemistry and Chemical Engineering, Inha University) ;
  • Kwak, Woojin (Department of Chemistry and Chemical Engineering, Inha University) ;
  • Park, Heonsoo (Department of Chemistry and Chemical Engineering, Inha University) ;
  • Kim, Yong-Tae (Department of Chemistry and Chemical Engineering, Inha University) ;
  • Choi, Jinsub (Department of Chemistry and Chemical Engineering, Inha University)
  • 맹석주 (인하대학교 화학.화학공학 융합학과) ;
  • 곽우진 (인하대학교 화학.화학공학 융합학과) ;
  • 박헌수 (인하대학교 화학.화학공학 융합학과) ;
  • 김용태 (인하대학교 화학.화학공학 융합학과) ;
  • 최진섭 (인하대학교 화학.화학공학 융합학과)
  • Received : 2022.12.07
  • Accepted : 2022.11.26
  • Published : 2022.12.31
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Abstract

Silicon-based materials are one of the most promising anode active materials in lithium-ion battery. A carbon layer decorated on the surface of silicon particles efficiently suppresses the large volume expansion of silicon and improves electrical conductivity. Carbon coating through chemical vapor deposition (CVD) is one of the most effective strategies to synthesize carbon- coated silicon materials suitable for mass production. Herein, we synthesized carbon coated SiOx via pilot scale CVD reactor (P-SiOx@C) and carbon coated SiOx via industrial scale CVD reactor (I-SiOx@C) to identify physical characteristic changes according to the CVD capacity. Reduced size silicon domains and local non-uniform carbon coating layer were detected in I-SiOx@C due to non-uniform temperature distribution in the industrial scale CVD reactor with large capacity, resulting in increased surface area due to severe electrolyte consumption.

Keywords

Acknowledgement

본 연구는 산업통상자원부 기술혁신사업(제 20016056호, 대용량 실리콘계 CVD 카본코팅 제조기술 및 장비개발(2차년도))의 지원을 받아 수행됐다.

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