Journal of the Korean Institute of Gas (한국가스학회지)

The Korean Institute of GAS (한국가스학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on Flow Analysis according to the Cause of Gas Leakage in the Specialty Gas Supply Device for Semiconductors

반도체용 특수가스 공급장치 내부에서의 가스누출 원인에 따른 유동해석에 관한 연구

  • Kim, Jung-Duck (Dept. of Safety Engineering, Korea National University of Trans.) ;
  • Kwon, Ki-sun (Icheon GAS Facility Engineering Team, SK Hynix) ;
  • Rhim, Jong-Guk (Dept. of Safety Engineering, Korea National University of Trans.) ;
  • Yang, Won-Baek (Dept. of Industrial Safety Engineering, Soongsil Cyber Univ.)
  • 김정덕 (한국교통대학교 안전공학과) ;
  • 권기선 (SK하이닉(주) 이천Gas설비기술팀) ;
  • 임종국 (한국교통대학교 안전공학과) ;
  • 양원백 (숭실사이버대학교 안전공학과)
  • Received : 2021.01.14
  • Accepted : 2021.04.23
  • Published : 2021.04.30
Download PDF
⟨ Previous Next ⟩

Abstract

Facilities that supply specialty gases used in semiconductor manufacturing mainly handles with hazardous and dangerous substances with flammable, toxic, and corrosive properties, and gas cabinets are mainly used as such supply facilities. The effects of the supply facilities were analyzed for each leak through the rupture disk in the gas cabinet and a leak where the leak hole. In this case, gas leaked to the outside depending on the leak area. It is a factor that creates a risk depending on the concentration of the leaked gas. Depending on the risk of leakage, all measures such as safe operation procedures should be reviewed again.

반도체 제조에 사용하는 특수가스를 공급하는 설비는 인화성·독성·부식성을 지닌 유해·위험물질을 주로 취급하는데, 이러한 공급설비로는 주로 가스캐비닛이 사용되고 있다. 가스캐비닛 내 파열판을 통한 누출, 누출 개구부의 확대가 가능한 누출, 누출 개구부가 확대되지 않는 누출의 케이스별로 공급장치 내부 상태 및 외부로의 확산 영향을 누출 원인별로 분석하였다. 이 경우 누출 단면적에 따라 공급장치 외부로 가스가 누출되는 경우가 발생함을 확인하였다. 외부로 누출되는 가스의 농도에 따라 폭발분위기 형성 등 위험성이 존재하는 요인으로 작용하며, 위험에 따라 공급설비의 안전운전절차 등 제반 조치사항을 다시 검토할 필요가 있음을 확인하였다.

Keywords

References

  1. Kim, J.D., "A study on the Internal Flow Analysis of Gas Cylinder Cabinet for Specialty Gas of Semiconductor", KIGAS Vol. 24, No. 5, pp 74~81, 2020
  2. Yang, W.B., "A Study on Physical Hazard Assessment of Hazardous Materials used in Semiconductor Difusion Process", Korea National University of Transportation, pp 20-49, (2017).
  3. Kim, I.W., "Health Care Guide for Semiconductor Industry Workers", Korea Occupational Safety and Health Agency, (2012)
  4. Choi, Y.S., "Confirmation of trade secret components and accuracy evaluation of the status of chemical substances in semiconductor business sites and material safety data sheets for photo processing", Seoul National Univ., pp 23~31, (2016)
  5. Semiconductor manufacturing equipment safety guidelines, Korea Occupational Safety and Health Agency, (2004)
  6. Lim, S.B., "A study on an efficient work process in semiconductor equipment manufacturing industry", Aju Univ., pp 50~51, (2017)
  7. Lee, K.W., "Reactivity Considerations with Miscibility of Process Gases in Semiconductor industry", KIGAS Vol. 20, No. 4, pp 15-24, (2016)
  8. KOSHA Guide P-149-2016, Technical guidelines for storage of gas cylinders in storage cabinets, Korea Occupational Safety and Health Agency, (2016)
  9. KOSHA Guide P-12-2012, Special gas handling safety technical guidelines in the electronics industry, Korea Occupational Safety and Health Agency, (2012)
  10. KGS Code AA913, Facility, technology, and inspection standards for manufacturing cylinder cabinets for high pressure gas, Korea Gas Safety Corporation, (2017)
  11. SEMI S4-0304, Safety Guideline for the seperation of chemical cylinders contained in dispensing cabinets, (2004)
  12. SEMI S4-92, Safety Guideline for the segregation/seperation of gas cylinders contained in cabinets, (1992)
  13. KS IEC 60079-10-1:2015, Explosive atmospheres-Part 10-1:Classification of areas-Explosive gas atmospheres (2017)
  14. Jang, Y.R., Jung, S.H., Park, K.S., "Consequence Analysis for Accidental Gas Release in Labs", KIGAS Vol. 19, No. 4, pp 29~34, (2015)
  15. Lee, M.W., Lee, C.K., "Special gas supply facilities and exhaust gas treatment facilities in semiconductor factories", Samwoo Eng., Refrigeration and air conditioning technology, pp 109-117, (1997)
  16. ANSYS FLUENT Theory Guide 17. ANSYS Inc., (2019)
  17. Jung, J.K., Yoon, J.K., Lim, J.H., "Numerical Analysis on Shock Waves Influence Generated by Supersonic Jet Flow According to Working Fluids", Journal of the Korea Academia-Industrial cooperation Society Vol. 17, No. 7 pp. 510-517, (2016) https://doi.org/10.5762/KAIS.2016.17.7.510
  18. Lee, J.E., "Analysis of the Actual condition on the Safety Management for Treatment and Transport of Special High Pressure Gas", Choong-Ju Univ., pp 8-20, (2009)