Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Electrocaloric Effect in Heterolayered K(Ta,Nb)O3/Pb(Zr,Ti)O3 Thin Films Fabricated by Spin-Coating Method

스핀-코팅법으로 제작한 K(Ta,Nb)O3/Pb(Zr,Ti)O3 이종층 박막의 전기 열량 효과

  • Yang, Young-Min (Department of Railroad Engineering, Woosong University) ;
  • Yuk, Ji-Soo (Bioden Co.) ;
  • Kim, Ji-Won (Department of Materials Engineering and Covergence Technology, Engineering Research Institute, Gyeongsang National University) ;
  • Yi, Sam-Haeng (Department of Materials Engineering and Covergence Technology, Engineering Research Institute, Gyeongsang National University) ;
  • Park, Joo-Seok (Business Cooperation Center, Business Support Division, Korea Ceramic Engineering and Technology (KICET)) ;
  • Kim, Young-Gon (Department of Electronics, Chosun College of Science and Technology) ;
  • Lee, Sung-Gap (Department of Materials Engineering and Covergence Technology, Engineering Research Institute, Gyeongsang National University)
  • 양영민 (우송대학교 철도공학과) ;
  • 육지수 ((주)바이오덴) ;
  • 김지원 (경상대학교 나노신소재융합공학과) ;
  • 이삼행 (경상대학교 나노신소재융합공학과) ;
  • 박주석 (한국세라믹기술원 기업지원본부 기업성장지원센터) ;
  • 김영곤 (조선이공대학교 전자과) ;
  • 이성갑 (경상대학교 나노신소재융합공학과)
  • Received : 2020.09.14
  • Accepted : 2020.09.17
  • Published : 2020.11.01
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Abstract

Heterolayered K(Ta,Nb)O3/Pb(Zr,Ti)O3 thin films on Pt/Ti/SiO2/Si substrates were prepared by a sol-gel process and spin-coating method. The structural and electrical properties were measured to investigate the possibility of application as an electrocaloric effect device. All specimens exhibited dense and uniform cross-sectional structures without pores, and the average thickness of the specimen coated six times was approximately 394 nm. Curie temperatures were observed at 5℃ or less in type-I and 10℃ in type-II specimens, respectively. Type-II specimens coated 6 times showed a relative dielectric constant of 758 and remanent polarization of 9.71 μC/㎠ at room temperature. The maximum electrocaloric effect occurred between 20 and 25℃, slightly higher than their Curie temperature, and the electrocaloric property (ΔT) of the type-II specimens coated 6 times was approximately 1.2℃ at room temperature.

Keywords

References

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