참고문헌
- D. S. Park, J. K. Kim, J. Y. Han, E. J. Seong, J. Q. Qia., "Blasted Surface Characteristics in Machining of Glass by Powder Blasting", KSMPE, Vol. 6 pp. 261-266, 2005.
- D. Solignac, A. Sayah, S. Constantin, R. Freitag, M.A.M. Gijs., "Powder blasting for the realisation of microchips for bio-analytic applications", Sensors and Actuators A, Vol. 92, pp. 388-392, 2001. https://doi.org/10.1016/S0924-4247(01)00577-5
- E. Belloy, S. Thurre, E. Walckiers, A. Sayah, M. A. M. Gijs, "The introduction of powder blasting for sensor and microsystem applications", Sensors and Actuators, Vol. 84, pp. 330-337, 2000. https://doi.org/10.1016/S0924-4247(00)00390-3
- G. M. Pharr., "Measurement of mechanical properties by ultra-low load indentation", Materials Science and Engineering A, Vol. 253, pp. 151-159, 1998. https://doi.org/10.1016/S0921-5093(98)00724-2
- H. Wensink, H. V. Jansen, J. W. Berenschot, M. C. Elwenspoek, "Mask materials for powder blasting", J. Micromech. Microeng., Vol. 10, pp. 175-180, 2000. https://doi.org/10.1088/0960-1317/10/2/313
- D. S. Park, D. K. Kang, J. K. Kim, E. J. Seong, J. Y. Han., "Machining and Crack Characteristics of the Glass Cap for OELD by Powder Blasting", Journal of Korean Society of Machine Tool Engineers, Vol. 15, No. 5, pp. 51-58, 2006.
- D. S. Park, M. W. Cho, D. W. Kim, W. S. Cho., "Micro-Pattern Machining Characteristics Evaluation of Si3N4-hBN based Machinable Ceramics Using Powder Blasting Process", Korean Society of Machine Tool Engineers, Vol. 13, No. 2, pp. 33-39, 2004.
- M. W. Cho, W. S. Cho, D. S. Park, J. H. Lee, E. S. Lee, T. I. Seo, D. W. Kim., "Application of Powder Blasting Techniques to Micro-pattern Making Process for Si3N4-hBN Composites" Key Engineering Materials, Vol. 287, pp. 51-56 https://doi.org/10.4028/www.scientific.net/KEM.287.51
- J. J. Kim, J. J. Lee, Y. H. Lee, J. I. Jang, D. G. Kwon., "Surface roughness effect in instrumented indentation: A simple contact depth model and its verification", J. Mater. Res, Vol. 21, No. 12, pp. 2975-2978, 2006. https://doi.org/10.1557/jmr.2006.0370
- Y. H. Lee, J. Y. Kim, Y. H. Huh, S. H. Nahm, and D. I. Kwon., "Strength Assesment of Thin Film Based on the Measurement of Nanoindentation-induced Plastic Deformation Zone", Journal of Korean Institute of Metals and Materials, Vol. 44, No. 10, pp. 678-684, 2006.
- Y. H. Lee, D. I. Kwon., "Micromechanical Analysis of the Effect of Residual Stress on the Nanoindentation Curve", Journal of Korean Institute of Metals and Materials, Vol. 40, No. 12, pp. 1236-1243, 2002.
- D. I. Son, Y. C. Joo, D. I. Kwon., "Evaluation of Young's Modulus and Yield Strength of Al Film Using Microcantilever Beams", Journal of Korean Institute of Metals and Materials, Vol. 39, No. 3, pp. 274-282, 2001.