반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

그라디언트 변이 벡터 기반 패턴 측정에 관한 연구

A study on the Precision Pattern Measurement Based on Gradient Transition Vector

  • 김경범 (한국교통대학교 기계자동차항공공학부)
  • Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
  • 투고 : 2021.08.23
  • 심사 : 2021.09.16
  • 발행 : 2021.09.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

The adjustment of lens magnification can make the degree of precision in pattern measurement be improved, but several problems such as high cost, smaller field of view and stage error accumulation are followed. In this paper, a method for precisely measuring patterns is proposed based on gradient transition vector, in order to solve these problems. The performance of our method is evaluated using pattern images with several directions. Also, it is compared with previous methods based on edge and gray-level moment. It is judged that the proposed method outperforms consistent pattern width results, and so could be applied to automation processes for measurement and inspection of precise and complexed patterns in IT, BT industry products.

키워드

과제정보

이 논문은 2021년 한국교통대학교 지원을 받아 수행하였음.

참고문헌

  1. Zhu, F., Jin P., "Sub-pixel Measurement System for Grid's Width and Period Based on an Improved Partial Area Effect," Optics Communications, Vol. 404, pp.124-131, 2017. https://doi.org/10.1016/j.optcom.2017.04.004
  2. Yao, Y, Ju, H., "A Sub-pixel Edge Detection Method Based on Canny Operator," International Conference on Fuzzy Systems and Knowledge Discovery, pp. 97-100, 2009.
  3. Tabatabai, A. J., Mitchell, R., "Edge Location to Subpixel Values in Digital Imagery," IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 6, No. 2, pp. 188-201, 1984 https://doi.org/10.1109/TPAMI.1984.4767502
  4. Zhang, B, Bai, L., Zeng, X., "A Novel Subpixel Edge Detection Based on the Zernike Moment," Information Technology Journal, Vol. 1, pp. 41-47, 2020.
  5. Kaur, A., Singh, C., "Sub-Pixel Detection Using Pseudo Zernike Moment," International Journal of Signal Processing Image Processing and Pattern Recognition, Vol.4, No.2, pp.107-118, 2011.
  6. Fabija, A., "A Survey of Subpixel Edge Detection Methods for Images of Heat-Emitting Metal Specimens", International Journal of Applied Mathematics and Computer Science, Vol. 22, No. 3, pp. 695-710, 2012. https://doi.org/10.2478/v10006-012-0052-3
  7. Hagara, M., Kulla, P., ULLA, "Edge Detection with Sub-pixel Accuracy Based on Approximation of Edge with Erf Function," Radio Engineering, Vol.20, No.2, pp.516-524, June, 2011.
  8. Gonzalez, R. C., Woods, R. E., "Digital Image Processing Using MATLAB," Prentice-Hall, 2004.