Applied Microscopy

  • 제51권
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  • Pages.8.1-8.7
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  • 2021
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  • 2287-5123(pISSN)
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  • 2287-4445(eISSN)
한국현미경학회 (Korean Society of Microscopy)
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TEM sample preparation using micro-manipulator for in-situ MEMS experiment

  • Hyunjong Lee (Korea Institute of Industrial Technology) ;
  • Odongo Francis Ngome Okello (Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Gi-Yeop Kim (Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Kyung Song (Division of Materials Testing and Reliability, Korea Institute of Materials Science) ;
  • Si-Young Choi (Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH))
  • 투고 : 2021.04.02
  • 심사 : 2021.05.20
  • 발행 : 2021.12.31
⟨ 이전 논문 다음 논문 ⟩

초록

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

키워드

과제정보

This work was supported by Korea Basic Science Institute (National research Facilities and Equipment Center) grant funded by the Ministry of Education. (2020R1A6C1020259) and by POSTECH-Samsung Electronics Industry-Academia Cooperative Research Center.

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