The Journal of the Korea institute of electronic communication sciences (한국전자통신학회논문지)

Korea Institute of Electronic Communication Science (한국전자통신학회)
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Characteristics of ITZO Thin Films According to Substrate Types for Thin Film Solar Cells

박막형 태양전지 응용을 위한 ITZO 박막의 기판 종류에 따른 특성 분석

  • 정양희 (전남대학교 전기 및 반도체공학과) ;
  • 강성준 (전남대학교 전기 및 반도체공학과)
  • Received : 2021.10.13
  • Accepted : 2021.12.17
  • Published : 2021.12.31
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Abstract

In this study, ITZO thin films were deposited on glass, sapphire, and PEN substrates by RF magnetron sputtering, and their electrical and optical properties were investigated. The resistivity of the ITZO thin film deposited on the glass and sapphire substrates was 3.08×10-4 and 3.21×10-4 Ω-cm, respectively, showing no significant difference, whereas the resistivity of the ITZO thin film deposited on the PEN substrate was 7.36×10-4 Ω-cm, which was a rather large value. Regardless of the type of substrate, there was no significant difference in the average transmittance of the ITZO thin film. Figure of Merits of the ITZO thin film deposited on the glass substrate obtained using the average transmittance in the absorption region of the amorphous silicon thin film solar cell and the absorption region of the P3HT : PCBM organic active layer were 10.52 and 9.28×10-3 Ω-1, respectively, which showed the best values. Through XRD and AFM measurements, it was confirmed that all ITZO thin films exhibited an amorphous structure and had no defects such as pinholes or cracks, regardless of the substrate type.

본 연구에서는 고주파 마그네트론 스퍼터링 법으로 유리, 사파이어, PEN 기판 위에 ITZO 박막을 증착하여 전기적 및 광학적 특성을 조사하였다. 유리와 사파이어 기판위에 증착한 ITZO 박막의 비저항은 각각 3.08×10-4 과 3.21×10-4 Ω-cm로 큰 차이를 보이지 않은 반면 PEN 기판위에 증착한 ITZO 박막의 비저항은 7.36×10-4 Ω-cm로 다소 큰 값이 측정되었다. 기판의 종류와 무관하게 ITZO 박막의 평균 투과도의 차이는 크지 않았다. 유리 기판위에 증착한 ITZO 박막의 비정질 실리콘 박막 태양전지의 흡수영역에서의 평균 투과도와 P3HT : PCBM 유기물 활성층의 흡수영역에서의 평균 투과도를 이용하여 구한 재료평가지수는 각각 10.52와 9.28×10-3 Ω-1로 가장 우수한 값을 나타내었다. XRD와 AFM 측정을 통해, 기판의 종류에 상관없이 모든 ITZO 박막이 비정질 구조를 나타내며 핀홀이나 크랙 같은 결함이 없는 표면을 가짐을 확인할 수 있었다.

Keywords

Acknowledgement

본 과제(결과물)는 2021년도 교육부의 재원으로 한국연구재단의 지원을 받아 수행된 지자체-대학 협력기반 지역혁신 사업의 결과입니다.

