Electronics and Telecommunications Trends (전자통신동향분석)

Electronics and Telecommunications Research Institute (한국전자통신연구원)
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Trends in Industrial Measurement Technologies

산업용 계측 기술 동향

  • Published : 2021.08.01
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Abstract

Industrial measurement technologies are essential in the semiconductor and display fields, which are our flagship industries. These technologies are also critical to the future rechargeable battery industry and smart factories. Although existing industrial measurement technologies have been developed primarily for 2D measurement, the demand for 3D measurement technology is increasing gradually in the era of the Fourth Industrial Revolution. In this paper, to understand the trends in industrial measurement technologies, we introduce various industrial measurement fields and representative technologies.

Keywords

Acknowledgement

이 논문은 2021년도 정부(과학기술정보통신부)의 재원으로 정보통신기획평가원의 지원을 받아 수행된 연구임[No. 2020-0-00981, (세부2)홀로그램 기반의 위상 검출용 디지털 홀로그래피 메트롤로지 기술 개발].

References

  1. K. Schwab, "The fourth industrial revolution: What it means, how to respond," World Economic Forum, 2016.
  2. D. McMullan, "Scanning electron microscopy 1928-1965," Scanning, vol. 17, no. 3, 2006, pp. 175-185. https://doi.org/10.1002/sca.4950170309
  3. B. Fultz and J.M. Howe, "Transmission electron microscopy and diffractometry of materials," Springer, 2nd ed., 2001.
  4. S.M. Salapaka and M.V. Salapaka, "Scanning probe microscopy," IEEE Control Syst. Mag., vol. 28, no. 2, 2008, pp. 65-83. https://doi.org/10.1109/mcs.2007.914688
  5. G. Binnig et al., "Tunneling through a controllable vacuum gap," Appl. Phys. Lett., vol. 40, no. 2, 1982, pp. 178-180. https://doi.org/10.1063/1.92999
  6. G. Binnig, C.F. Quate, and Ch. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, 1986. https://doi.org/10.1103/PhysRevLett.56.930
  7. G. Zheng, R. Horstmeyer, and C. Yang, "Wide-field, highresolution Fourier ptychographic microscopy," Nat. Photonics, vol. 7, no. 9, 2013, pp. 739-745. https://doi.org/10.1038/nphoton.2013.187
  8. Y. Zhang et al., "Group-based sparse representation for Fourier ptychography microscopy," Opt. Commun., vol. 404, 2017, pp. 55-61. https://doi.org/10.1016/j.optcom.2017.05.036
  9. D. Gabor, "A new microscope principle," Nature, vol. 161, 1948, pp. 777-778. https://doi.org/10.1038/161777a0
  10. T. Bourgade et al., "Compact lens-less digital holographic microscope for MEMS inspection and characterization," J. Vis. Exp., vol. 113, 2016.