Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Microstrcture and Mechanical Properties of HfN Films Deposited by dc and Inductively Coupled Plasma Assisted Magnetron Sputtering

직류 및 유도결합 플라즈마 마그네트론 스퍼터링법으로 제조된 HfN 코팅막의 미세구조 및 기계적 물성연구

  • Jang, Hoon (Department of Advanced Materials Science and Engineering, Mokpo National University) ;
  • Chun, Sung-Yong (Department of Advanced Materials Science and Engineering, Mokpo National University)
  • 장훈 (목포대학교 신소재공학과) ;
  • 전성용 (목포대학교 신소재공학과)
  • Received : 2020.04.13
  • Accepted : 2020.04.29
  • Published : 2020.04.30
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Abstract

For deposition technology using plasma, it plays an important role in improving film deposited with high ionization rate through high density plasma. Various deposition methods such as high-power impulse magnetron sputtering and ion-beam sputtering have been developed for physical vapor deposition technology and are still being studied. In this study, it is intended to control plasma using inductive coupled plasma (ICP) antennas and use properties to improve the properties of Hafnium nitride (HfN) films using ICP assisted magnetron sputtering (ICPMS). HfN film deposited using ICPMS showed a finer grain sizes, denser microstructure and better mechanical properties as ICP power increases. The best mechanical properties such as nanoindentation hardness of 47 GPa and Young's modulus of 401 GPa was obtained from HfN film deposited using ICPMS at ICP power of 200 W.

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References

  1. S. Y. Chun, A Comparative Study of TiN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Sputtering. J. Kor. Inst. Surf. Eng., 44(5) (2011) 179-184. https://doi.org/10.5695/JKISE.2011.44.5.179
  2. S. Y. Chun, J. W. Beak, A Comparative Study of CrN Coatings Deposited by DC and Asymmetric Bipolar Pulsed DC Sputtering. J. Kor. Inst. Surf. Eng., 47(2) (2014) 86-92. https://doi.org/10.5695/JKISE.2014.47.2.086
  3. S. Y. Chun, T. Y. Lee, A Comparative Study of TiAlN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering. J. Kor. Inst. Surf. Eng., 47(4) (2014) 168-173. https://doi.org/10.5695/JKISE.2014.47.4.168
  4. W. Lengauer, D. Rafaja, G. Zehetner, and P. Ettmayer, Acta Materialia, The hafnium-nitrogen system: Phase equilibria and nitrogen diffusivities obtained from diffusion couples. Acta Materialia., 44(8) (1996) 3331-3338. https://doi.org/10.1016/1359-6454(95)00438-6
  5. Y. S. Fang, K. A. Chiu, H. Do, L. Chang, Reactive sputtering for highly oriented HfN film growth on Si (100) substrate. Surf. Coat. Technol., 377 (2019) 1-6.
  6. T. Kanzawa, N. Setojima, Y. Miyata, Y. Gotoh, H. Tsuji, J. Ishikawa, Evaluation of hafnium nitride thin films sputtered from a hafnium nitride target. Vacuum, 83(3) (2008) 589-591. https://doi.org/10.1016/j.vacuum.2008.04.036
  7. W. Tillmanna, N. Dias, D. Stangier, M. Tolan, M. Paulus, Structure and mechanical properties of hafnium nitride films deposited by direct current, mid-frequency, and high-power impulse magnetron sputtering. Thin Solid Films 669 (2019) 65-71. https://doi.org/10.1016/j.tsf.2018.10.035
  8. J. Musil, J. Vlcek, A Perspective of Magnetron Sputtering in Surface Engineering. J. Kor. Inst. Surf. Eng., 112(1-3) (1999) 162-169.
  9. T. H. Kim, G. Y. Yeom, A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System. Appl. Sci. Converg. Technol., 28(5) (2019) 131-138. https://doi.org/10.5757/ASCT.2019.28.5.131
  10. K. Feng, Z. Li, Effect of microstructure of TiN film on properties as bipolar plate coatings in polymer electrolyte membrane fuel cell prepared by inductively coupled plasma assisted magnetron sputtering. Thin Solid Films, 544 (2013) 224-229. https://doi.org/10.1016/j.tsf.2013.03.115
  11. D. H. Seo, S. Y. Chun, Growth Behavior of Nanocrystalline CrN Coatings by Inductively Coupled Plasma (ICP) Assisted Magnetron Sputtering. J. Korean Ceram. Soc., 49(6) (2012) 556-560. https://doi.org/10.4191/kcers.2012.49.6.556
  12. S. Y. Chun, S. Y. Lee, Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of VN Coatings. J. Kor. Inst. Surf. Eng., 49(4) (2016) 376-381. https://doi.org/10.5695/JKISE.2016.49.4.376
  13. S. Y. Chun, Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of NbN Coatings. J. Kor. Inst. Surf. Eng., 48(5) (2015) 205-210. https://doi.org/10.5695/JKISE.2015.48.5.205
  14. D. Thorsteinsson, J. Gudmundsson, Growth of HfN Thin Films by Reactive High Power Impulse Magnetron Sputtering. AIP Advances 8 (2018) 1-14.