A study of fabrication of LIPSS using flat-top beam with various materials

다양한 재질에서의 flat-top 빔을 이용한 LIPSS 형성에 관한 연구

  • Choi, Jun-Ha (Department of Nano-Mechatronics, Korea University of Science and Technology) ;
  • Choi, Won-Suk (Department of Nano-manufacturing Technology, Korea Institute of Machinery and Material) ;
  • Shin, Young-Gwan (Department of Nano-Mechatronics, Korea University of Science and Technology) ;
  • Cho, Sung-Hak (Department of Nano-Mechatronics, Korea University of Science and Technology) ;
  • Choi, Doo-Sun (Department of Nano-manufacturing Technology, Korea Institute of Machinery and Material)
  • 최준하 (과학기술연합대학원대학교 나노메카트로닉스학과) ;
  • 최원석 (한국기계연구원 나노공정연구실) ;
  • 신영관 (과학기술연합대학원대학교 나노메카트로닉스학과) ;
  • 조성학 (과학기술연합대학원대학교 나노메카트로닉스학과) ;
  • 최두선 (한국기계연구원 나노공정연구실)
  • Received : 2021.09.10
  • Accepted : 2021.09.30
  • Published : 2021.09.30


In this study, laser-induced periodic surface structure (LIPSS) was fabricated on Ni, Si, and GaAs samples using a flat-top beam with a uniform energy distribution that was fabricated using a Gaussian femtosecond laser with a mechanical slit and tube lens. Unlike the Gaussian beam, the flat-top beam has a uniform beam profile, therefore the center and the periphery of the fabricated LIPSS have similar line periodicity. In addition, LIPSS was obtained not only in metals but also in metalloids and metals and metalloid compounds by using the narrow pulse width characteristic of a femtosecond laser.



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