DOI QR코드

DOI QR Code

A Study on Machine Failure Improvement Using F-RPN(Failure-RPN): Focusing on the Semiconductor Etching Process

F-RPN(Failure-RPN)을 이용한 장비 고장률 개선 연구: 반도체 식각 공정을 중심으로

  • Lee, Hyung-Geun (Department of Industrial Engineering, INHA University) ;
  • Hong, Yong-Min (Department of Industrial Engineering, INHA University) ;
  • Kang, Sung-Woo (Department of Industrial Engineering, INHA University)
  • 이형근 (인하대학교 산업경영공학과) ;
  • 홍용민 (인하대학교 산업경영공학과) ;
  • 강성우 (인하대학교 산업경영공학과)
  • Received : 2021.08.25
  • Accepted : 2021.09.17
  • Published : 2021.09.30

Abstract

The purpose of this study is to present a novel indicator for analyzing machine failure based on its idle time and productivity. Existing machine repair plan was limited to machine experts from its manufacturing industries. This study evaluates the repair status of machines and extracts machines that need improvement. In this study, F-RPN was calculated using the etching process data provided by the 2018 PHM Data Challenge. Each S(S: Severity), O(O: Occurence), D(D: Detection) is divided into the idle time of the machine, the number of fault data, and the failure rate, respectively. The repair status of machine is quantified through the F-RPN calculated by multiplying S, O, and D. This study conducts a case study of machine in a semiconductor etching process. The process capability index has the disadvantage of not being able to divide the values outside the range. The performance of this index declines when the manufacturing process is under control, hereby introducing F-RPN to evaluate machine status that are difficult to distinguish by process capability index.

Keywords

Acknowledgement

이 논문은 2021년도 정부(과학기술정보통신부)의 재원으로 한국연구재단-현장맞춤형 이공계 인재양성 지원사업의 지원을 받아 수행된 연구임(No. 64420-27)

References

  1. C. S. Park, C. W. Hur(2009), "The wet and dry etching process of thin film transistor." Journal of the Korea Institute of Information and Communication Engineering, 13(7):1393-1398. https://doi.org/10.6109/JKIICE.2009.13.7.1393
  2. G. C. Jeong, S. G. Roh(2013), "Characteristic experiment of SD plasma actuator for reducing air resistance of highspeed trains." The Korean Society For Railway, 1086-1091.
  3. PHM Society(2018), https://phmsociety.org/conference/annual-conference-of-the-phm-society/annual-conference-of-the-prognostics-and-health-management-society-2018-b/phm-data-challenge-6/
  4. I. J. Jeong(2017), "An interactive process capability-based approach to multi-response surface optimization." J Korean Soc Qual Manag., 45(2):191-208. https://doi.org/10.7469/JKSQM.2017.45.2.191
  5. N. Abbes(2018), "Application of six sigma in clothing SMEs: A case study." IOP Conference Series: Materials Science and Engineering, Volume 460, 18th World Textile Conference(AUTEX 2018) 20-22 June 2018, Istanbul, Turkey.
  6. L. Ouyang, W. Zheng, Y. Zhu, X. Zhou(2019), "An interval probability-based FMEA model for risk assessment." The International Journal of Advanced Manufacturing Technology, 112:1409-1436.
  7. I. H. Yoo, W. K. Kang(2019), "CRPN (Customer-oriented Risk Priority Number): RPN evaluation method based on customer opinion through SNS opinion mining." J Korean Soc Qual Manag., 47(1):97-108. https://doi.org/10.7469/JKSQM.2019.47.1.97
  8. S. Y. Kim, W. Y. Yun(2007), "Reestablishment of RPN evaluation method in FMEA procedure for motors in household appliances." J Korean Soc Qual Manag., 35(1):1-9.
  9. S. K. Seo(2013), "Lifetime performance index for Weibull distribution: Estimation and applications." Journal of Applied Reliability, 13(3):191-206.