Acknowledgement
Grant : 고출력 전자빔을 이용한 고세장비 미세홀 가공장비 및 공정기술개발
본 연구는 기계산업핵심기술개발사업 "고출력 전자빔을 이용한 고세장비 미세홀 가공장비 및 공정기술개발" 과제번호(10063367) 연구비 지원으로 진행되었습니다. 이에 감사를 드립니다.
References
- Lee, E. S., Baek, S. Y., & Cho, C. R., "A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses", The International Journal of Advanced Manufacturing Technology, 31(7-8), pp. 762-769, 2007. https://doi.org/10.1007/s00170-005-0247-y
- Kumar, K., & Agarwal, S., "Multi-objective parametric optimization on machining with wire electric discharge machining", The International Journal of Advanced Manufacturing Technology, 62(5-8), pp. 617-633, 2012. https://doi.org/10.1007/s00170-011-3833-1
- Tan, B, "Deep micro hole drilling in a silicon substrate using multi-bursts of nanosecond UV laser pulses", Journal of Micromechanics and Microengineering, Vol.16, p. 109, 2005. https://doi.org/10.1088/0960-1317/16/1/015
- Kurt, T. H., Ferdinand, V. A., OSTENDORF, A., KAMLAGE, G., and NOLTE, S., "Micromachining of metals using ultrashort laser pulses", International journal of electrical machining, Vol.4, pp. 1-6, 1999. https://doi.org/10.2526/ijem.4.1
- Olshanskaya, T. V., Salomatova, E. S., Belenkiy, V. Y., Trushnikov, D. N., & Permyakov, G. L., "Electron beam welding of aluminum alloy AlMg6 with a dynamically positioned electron beam", The International Journal of Advanced Manufacturing Technology, 89(9-12), pp. 3439-3450, 2017. https://doi.org/10.1007/s00170-016-9316-7
- Kang, E. G., Kim, J. S., Lee, S. W., Min, B. K., & Lee, S. J., "Emission characteristics of high-voltage plasma diode cathode for metal surface modification", International Journal of Precision Engineering and Manufacturing, 16(1), pp. 13-19, 2018. https://doi.org/10.1007/s12541-014-0002-8
- Kim, S. H., Jung, S. T., Kim, H. J., & Baek, S. Y., "A study on machining characteristics in vaporized amplification sheets of electron beam", Korea Society of Die & Mold Engineering, 12(2), pp. 46-50, 2018.
- Kim, S. H., Jung, S. T., Kim, H. J., Baek, S. Y., Kim, J. S., & Kang, E. G., "A study on the preparation method of vaporized amplification sheets and electron beam machining characteristics", Journal of Manufacturing Processes, 50, pp. 234-240, 2020. https://doi.org/10.1016/j.jmapro.2019.12.046