Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Reactivity Evaluation on Copper Etching Using Organic Chelators

유기 킬레이터들을 이용한 구리 식각에 대한 반응성 평가

  • Received : 2021.08.05
  • Accepted : 2021.10.05
  • Published : 2021.10.27
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Abstract

The reactivity evaluation of copper is performed using ethylenediamine, aminoethanol, and piperidine to apply organic chelators to copper etching. It is revealed that piperidine, which is a ring-type chelator, has the lowest reactivity on copper and copper oxide and ethylenediamine, which is a chain-type chelator, has the highest reactivity via inductively coupled plasma-mass spectroscopy (ICP-MS). Furthermore, it is confirmed that the stable complex of copper-ethylenediamine can be formed during the reaction between copper and ethylenediamine using nuclear magnetic resonance (NMR) and radio-thin layer chromatography. As a final evaluation, the copper reactivity is evaluated by wet etching using each solution. Scanning electron micrographs reveal that the degree of copper reaction in ethylenediamine is stronger than that in any other chelator. This result is in good agreement with the evaluation results obtained by ICP-MS and NMR. It is concluded that ethylenediamine is a prospective etch gas for the dry etching of the copper.

Keywords

Acknowledgement

This research was supported by Basic Science Research Program through the NRF (National Research Foundation of Korea) funded by the Ministry of Education (2021R1F1A1047428). This work was also supported by the MOTIE (Ministry of Trade, Industry & Energy (10080450)) and KSRC (Korean Semiconductor Research Consortium) support program for the development of the future semiconductor device.

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