Acknowledgement
이 논문은 2021년도 정부(교육부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임(2018R1D1A1B07051003).
References
- D. Kim, Improved electrical and optical properties of GZO films with a thin TiO2 buffer layer deposited by RF magnetron sputtering, Ceram. Inter., 40 (2014) 1457-1460. https://doi.org/10.1016/j.ceramint.2013.07.029
- D. Kim, Low temperature deposition of ITO on organic films by using negative ion assisted dual magnetron sputtering system, vacuum., 81 (2006) 279-282. https://doi.org/10.1016/j.vacuum.2006.04.003
- T. K. Gong, S. B. Heo, D. Kim, Effect of postdeposition annealing on the structural, optical and electrical properties of ZTO/Ag/ZTO trilayered films, Ceram. Inter., 42 (2016) 12341-12344. https://doi.org/10.1016/j.ceramint.2016.05.006
- M. B. Ali, A. Addad, S. M. Alshahrani, H. A. S. Al-Shamiri, B. Elgammal, H. Elhouichet, Processing and physical properties of nanomaterials based Zn-Sn-O elements at various annealing temperatures, Optik., 203 (2020) 164005. https://doi.org/10.1016/j.ijleo.2019.164005
- Y. S. Kim, J. H. Park, D. Kim, Influence of Au underlayer thickness on the electro-optical properties of ITO/Au layered films deposited by magnetron sputtering on unheated polycarbonate substrates, Vacuum., 82 (2008) 574-578. https://doi.org/10.1016/j.vacuum.2007.08.011
- J. H. Park, J. H. Chae, D. Kim, Influence of nickel thickness on the properties of ITO/Ni/ITO thin films, J. alloys compd., 478 (2009) 330-333. https://doi.org/10.1016/j.jallcom.2008.11.065
- S. Y. Lee, Y. S. Park, T. Y. Seong, Optimized ITO/Ag/ITO multilayers as a current spreading layer to enhance the light output of ultraviolet light-emitting diodes, J. alloys compd., 776 (2019) 960-964. https://doi.org/10.1016/j.jallcom.2018.10.368
- G. Haacke, New figure of merit for transparent conductors, J. Appl. Phys., 47 (1976) 4086-4089. https://doi.org/10.1063/1.323240
- Y. J. Park, S. H. Choe, Y. S. Kim, B. C. Cha, Y. M. Gong, D. Kim, Influence of Au Interlayer Thickness on the Opto-Electrical Properties of ZnO Thin Films, . Korean Inst. Surf. Eng., 53 (2020) 104-108.
- Y. J. Lee, D. S. Rub y, D. W. Peters, B. B. McKenzie, J. W. P. Hsu, ZnO Nanostructures as Efficient Antireflection Layers in Solar Cells, Nano Letters., 8 (2008) 1501-1505. https://doi.org/10.1021/nl080659j
- S. Peng, T. Yao, Y. Yang, K. Zhang, J. Jiang, K. Jin, G. Li, X. Cao, G. Xu, Y. Wang, Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC copled RF magnetron sputtering at room temperature, Physica B., 503 (2016) 111-116. https://doi.org/10.1016/j.physb.2016.09.027
- J. Tauc, Amorphous and liquid semiconductor, Plenum, New York (1974).
- Y. H. Song, T. Y. Eom, S. B. Heo, D. Kim, Effect of Post-deposition Rapid Thermal Annealing on the Electrical and Optical Properties of ZTO/Ag/ZTO Tri-layer Thin Films, J. Korean. Soc. Heat Treat. 30 (2017) 151-154. https://doi.org/10.12656/JKSHT.2017.30.4.151