Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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반도체 및 디스플레이 공정용 산화이트륨 연구 동향

  • Published : 2020.06.01
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References

  1. J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara, and K. Uematsu, J. Am. Ceram. Soc. , 90, 2327 (2007). https://doi.org/10.1111/j.1551-2916.2007.01738.x
  2. H. K. Lee, K. S. Cho, and M. Y. Kim, J. Kor. Ceram. Soc., 46, 385 (2009). https://doi.org/10.4191/KCERS.2009.46.4.385
  3. S. J. Park, H. Kim, and S. M. Lee, Kor. J. Mater. Res. , 27, 710 (2017). https://doi.org/10.3740/MRSK.2017.27.12.710
  4. J. He, X. D. Li, J. G. Li, and X. D. Sun, Int. J. Mater. Sci. Eng., 1, 28 (2013).
  5. S. J. Lee and C. H Jung, J. Nanoscien. NanoTechnol. 12, 800 (2012). https://doi.org/10.1166/jnn.2012.5352
  6. Y. Xu, X. Mao, J. Fan, X. Li, M. Feng, B. Jiang, F. Lei, and L. Zhang, Ceram. Int., 43, 8839 (2017). https://doi.org/10.1016/j.ceramint.2017.04.017
  7. M. C. Pantilimon, T. S. Kang, and S. J. Lee, Sci. Adv. Mater., 10, 95 (2018). https://doi.org/10.1166/sam.2018.2863
  8. C. Brecher, G. c. Wei, and W. H. Rhodes, J. Am. Ceram. Soc., 73, 1473 (1990). https://doi.org/10.1111/j.1151-2916.1990.tb09784.x
  9. J. S. Choi, T. Nakayama, and W. T. Bae, J. Kor. Ceram. Soc., 50, 348 (2013). https://doi.org/10.4191/kcers.2013.50.5.348
  10. J. H. Chae, J. S. Park, J. P. Ahn, K. H. Kim, and B. H. Lee, J. Kor. Ceram. Soc., 45, 827 (2008). https://doi.org/10.4191/KCERS.2008.45.1.827
  11. S. M. Na, S. I. Go, and S. J. Lee, J. Kor. Ceram. Soc. , 45, 368 (2011). https://doi.org/10.4191/KCERS.2008.45.6.368
  12. J. S. Choi, T. Nakayama, and W. T. Bae, J. Kor. Ceram. Soc., 50, 348 (2013). https://doi.org/10.4191/kcers.2013.50.5.348
  13. M, J. Park, S. K. Yang, and J. B. Kang, J. Kor. Ceram. Soc., 43, 640 (2006). https://doi.org/10.4191/KCERS.2006.43.10.640
  14. B. Y. Son and M. W. Jung, Kor. J. Mater. Res. 21, 444 (2011). https://doi.org/10.3740/MRSK.2011.21.8.444
  15. F. M. B. Marques, J. Am. Ceram. Soc. , 74, 598 (1991). https://doi.org/10.1111/j.1151-2916.1991.tb04066.x
  16. Y. H. Seong, S. H. Jo, P. Muralidharan, and D. K. Kim, J. Kor. Ceram. Soc., 44, 696 (2007). https://doi.org/10.4191/KCERS.2007.44.1.696
  17. M. Kodo, K. Soga, H. Yoshida, and T. Yamamoto, J. Ceram. Soc. Jpn., 117, 765 (2009). https://doi.org/10.2109/jcersj2.117.765
  18. C. H Jung, J. S. Jang, and S. J. Lee, Met. Mater. Int. , 17, 451 (2011). https://doi.org/10.1007/s12540-011-0624-z
  19. S. J. Lee and C. H. Jung, J. Nanoscien. Nano Technol. , 12, 800 (2012). https://doi.org/10.1166/jnn.2012.5352
  20. J. H. Nan, J. Kor. Ceram. Soc., 34, 1247 (1997).
  21. P. Ernst and G. Barbezat, Surface & Coatings Technology , 202, 4428 (2008). https://doi.org/10.1016/j.surfcoat.2008.04.021
  22. D. M. Kim, Y. S. Oh, S. Kim, H. T. Kim, D. S. Lim, and S. M. Lee, Thin Solid Films. , 519, 6698 (2011). https://doi.org/10.1016/j.tsf.2011.04.049
  23. J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara and K. Uematsu, J Am. Ceram. Soc., 90, 2327 (2007). https://doi.org/10.1111/j.1551-2916.2007.01738.x
  24. S. J. Kim, J. K. Lee, Y. S. Oh, S. Kim, and S. M. Lee, J. Korean Ceram. Soc., 52, 395 (2015). https://doi.org/10.4191/kcers.2015.52.6.395
  25. S. J. Park, H. Kim, and S. M. Lee, Korean J. Mater. Res., 27, 710 (2017). https://doi.org/10.3740/MRSK.2017.27.12.710
  26. D. R. Mumm and A.G.Evans, Acta Mater. , 48, 1815 (2000). https://doi.org/10.1016/S1359-6454(99)00473-5
  27. D. R.Clarke and C. G. Levi, Annu. Rev. Mater. Res., 33, 383 (2003). https://doi.org/10.1146/annurev.matsci.33.011403.113718
  28. D. M. Kim, S. Y. Yoon, K. B. Kim, H. S. Kim, Y.S. Oh, and S. M. Lee, J. Korean Ceram. Soc., 45, 7075 (2008).
  29. B. K. Lee, D. S. Park, W. H. Yoon, J. Ryu, B. D. Hahn, and J. J. Choi, J. Korean Ceram. Soc., 46, 441 (2009). https://doi.org/10.4191/KCERS.2009.46.5.441
  30. J. Akedo, J Am. Ceram. Soc., 89, 1834 (2006). https://doi.org/10.1111/j.1551-2916.2006.01030.x