한국가스학회지 (Journal of the Korean Institute of Gas)

  • 제25권2호
  • /
  • Pages.42-51
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  • 2021
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  • 1226-8402(pISSN)
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  • 2713-6922(eISSN)
한국가스학회 (The Korean Institute of GAS)
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반도체용 특수가스 공급장치 내부에서의 가스누출 원인에 따른 유동해석에 관한 연구

A Study on Flow Analysis according to the Cause of Gas Leakage in the Specialty Gas Supply Device for Semiconductors

  • 김정덕 (한국교통대학교 안전공학과) ;
  • 권기선 (SK하이닉(주) 이천Gas설비기술팀) ;
  • 임종국 (한국교통대학교 안전공학과) ;
  • 양원백 (숭실사이버대학교 안전공학과)
  • Kim, Jung-Duck (Dept. of Safety Engineering, Korea National University of Trans.) ;
  • Kwon, Ki-sun (Icheon GAS Facility Engineering Team, SK Hynix) ;
  • Rhim, Jong-Guk (Dept. of Safety Engineering, Korea National University of Trans.) ;
  • Yang, Won-Baek (Dept. of Industrial Safety Engineering, Soongsil Cyber Univ.)
  • 투고 : 2021.01.14
  • 심사 : 2021.04.23
  • 발행 : 2021.04.30
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초록

반도체 제조에 사용하는 특수가스를 공급하는 설비는 인화성·독성·부식성을 지닌 유해·위험물질을 주로 취급하는데, 이러한 공급설비로는 주로 가스캐비닛이 사용되고 있다. 가스캐비닛 내 파열판을 통한 누출, 누출 개구부의 확대가 가능한 누출, 누출 개구부가 확대되지 않는 누출의 케이스별로 공급장치 내부 상태 및 외부로의 확산 영향을 누출 원인별로 분석하였다. 이 경우 누출 단면적에 따라 공급장치 외부로 가스가 누출되는 경우가 발생함을 확인하였다. 외부로 누출되는 가스의 농도에 따라 폭발분위기 형성 등 위험성이 존재하는 요인으로 작용하며, 위험에 따라 공급설비의 안전운전절차 등 제반 조치사항을 다시 검토할 필요가 있음을 확인하였다.

Facilities that supply specialty gases used in semiconductor manufacturing mainly handles with hazardous and dangerous substances with flammable, toxic, and corrosive properties, and gas cabinets are mainly used as such supply facilities. The effects of the supply facilities were analyzed for each leak through the rupture disk in the gas cabinet and a leak where the leak hole. In this case, gas leaked to the outside depending on the leak area. It is a factor that creates a risk depending on the concentration of the leaked gas. Depending on the risk of leakage, all measures such as safe operation procedures should be reviewed again.

키워드

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