References

  1. O. Mahian, E. Bellos, C. Markides, R. Taylor, A. Alagumalai, L. Yang, C. Qin, B. Lee, G. Ahmadi, M. Safaei, and S. Wongwises, "Recent Advances in Using Nanofluids in Renewable Energy Systems and The Environmental Implications of Their Uptake," Nano Energy, vol. 86, Aug. 2021, pp. 106069. https://doi.org/10.1016/j.nanoen.2021.106069
  2. R. Klaimi, S. Alnouri, M. Hindi, and F. Azizi, "Optimization Techniques for Coupling Renewable/Hybrid Energy Options with Desalination Systems for Carbon Footprint Reduction," Chem. Eng. Res. Des., vol. 151, Nov. 2019, pp. 270-290. https://doi.org/10.1016/j.cherd.2019.09.010
  3. F. Schindler, A. Fell, R. Muller, J. Benick, A. Richter, F. Feldmann, P. Krenckel, S. Riepe, M. Schubert, and S. Glunz, "Towards the Efficiency Limits of Multicrystalline Silicon Solar Cells," Sol. Energy Mater. Sol. Cells, vol. 185, Oct. 2018, pp. 198-204. https://doi.org/10.1016/j.solmat.2018.05.006
  4. C. Wronski, B. Roedern, and A. Kolodziej, "Thin-Film Si:H-based Solar Cells," Vacuum, vol. 82, issue 10, June 2008, pp. 1145-1150. https://doi.org/10.1016/j.vacuum.2008.01.043
  5. N. Yan, C. Zhao, S. You, Y. Zhang, and W. Li, "Recent Progress of Thin-Film Photovoltaics for Indoor Application," Chin. Chem. Lett., vol. 31, issue 3, Mar. 2020, pp. 643-653. https://doi.org/10.1016/j.cclet.2019.08.022
  6. P. Mahendia, G. Chauhan, H. Wadhwa, G. Kandhol, S. Mahendia, R. Srivastava, O. Sinha, T. Clemons, and S. Kumar, "Study of Induced Structural, Optical and Electrochemical Properties of Poly (3-hexylthiophene) (P3HT), [6,6]-phenyl-C61-butyric-acid-methyl-ester (PCBM) and Their Blend As an Effect of Graphene Doping," J. Phys. Chem. Solids, vol. 148, Jan. 2021, pp. 109644. https://doi.org/10.1016/j.jpcs.2020.109644
  7. K. Choi, J. Jeong, and H. Kim, "Dependence of Electrical, Optical, and Structural Properties on the Thickness of IZTO Thin Films Grown by Linear Facing Target Sputtering for Organic Solar Cell," Sol. Energy Mater. Sol. Cells, vol. 94, June 2010, pp. 1822-1830. https://doi.org/10.1016/j.solmat.2010.05.056
  8. J. Kim, K. Jeon, G. Kim, and S. Lee, "Electrical, Structural, and Optical Properties of ITO Thin Films Prepared at Room Temperature by Pulsed Laser Deposition," Appl. Surf. Sci., vol. 252, issue 13, Apr. 2006, pp. 4834-4837. https://doi.org/10.1016/j.apsusc.2005.07.134
  9. B. Choi, Y. Joung, and S. Kang, "Influence of the RF Power on the Optical and Electrical Properties of ITZO Thin Films Deposited on SiO2/PES Substrate," J. of the Korea Institute of Electronic Communication Sciences, vol. 16, no. 3, June 2021, pp. 443-450. https://doi.org/10.13067/JKIECS.2021.16.3.443
  10. J. Park and Y. Yoon, "Synthetic Analysis on the IZTO Thin Films on Various Plastic Substrates with the Buffer Layer," J. Mater. Sci : Mater. Electron, vol. 28, July 2017, pp. 16155-16164. https://doi.org/10.1007/s10854-017-7516-z
  11. J. Joung, H. Kim, and S. Na, "Low Resistance and High Transparent Amorphous ITZO Electrode Cosputtered by Liner Facing Target Sputtering for Organic Photovoltaics," Electrochem. Solid-State Lett., vol. 12, June 2009, pp. J80-J82.
  12. J. Park, S. Kang, and Y. Yoon, "Properties of IZTO Thin films Deposited on PEN Substrates with Different Working Pressures," J. Korean Ceram. Soc., vol. 52, no. 3. May 2015, pp. 224-227. https://doi.org/10.4191/kcers.2015.52.3.224
  13. B. Houng, S. Lin, S. Chen, and A. Wang, "Influence of An In2O3 Buffer Layer on the Properties of ITO Thin Films," Ceram. Int., vol. 37, issue 8, Dec. 2011, pp. 3397-3403. https://doi.org/10.1016/j.ceramint.2011.05.142
  14. Y. Joung, B. Choi, and S. Kang, "Effect of Working Pressure on the Electrical and Optical Properties of ITZO Thin Films Deposited on PES Substrate with SiO2 Buffer Layer," J. of the Korea Institute of Electronic Communication Sciences, vol. 14, no. 5, Oct. 2019, pp. 887-892.
  15. G. Haacke, "New Figure of Merit for Transparent Conductors," J. Appl. Phys., vol. 47, issue 9, Aug. 1976, pp. 4086-4089. https://doi.org/10.1063/1.323240
  16. H. Park, J. Jeong, Y. Park. H. Kim, and W. Cho, "Electrical, Optical, and Structural Properties of InZnSnO Electrode Films Grown by Unbalanced Radio Frequency Magnetron Sputtering," Thin Solid Films, vol. 517, Mar. 2009, pp. 5563-5568. https://doi.org/10.1016/j.tsf.2009.02.138