References
- G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, and P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, 040502 (2015). https://doi.org/10.1103/physrevlett.115.040502
- A. Orieux and E. Diamanti, "Recent advances on integrated quantum communications," J. Optics 18, 083002 (2016). https://doi.org/10.1088/2040-8986/18/8/083002
- V. Scarani, H. Bechmann-Pasquinucci, N. J. Cerf, M. Dusek, N. Lutkenhaus, and M. Peev, "The security of practical quantum key distribution," Rev. Mod. Phys. 81, 1301 (2009). https://doi.org/10.1103/RevModPhys.81.1301
- S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, and P. Walther, "Demonstration of blind quantum computing," Science 335, 303-308 (2012). https://doi.org/10.1126/science.1214707
- J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, and J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185-188 (2012). https://doi.org/10.1038/nature11332
- J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, and J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140-1144 (2017). https://doi.org/10.1126/science.aan3211
- R.W. Falcone and J. Bokor, "Dichroic beam splitter for extreme-ultraviolet and visible radiation," Opt. Lett. 8, 21-23 (1983). https://doi.org/10.1364/OL.8.000021
- R. P. Abel, U. Krohn, P. Siddons, I. G. Hughes, and C. S. Adams, "Faraday dichroic beam splitter for Raman light using an isotopically pure alkali-metal-vapor cell," Opt. Lett. 34, 3071-3073 (2009). https://doi.org/10.1364/OL.34.003071
- Y. F. Chen and J. B. Xiao, "Compact silicon-based polarization beam splitter using directional couplers assisted with subwavelength gratings," Opt. Eng. 59, 017101 (2020).
- A. Ullah, H. Wilke, I. Memon, Y. Shen, D. T. Nguyen, C. Woidt, and H. Hillmer, "Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry-Perot filter array with 3D nanoimprinted cavities," J. Micromech. Microeng. 25, 055019 (2015). https://doi.org/10.1088/0960-1317/25/5/055019
- C. A. Davis, "A simple model for the formation of compressive stress in thin films by ion bombardment," Thin Solid Films 226, 30-34 (1993). https://doi.org/10.1016/0040-6090(93)90201-Y
- Y. T. Pu, Z. Qiao, G. Wang, F. Qiu, P. Ma, and S. Wang, "Stress reduction and structural properties of Ta2O5/SiO2 mixture films produced by ion-beam sputtering," Proc. SPIE 9683, 968323 (2016).
- S. Kicas, U. Gimzevskis, and S. Melnikas, "Post deposition annealing of IBS mixture coatings for compensation of film induced stress," Opt. Mater. Express 6, 2236-2243 (2016). https://doi.org/10.1364/OME.6.002236
- J. B. Oliver, P. Kupinski, A. L. Rigatti, A. W. Schmid, J. C. Lambropoulos, S. Papernov, A. Kozlov, C. Smith, and R. D. Hand, "Stress compensation in hafnia/silica optical coatings by inclusion of alumina layers," Opt. Express 20, 16596-16610 (2012). https://doi.org/10.1364/OE.20.016596
- J. B. Oliver, J. Spaulding, and B. Charles, "Stress compensation by deposition of a nonuniform corrective coating," Appl. Opt. 59, A54-A57 (2020).
- R. J. Zaldivar, H. I. Kim, and G. L. Ferrelli, "Effect of gamma radiation on the stability of UV replicated composite mirrors," Opt. Engineering 57, 047102 (2018).
- B. D. Chalifoux, Y. W. Yao, K. B. Woller, R. K. Heilmann, and M. L. Schattenburg, "Compensating film stress in thin silicon substrates using ion implantation," Opt. Express 27, 11182-11195 (2019). https://doi.org/10.1364/oe.27.011182
- Y. W. Yao, B. D. Chalifoux, R. K. Heilmann, and M. L. Schattenburg, "Thermal oxide patterning method for compensating coating stress in silicon substrates," Opt. Express 27, 1010-1024 (2019). https://doi.org/10.1364/OE.27.001010
- S. Melnikas, U. Gimzevskis, and S. Kicas, "Stress compensated back side chirped mirror with high negative dispersion," Opt. Laser Technol. 121, 1052820 (2020).
- T. Amotchkina, M. K. Trubetskov, Y. Pervak, L. Veisz, and V. Pervak, "Stress compensation with antireflection coatings for ultrafast laser applications: from theory to practice," Opt. Express 22, 30387-30393 (2014). https://doi.org/10.1364/OE.22.030387
- R. Kaewon, C. Pawong, R. Chitaree, and A. Bhatran, "Polarization phase-shifting technique for the determination of a transparent thin film's thickness using a modified sagnac interferometer," Curr. Opt. Photon. 2, 474-481 (2018). https://doi.org/10.3807/COPP.2018.2.5.474
- M. Ohring, Materials Science of Thin Films: Deposition and Structure, 2nd ed. (Academic Press, MA, USA. 2002).
- G. G. Stoney, "The tension of metallic films deposited by electrolysis," Proc. R. Soc. Lond. A 82, 172-175 (1909). https://doi.org/10.1098/rspa.1909.0021
- E. Chason, J. W. Shin, S. J. Hearne, and L. B. Freund, "Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure," J. Appl. Phys. 111, 083520 (2012). https://doi.org/10.1063/1.4704683