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Experimental and numerical investigation on in-flight synthesis of Ga-doped ZnO nano-powder by Radio-Frequency induction plasma

  • Jun-Seok Nam (Department of Quantum System Engineering, Chonbuk National University) ;
  • Sang-Min Jeong (Department of Quantum System Engineering, Chonbuk National University) ;
  • Min-Gyu Choi (Department of Quantum System Engineering, Chonbuk National University) ;
  • Jun-Ho Seo (Department of Quantum System Engineering, Chonbuk National University) ;
  • Shi-Young Yang (Graduate School of Flexible & Printable Electronics, Chonbuk National University)
  • Received : 2020.07.28
  • Accepted : 2020.11.11
  • Published : 20210000

Abstract

In this work, in-flight synthesis route of Ga doped ZnO (GZO) nano-powders was investigated experimentally and numerically, using Radio-Frequency (RF) induction plasmas. For experimental study, mixture of micron-sized ZnO and Ga2O3 powders were treated by RF induction plasmas, then, the as-treated powders were retrieved from reactor bottom and filtration for characterization. For numerical study, single particle model was combined with two-dimensional simulation code of RF induction plasma to predict the particle behaviors of ZnO and Ga2O3 depending on their sizes. First, experimental results showed that filtration-retrieved powders were characterized as GZO nano-powders although gallium content can be decreased due to Ga2O3 decomposition into sub-oxides at the elevated temperatures. From reactor bottom, however, spherical structures consisting of Ga2O3 and ZnO particles were observed in sub-millimeter sizes. Numerical results predicted that micron-sized (≤ 10 ㎛) ZnO and Ga2O3 particles can vaporize easily during the flight of plasma, while particles with the sizes of 25~100 um were simulated to be partially evaporated or unevaporated. Comparing these experimental and numerical results indicates that GZO nano-powders can be synthesized from vapor species of ZnO and Ga2O3, which are primarily produced by in-flight treatment of micron-sized ZnO and Ga2O3 powders in RF induction plasmas.

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Acknowledgement

This paper was supported by research funds of Chonbuk National University in 2019. This work was also partly supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government (MOTIE) (20191510301420). We, authors, give special thanks to the late Dr. Mi-Yeon Lee for her assistance in experimental data analysis and her devotion to the thermal plasma-material science.