한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제54권6호
  • /
  • Pages.307-314
  • /
  • 2021
  • /
  • 1225-8024(pISSN)
  • /
  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
DOI QR코드

DOI QR Code

Improved Adhesion of DLC Films by using a Nitriding Layer on AISI H13 Substrate

  • 투고 : 2021.12.16
  • 심사 : 2021.12.24
  • 발행 : 2021.12.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.

키워드

참고문헌

  1. Kwang-Ryeol Lee, Kwang Yong Eun, Inyoung Kim, Jongryoul Kim, Design of W buffer layer for adhesion improvement of DLC films on tool steels, Thin Solid films, 377-378 (2000) 261-268. https://doi.org/10.1016/S0040-6090(00)01429-2
  2. Junho Choi, Koji Soejima, Takahisa Kato, Masahiro Kawaguchi, Wonsik Lee, Nitriding of high speed steel by bipolar PBII for improvement in adhesion strength of DLC films, Nuclear Instruments and Methods in Physics Research, B 272 (2012) 357-360.
  3. Takanori Takeno, Toshifumi Sugawara, Hiroyuki Miki, Toshiyuki Takagi, Deposition of DLC film with adhesive W-DLC layer on stainless steel and its tribological properties, Diamond and Related materials, 18 (2009) 1023-1027. https://doi.org/10.1016/j.diamond.2009.01.029
  4. Bojan Podgornik, Joze Vizintin, Influence of substrate treatment on the tribological properties of DLC coatings, Diamond and Related Materials 10 (2001) 2232-2237. https://doi.org/10.1016/S0925-9635(01)00514-3
  5. Jiaren Jiang, R. D. Arnell, Jin Tong, The effect of substrate properties on tribological behaviour of composite DLC coatings, Tribology International, Vol 30 (1997) 613-625. https://doi.org/10.1016/S0301-679X(97)00035-2
  6. E. Menthe, K.-T. Rie, J. W. Schultze, S. Simson, Structure and properties of plasma-nitrided stainless steel, Surf. Coat. Technol., 74-75 (1995) 412-416. https://doi.org/10.1016/0257-8972(95)08246-8
  7. E.I. Meletis, A. Erdemir, G. R. Fenske, Tribological characteristics of DLC films and duplex plasma nitriding/DLC coating treatments, Surf. Coat. Technol., 73 (1995) 39-45. https://doi.org/10.1016/0257-8972(94)02375-1
  8. B. Larisch, U. Brusky, H.-J. Spies, Plasma nitriding of stainless steels at low temperatures, Surf. Coat. Technol., 116-119 (1999) 205-211. https://doi.org/10.1016/S0257-8972(99)00084-5
  9. A. Ricard, J. Deschamps, J. L. Godard, L. Falk, H. Michel, Nitrogen atoms in Ar-N2 flowing microwave discharges for steel surface nitriding, Mater. Sci. Eng., A 139 (1991) 9-14.
  10. G. Castro, A. Fernandez-Vicente, J. Cid, Influence of the nitriding time in the wear behaviour of an AISI H13 steel during a crankshaft forging process, Wear, 263 (2007) 1375-1385. https://doi.org/10.1016/j.wear.2007.02.007
  11. S. Miyagawa, S. Nakao, J. Choi, M. Ikeyama, Y. Miyagawa, Effects of target bias voltage on the electrical conductivity of DLC films deposited by PBII/D with a bipolar pulse, Nuclear Instruments and Methods in Physics Research, B 242 (2006) 346-348.
  12. Wang Ryeol Kim, Uoo Chang Jung, Hyung Ho Jo, Min Suk Park, Won Sub Chung, Effect of Anode Voltage on Diamond-like Carbon Thin Film Using Linear Ion Source, J. Kor. Inst. Surf. Eng., Vol 42 (2009) 179-185. https://doi.org/10.5695/JKISE.2009.42.4.179
  13. Ritwik Kumar Roy, Sk. Faruque Ahmed, Jin Woo Yi, Myoung-Woon Moon, Kwang-Ryeol Lee, Youngha Jun, Improvement of adhesion of DLC coating on nitinol substrate by hybrid ion beam deposition technique, Vacuum, 83 (2009) 1179-1183. https://doi.org/10.1016/j.vacuum.2009.03.005
  14. Heon Woong Choi, Jung-Hae Choi, Kwang-Ryeol Lee, Jae-Pyoung Ahn, Kyu Hwan Oh, Structure and mechanical properties of Ag-incorporated DLC films prepared by a hybrid ion beam deposition system, Thin Solid Films, 516 (2007) 248-251. https://doi.org/10.1016/j.tsf.2007.06.154
  15. Takayuki Utsumi, Yoshihiro Oka, Etsuo Fujiwara, Mitsuyasu Yatsuzuka, Effect of a hard supra-thick interlayer on adhesion of DLC film prepared with PBIID process, Nuclear Instruments and Methods in Physics Research, B 257 (2007) 706-709.
  16. Junho Choi, Koji Soejima, Takahisa Kato, Masahiro Kawaguchi, Wonsik Lee, Nitriding of high speed steel by bipolar PBII for improvement in adhesion strength of DLC films, Nuclear Instruments and Methods in Physics Research, B 272 (2012) 357-360.